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36results about How to "Stable flatness" patented technology

Substrate holding system and exposure apparatus using the same

Disclosed is a unique and improved substrate holding technique in accordance with an aspect of which there is provided a substrate holding system having a chuck for vacuum attraction and electrostatic attraction of a substrate, and including a ring-like rim for carrying a substrate thereon, a plurality of first protrusions disposed inside the rim, for carrying the substrate thereon, and a plurality of second protrusions disposed inside the rim, for carrying the substrate thereon, wherein a substrate carrying surface area of at least one first protrusion is smaller than a substrate carrying surface area of at least one second protrusion and wherein a smallest interval of the first protrusions is smaller than a smallest interval of the second protrusions.
Owner:CANON KK

Method for machining automobile engine large chain wheels

ActiveCN103659203AFine grinding allowance is smallStable amount of grindingSprocketEngineering
The invention relates to a method for machining automobile engine large chain wheels. The method is characterized by including the following steps that uncoiling, straightening, and fine blanking are performed to form parts, wherein multiple taper holes are formed in the circumferential direction of each part, a shaft hole is formed in the center of each part, and the shape of each part is in a tooth shape; whether hard scratches exist on the surfaces of the parts or not is checked, then the products without the scratches are selected for cleaning, and it is guaranteed that residual water drops, corrosion and fine blanking oil do not exist; the parts are installed in a double-end-face grinding machine for surface coarse grinding; chamfering machining is performed on the two faces of tooth parts of the parts; burrs generated by the chamfering machining are removed; high-frequency quenching heat treatment is performed; shot blasting machining is performed; single-face accurate grinding is performed on the surfaces of the parts; the parts are placed into the double-end-face grinding machine again for surface accurate grinding; countersink milling machining is performed on the shaft holes formed in the centers of the parts; burr removal is performed; demagnetization is performed; cleaning, packaging and warehousing are performed. The method not only can meet the requirements for size precision and position precision of the products, but also enables the machining technology of the parts to be in the simplest and optimal state, and machining cost is reduced.
Owner:HUBEI AVIATION PRECISION MASCH TECH CO LTD

Special clamp for CNC (computer numerical control) machined groove and clamping method

The invention discloses a special clamp for CNC machined groove. The clamp comprises a bottom frame and a clamp main board, wherein the bottom frame is delta-shaped; one side of the raised part in the middle of the bottom frame extends outward to form a supporting plate; the clamp main board is arranged on the side surface of the other side of the raised part; the clamp main board is T-shaped; the clamp also comprises three fixing units and three positioning units; the fixing units specifically comprise press blocks and M10 fixing screws; the press blocks are fixed on the bottom frame through the M10 fixing screws; each positioning unit specifically comprises two positioning pins. The clamp has the advantages that the integrated design and the positioning mode of the clamp are adjusted, positioning of holes and shapes are integrated in the clamp, three machining processes are accomplished on one clamp, the positioning mode of the holes is accomplished through the two positioning pins at opposite angles, the planeness stability of workpieces is properly controlled, the difficulty in machining of the groove is solved, and the machining precision and the production efficiency are improved.
Owner:强龙科技(苏州)有限公司

GCS low-voltage draw-out type switch cabinet with moisture-proof performance

The invention relates to the technical field of switch cabinets, in particular to a GCS low-voltage draw-out type switch cabinet with moisture-proof performance, which comprises a supporting structure, a sealing structure, a storage structure, an accommodating structure, a protection structure and a transmission structure, the arrangement of the sealing structure facilitates the sealing of the supporting structure, and the arrangement of the supporting structure facilitates the adjustment of the flatness of the accommodating structure in the same direction, thereby greatly improving the installation efficiency and quality of the accommodating structure. The protection structure can abut against the storage structure, the storage structure can be protected conveniently through the protection structure, misoperation of a rotary knob in the storage structure is effectively prevented, meanwhile, the storage structure is conveniently limited, and the stability of the storage structure is improved; and the transmission structure is conveniently driven through the protection structure, so that the transmission structure drives the storage structure to abut against the accommodating structure, the sealing performance between the storage structure and the accommodating structure is better, and the moisture-proof performance is greatly improved.
Owner:南通苏泰电气有限公司

Stress relief stamping die, stress relief stamping method and metal plate stamping part

The invention discloses a stress relief stamping die, a stress relief stamping method and a metal plate stamping part. The stress relief stamping die is used for stamping a convex hull on a plate bodyof a metal plate and comprises a male die and a female die, the male die comprises a pressing head protruding towards the female die, the female die comprises a forming cavity corresponding to the pressing head, the forming cavity and the pressing head are matched to form the convex hull, the male die comprises a step surrounding the periphery of the pressing head, and the female die comprises astep groove surrounding the periphery of the forming cavity. The step surrounding the periphery of the pressing head is arranged on the male die, and the step groove surrounding the periphery of the forming cavity is arranged on the female die, so that during stamping, a circle of externally convex step part can be formed on the periphery of the convex hull of the metal plate stamping part, so that the internal stress between the convex hull and the plate body is sheared, the deformation of the plate body caused by relief of the internal stress is effectively limited, the stability of the flatness is guaranteed, and the stable operation of equipment is facilitated.
Owner:沪华五金电子(吴江)有限公司

A gcs low-voltage withdrawable switchgear with moisture-proof performance

The invention relates to the technical field of switch cabinets, in particular to a GCS low-voltage withdrawable switch cabinet with moisture-proof performance, including a support structure, a sealing structure, a storage structure, a storage structure, a protection structure and a transmission structure; the setting of the sealing structure is convenient for The support structure is sealed, and the setting of the support structure is convenient to adjust the flatness of the storage structure in the same direction, thereby greatly improving the efficiency and quality of the installation of the storage structure; the protection structure can conflict with the storage structure, and the setting of the protection structure is convenient. The storage structure is protected, thereby effectively preventing misoperation of the internal knobs of the storage structure, and at the same time, it is convenient to limit the storage structure and improve the stability of the storage structure; it is convenient to drive the transmission structure through the protection structure, so that the transmission structure drives the storage structure and the storage structure conflicts between them, thereby making the sealing performance between the storage structure and the storage structure better, thereby greatly improving the moisture-proof performance.
Owner:南通苏泰电气有限公司

Large-size silicon wafer double-sided polishing method

The invention provides a large-size silicon wafer double-sided polishing method. The method comprises the following steps of: controlling the pressure of a pressure plate arranged above a silicon wafer, and selecting a rough polishing solution with a corresponding particle size to roughly polish the double sides of the silicon wafer; and adjusting the pressure of the pressure plate, and selecting a fine polishing solution with a corresponding particle size to carry out fine polishing on the double sides of the silicon wafer, wherein the rough polishing solution or the fine polishing solution flows to an upper polishing pad and a lower polishing pad which are arranged on the two sides of the silicon wafer through the same main pipeline and the pressure plate; the fine polishing solution at least comprises a polyhydric alcohol compound; and the rough polishing solution and the fine polishing solution both comprise a mixed solution of SiO2 and NH4OH. After rough polishing and fine polishing are sequentially conducted on the silicon wafer, water film treatment is conducted on the double sides of the silicon wafer, an adhesive on the surface of the silicon wafer can be completely removed, and the cleaning effect is good; and the flatness within 0.5 [mu]m can also be obtained.
Owner:TIANJIN ZHONGHUAN ADVANCED MATERIAL TECH +1
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