The invention relates to the manufacture technical field of polysilicon
ingot furnaces, and aims to provide a closed cooling
system of a gas cooled polysilicon
ingot furnace. The
system comprises a heat exchange platform positioned on a supporting column and used for placing a
crucible, wherein a cooling gas channel is arranged in the heat exchange platform; a gas inlet and a gas outlet at two ends of the cooling gas channel are respectively connected with a cooling gas inlet pipeline and a cooling gas outlet pipeline; and the heat exchange platform, the cooling gas inlet pipeline, the cooling gas outlet pipeline, a cooling gas power pump group and a cooler form a closed circulation loop of the cooling gas. Compared with the cooling method of
radiation cooling and
water cooling, the
system related by the invention has strong
gas cooling control capacity and high industrial
controllability; the gas is fed into the heat exchange platform evenly, so that the whole temperature of the heatexchange platform is even, which is in favor of even
nucleation of a
silicon melt at the bottom of the
crucible; and the reducing speed of the temperature at the bottom of the
crucible can be precisely controlled during the
crystal growth.