The invention provides a piezoelectric array ultrasonic
transducer, and belongs to the technical field of transducers and micro-
processing. The piezoelectric array ultrasonic
transducer comprises array (distributed) type upper electrodes, an integrated common lower
electrode, piezoelectric films, insulation
layers, array elements, a supporting layer, and
monocrystalline silicon basements. The piezoelectric films are arranged between the upper electrodes and the lower
electrode. The insulation
layers are arranged among the upper
electrode, the lower electrode and the piezoelectric films. The array elements arranged on the insulation
layers comprises
acoustic energy transmission and absorption cavities and vibration films at the bottoms of the array elements. The
monocrystalline silicon basements are provided with vibration cavities. By the arrangement of adopting the common lower electrode and the array (distributed) type upper electrodes, same or different thicknesses are adopted in the vibration films at the bottoms of the array elements (the
acoustic energy transmission and absorption cavities) and the piezoelectric films, so that the array elements can operate under either a same working frequency or different working frequencies, comprehensive performances of sensitivity and working bandwidth and stability of the comprehensive performances of the
transducer can be improved effectively, and the piezoelectric array ultrasonic transducer has the advantages that integration is good, packaging is facilitated, industrial production is benefited and the like.