The invention discloses a dual-channel space-time mixing phase shifting
Fizeau interferometer based on orthogonal polarized light. The dual-channel space-time mixing phase shifting
Fizeau interferometer based on the orthogonal polarized light comprises a
light source and
light source adjusting unit, a light splitting collimation unit, a
signal extraction and time-domain phase shifting unit, an imaging unit, a space-domain phase shifting unit and an
image acquisition unit, wherein the
light source and a light source adjusting unit comprises a light source, an
optical filter, a polarization adjuster and a
light beam spread lens and spatial filtering module; the light splitting collimation unit comprises a first unpolarized
beam splitting prism and a collimating lens; an imaging objective lens serves as the imaging unit; the space-domain phase shifting unit comprises a 1 / 2 wave plate, a second unpolarized
beam splitting prism, an x-direction polaroid and a z-direction polaroid, and dual channels are formed; the
image acquisition unit comprises an x-direction CCD and a z-direction CCD; the first unpolarized
beam splitting prism is arranged at the position of an intersection between the x direction and the z direction, and the z-direction CCD and the x-direction CCD are arranged on the two channels, and are used for collecting interference fringe graphs, with the phase shifting amount, of objects to be measured. The dual-channel space-time mixing phase shifting
Fizeau interferometer based on the orthogonal polarized light has the orthogonal polarization space-domain phase shifting function and the orthogonal polarization time-domain phase shifting function.