The invention discloses a production method of ultra-pure electronic grade
phosphoric acid, comprising the following steps of: (1) vaporizing high purity phosphorous oxychloride by heating and allowing phosphorous oxychloride steam to enter a
phosphoric acid generator; (2) heating high purity water to prepare
water vapor, and allowing
water vapor to enter the
phosphoric acid generator; (3) adjusting the
mass ratio of
water vapor to phosphorous oxychloride steam in the phosphoric acid generator, conducting a reaction to generate ultra-pure phosphoric acid and
hydrogen chloride steam, adding phosphoric acid into a liquid collection tank, removing bubbles from
hydrogen chloride and putting it into a
hydrochloric acid liquid trap; (4) heating the obtained phosphoric acid, and separating
hydrogen chloride under vacuum to obtain ultra-pure electronic grade phosphoric acid; and (5) allowing the obtained
hydrochloric acid to enter an
evaporator, vaporizing a
hydrogen chloride gas, carrying out cyclic absorption by the use of an absorption liquid to obtain high purity
hydrochloric acid; and carrying out condensation and despumation on the
tail gas which has undergone absorption, and allowing the
tail gas to pass through a
tail gas
tower and to be discharged into the
atmosphere. According to the invention, the
gas phase reaction between phosphorous oxychloride and water vapor is conducted, contact surface of reactants is enlarged,
reaction speed is effectively controlled, and the contents of water and
hydrogen chloride in phosphoric acid are controlled. Therefore, the ultra-pure electronic grade phosphoric acid can be prepared with a by-product of high purity hydrochloric acid.