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270results about How to "Reduce queuing time" patented technology

A method and system for electric automobile's charging reservation and a charging pile, a reservation server

The invention discloses a method for electric automobile's charging reservation. The method comprises the following steps: that a reservation server acquires the information about the usage of charging piles in the charging station; the reservation server receives the reservation request sent by the user, wherein the reservation request comprises the vehicle information about the electric automobile; and the reservation server distributes a charging pile for the electric automobile in accordance with the reservation request and the usage information. The method for electric automobile's charging reservation in the invention may more conveniently make a charging reservation for the electric automobile, with such one action, addresses the problem of restriction of the number of charging piles when the electric automobile needs to be charged, and brings convenience to people's life. The invention also discloses a system for electric automobile's charging reservation, a charging pile and a reservation sever.
Owner:BYD CO LTD

Electric vehicle intelligent queuing method capable of improving charging efficiency

The invention provides an electric vehicle intelligent queuing method capable of improving charging efficiency. The method is characterized by comprising the following steps that firstly, an electric vehicle driver is in connection with an intelligent charging network and a vehicle-mounted computer of an electric vehicle through an intelligent terminal; secondly, the intelligent terminal receives electric vehicle information transmitted by the vehicle-mounted computer in real time, wherein the electric vehicle information comprises electric vehicle serial numbers, residual electricity quantity, driving mileage and charging early-warning signals; thirdly, after the intelligent terminal receives the charging early-warning signals, the intelligent terminal is in communication with the intelligent charging network server and issues a charging request to the intelligent charging network server, ..., and eleventh, the turned electric vehicle is connected with an intelligent charging pile to be charged. According to the method, through a smart phone, the charging pile can be looked for, and through the residual electricity quantity of the electric vehicle, waiting time and predicated charging time required by charging several closest charging piles can be accurately predicated, the queuing efficiency is improved, and the queuing time is shortened.
Owner:BEIJING FLASH CHARGE NETWORK TECH CO LTD

Quick layer-3 message multiplexing

A technique for implementing a flattened Layer 3 stack model within a Global System for Mobile (GSM) communication system so that a centralized multiplex function associated with certain functions handles messages. The multiplex function dispatches radio resource (RR), mobility management (MM), or Connection Management (CM) function messages directly to the respective functional layers without first requiring such messages to pass through a stack. In the preferred arrangement, the multiplex function sub-L3 handles only uplink messages, allowing downlink messages to travel through the sub-layer stack without employing any bridging entity. The multiplex function can run independently of any of the other functions in Layer 3 or can be implemented as part of the message passing part of the Layer 2 running body so that the Layer 2 messages are routed directly to a respective RR, MM, or CM function. The flattened protocol stack permits time-sensitive messages related to location update, handover, or cell reselection and other time-critical messages to be handled more efficiently.
Owner:CISCO TECH INC

Remote query-reservation type queuing machine and remote query-reservation queuing method

The invention provides a remote query-reservation type queuing machine and a remote query-reservation queuing method, which belong to the technical field of automation. The invention aims to provide the remote query-reservation type queuing machine and the remote query-reservation queuing method capable of performing remote query, reservation and queue reminder. The queuing machine consists of an on-site queuing machine and a server, wherein the on-site queuing machine and the server are connected through networks; the server is connected with client terminals through the networks; and the server is used for receiving and replying to query, reservation and reminder requests sent by the client terminals. After succeeding in reservation, the queuing method can also return unique reservation string codes as personal identification codes to clients. Because of the queuing machine and the queuing method, the clients can avoid going blindly by remotely querying on-site queuing information, can save queuing time through remote reservation, and effectively utilizes queuing time through reminder service so as to reduce the pressure of on-site queuing.
Owner:深圳市华骏电气有限公司

Portable networked self-service terminals for product/service selection

This patent relates to a method and apparatus to provide portable networks of portable (moveable, e.g. table top or free-standing on wheels) self-service terminals designed to perform any or all of the following: product / service selection, payment acceptance, payment authorization or verification, communication via wire or wireless means for purposes including requesting product, service and / or payment authorization from local or remote network servers, to generate payment indicia in the form of tokens or tickets dispensed, such product / service selection / payment indicia to be human readable or optionally machine readable via bar code or other coding schemes, and optionally to include within a network, redemption terminals capable of reading the machine readable indicia, capturing and vaulting the tickets or tokens and generating confirmation of receipt of the payment indicia via visual or audible means to communicate to an attendant staff person. Self-serve product / service selection and payment is accomplished by user input data entry to a display screen with aligned buttons or “touch screen” capability.
Owner:MURRAY RICHARD HAROLD +1

Scenic area tourist chain travel integration providing method

The invention provides a scenic area tourist chain travel integration providing method, and relates to the technical field of tourism service software development. The problem of poor travel experience caused by lack of effective real-time data guidance during the travel of a tourist is solved. The method comprises the steps of real-time prediction of the crowding degree of queuing in a scenic spot, accurate optimal travel route pushing and mining and analysis of feedback data of tourists. The method specifically comprises the steps that the information of a scenic area and the number of tourists in each scenic spot are recognized and calculated; the crowding degree of the scenic spot is determined according to an evaluation index, and the crowding degree is visually displayed on a map toprovide tourists with intuitive judgment; and at the same time, according to the user geographic coordinate and user demand data of a system platform, a path optimization algorithm is used to accurately recommend a reasonable route. The queuing waiting time of a user is minimized, and the traffic experience is improved. In order to form benign feedback, data used by tourists are analyzed to acquire scenic spots prone to serious queuing crowding and the preference for different recommended routes.
Owner:HARBIN INST OF TECH

Self-service shopping system for supermarket

The invention discloses a self-service shopping system for a supermarket. The self-service shopping system for the supermarket comprises a server, an entrance monitoring device, a plurality of self-service pre-shopping machines, checkout terminals, exit monitoring devices and alarm devices, wherein the entrance monitoring device comprises identification codes and an entrance code scanning machine and is arranged at an entrance of the supermarket; the self-service pre-shopping machines are arranged in an internal shopping area of the supermarket in a scattered manner; each self-service pre-shopping machine is used for acquiring the identity and the shopping list of a user when the user self-scans the corresponding identification code and bar codes on commodities; the checkout terminals are arranged at exits of the supermarket; unpaid shopping lists and paid shopping lists are stored in the checkout terminals; the exit monitoring devices are arranged on the outer side of the entrance of the supermarket, non-shopping passages and outer passages of the checkout terminals respectively; each alarm device is arranged on the corresponding exit monitoring device; when a certain exit monitoring device detects the commodities of which the codes are not scanned and / or the non-cancelled identification codes, the corresponding alarm device is started to give an alarm. According to the self-service shopping system for the supermarket, customers can timely check out after fully enjoying shopping, and the time of the customers is saved.
Owner:李开成

System and method for providing an early notification when paging a wireless device

A system and method for a server to provide an early notification to a target group devices when paging a wireless device during a push-to-talk (PTT) communication. When a wireless device is ready to transmit a PTT communication, a message is sent from the wireless device to a server that then sends an early PING message to a base station while processing a call request message from the wireless device. After processing the call request message, the server sends an announce message to the base station. On receipt of the PING message, the base station sends a paging message to all targeted devices while processing the announce message. The early PING message causes a communication channel to be established between a targeted device and the base station, and the communication channel can then be used by the announce message with less set-up time.
Owner:QUALCOMM INC

Queuing control system and method

The invention relates to a queuing control system, which comprises an input and output module, a predetermined module, a reminding module, a notification module and a dynamic queuing module. The invention also provides an application server containing the queuing control system and a queuing calling system comprising the application server. The invention also provides a queuing control method, which comprises the following steps: receiving the predetermined information sent by the users, processing the predetermined information, determining whether the predetermined request of the users can be accepted or not, analyzing the reminding information, sending the reminding information to the users when the reminding condition is satisfied, determining the user's turn, notifying the user if the user is in turn. According to the invention, the users can flexibly predetermine the business, effectively use the waiting time for queuing, acquire the queue status on real time, delay the own queue or exit the queue and make an appointment with the specialist clinic, thereby the social resource can be saved.
Owner:TELEFON AB LM ERICSSON (PUBL)

Clustered surface preparation for silicide and metal contacts

A cluster tool is provided for the implementing of a clustered and integrated surface pre-cleaning of the surface of semiconductor devices. More particularly, there is provided a cluster tool and a method of utilization thereof in an integrated semiconductor device surface pre-cleaning, which is directed towards a manufacturing aspect in which a chamber for performing a dry processing chemical oxide removal (COR) on the semiconductor device surface is clustered with other tools, such as a metal deposition tool for silicide or contact formation, including the provision of a vacuum transfer module in the cluster tool.
Owner:META PLATFORMS INC

Intelligent fueling management system and method based on cloud platform

The invention provides an intelligent fueling management system and method based on cloud platform. The intelligent fueling management system comprises: an operation management unit for monitoring and managing the gas station data and gas station equipment of each gas station in real time; a gas station big data unit using a cloud platform server to save and process gas station data; a data acquiring unit for acquiring the gas gun state data of the gas station in real time through the various gas guns arranged in the gas station and accomplishing the data uploading of the gas gun state data; a gas station service application unit for checking gas station data and accomplishing booked applications and transaction checks; and a transaction processing unit for matching the booked application of parked cars for fueling and the gas gun state data, generating fees and accomplishing fee settlement. The structure of the system is simple; the operation is fast, convenient, safe and reliable. So, the system and the method can effectively increase the automation of fueling, can effectively reduce pressure on gas stations and can enhance the reception ability of gas stations in rush hours.
Owner:KAIDAER SCI & TECH DEV SHENZHEN

Processing method for optimization of inter-process communication of embedded operating system

ActiveCN104346229AMeet the requirements of communication efficiencyWrite lessInterprogram communicationOperational systemManagement process
The invention discloses a device and a method for optimization of inter-process communication of an embedded operating system. The method comprises the following steps: initializing a management process to determine operation information of system equipment; initializing a characteristic information structural body and the equipment; establishing a real-time memory library; establishing a channel process message sharing memory space, a management process message sharing memory space, the semaphore of the channel process message sharing memory space and the semaphore of the management message sharing memory space; mapping the channel process message sharing memory space and the channel process characteristic information structural body; establishing channel processes according to the operation information and transferring a management message to the corresponding channel process; entering the management process, setting the semaphore of the management message, and reading the management message which is less than or equal to the semaphore of the management message. According to the device and the method, the problems of useless message transfer and low message processing efficiency existing in a message transfer mechanism established by using the sharing memories under the condition of communication among multiple processes of the embedded operation system are solved.
Owner:STATE GRID CORP OF CHINA +3

Airport terminal queuing information prompt method

The invention discloses an airport terminal queuing information prompt method. According to the method, acquired queuing video images are transmitted to a server through a queue detection module; continuous image counting of human heads is carried out by a server-side measurement module, a queuing model is utilized to calculate the real-time queuing waiting time, historical queuing data and flightplans are utilized to predict the queuing waiting time at different time periods, the real-time queuing waiting time and the queuing waiting time information at the different time periods are generated, including image acquisition and human head counting, and real-time queuing waiting time measurement, queuing time prediction at the different time periods and queuing information generation are carried out; an information display module refers to transmitting the queuing information to a user through a mobile phone client and an airport display screen. The method is advantaged in that the real-time waiting time and the predicted waiting time are calculated, passengers are facilitated to master the real-time queuing information, queuing pressure of the passengers in an airport is reduced, experience of the passengers in the airport is improved, and channels for airports and airlines to better serve the passengers are provided.
Owner:CIVIL AVIATION UNIV OF CHINA

Method, system, and network entity, for adaptive reservation of channelization codes and power

The invention provides a method, system, and network entity for adaptive setting or reservation of channelization codes and / or power for downlink channel in a communication network, in particular for DSCH and HS-DSCH, using parameters (PtxDSCHallowed, SFmin) for minimum allowed Spreading Factor, SF, and / or allowed power level, the parameters being set depending on the traffic load, the total cell load and / or the availability of channelization codes.
Owner:NOKIA CORP

Fully self-service chest radiography system and fully self-service chest radiography implementation method

The invention discloses a fully self-service chest radiography system and a fully self-service chest radiography implementation method. In the fully self-service chest radiography system, a patient information acquisition module is used for acquiring the patient information stored in a patient identification card; a charging, registering and confirming module is used for registering and confirming the self-service chest radiography related information according to the information acquired by the patient information acquisition module, and collecting corresponding fee; a radiographing position regulation system is used for ensuring the accuracy of the radiographed part by three-dimensional adjustment; a DR (Digital Radiography) system finishes the chest image radiographing work; a PACS (Picture Archiving And Communication System) system transmits the image material to an RIS (Radiology Information System); the RIS system processes and diagnosis the image material; a message server is used for realizing character and voice broadcasting of messages; a self-service image taking module is used for proposing the printing of the image material and a diagnostic report; a touch display module is used for displaying information and external information input; and a radiographing control processing center controls each component in the radiography system. Due to the fully self-service chest radiography system, the queuing time of the patients is shortened greatly, and the working efficiency of radiography in hospitals is obviously improved.
Owner:SHANGHAI PUDONG NEW AREA PEOPLES HOSPITAL

Method and device of service processing, self-service terminal device and storage medium

The invention belongs to the technical field of electronics and provides a method and a device of service processing, a self-service terminal device and a storage medium. The method comprises steps ofacquiring service index information of a user; sending a pre-filling request message sent by a background server; if receiving a request success message returned by the background server, acquiring the pre-filling message according to the request success message; and according to the pre-filling message, finishing a corresponding service processing process. According to the invention, it is achieved that a user is capable of managing bank services directly according to the pre-filling message when using a self-service terminal device, so the process of recording service data required by the service processing on the self-service terminal device is omitted, service processing time is saved, and service processing efficiency is improved; in case of limited self-service terminal devices, queuing time of users can be effectively reduced; and banks do no need to add more self-service terminal devices, so cost investment of the banks is reduced.
Owner:WORKWAY SHENZHENINFORMATION TECH CO LTD

Resource management system

InactiveUS8219430B1Minimize “ available time ”Reduce queuing timeInstrumentsWork planResource Management System
A resource management system includes a work plan builder module configured to build work plans for workers. The work plan builder module is configured to allow each worker to specify, for each of a plurality of different time periods, one of a plurality of different activities that the worker plans to perform during that time period. The work plans built by the work plan builder module are stored in a computer-accessible memory.
Owner:NINTENDO CO LTD

On-line hospital management platform

The invention relates to the technical field of Internet medical care, in particular to an online hospital management platform. The online hospital management platform comprises an online hospital service system, a server and a user terminal, wherein the server includes a database; the database is used for storing doctor information; the server is used for performing identity authority authentication on a user when the user logs in the online hospital service system through the user terminal, and when the server approves that the log-in user is a patient, the server sends the doctor information to the user terminal; the server is used for storing the selection result of the user in the database when the patient selects a doctor; the server is used for matching the doctor information in thedatabase according to the selection result of the user, binding the successfully matched doctor with the patient, and sending registration inquiry information to the user terminal of the patient; andthe patient selects on-line registration service according to the registration inquiry information, or carries out on-line inquiry service with the bound doctor. The online hospital management platform enables a patient to visit a doctor on line for inquiry and diagnosis, thus saving the time for registration and the time for waiting and queuing, and allowing the patient to receive timely treatment.
Owner:广州宸量信息科技股份有限公司

Outpatient appointment registration system based on Internet medical service

The invention discloses an outpatient appointment registration system based on Internet medical services. The outpatient appointment registration system comprises a user registration module, a sectionoffice information management module, a patient information management module, an outpatient scheduling management module, an outpatient appointment module and an appointment recording management module that communicate with a management module. A patient can quickly and conveniently search basic information of a hospital and make an appointment for visiting a doctor through a computer, a smart phone or other devices in the Internet. By using the system, the patient can make all preparations before visiting a doctor, thereby saving a lot of time for queuing. Furthermore, the hospital can further optimize resource configuration and perform various management tasks in a more standard and more efficient manner, thus greatly improving the service quality and keeping improving economic incomesof social reputation units.
Owner:HARBIN GUANGKAI TECH DEV

Intelligent shopping cart system based on WeChat public platform and method

The invention relates to an intelligent shopping cart system based on the WeChat public platform and a method. The system comprises a supermarket shopping platform used for querying and acquiring goods information according to bar code information sent by control equipment, an intelligent handset equipped with WeChat software, scanning equipment, the control equipment and display equipment, wherein a WeChat account and a bank card are bound, the intelligent shopping cart system can be logged in through the control equipment, an order is paid through the WeChat account after a shopping list is determined, bar codes of goods are scanned and are then sent to the control equipment, and the control equipment is used for parsing the bar code information, sending the parsed bar code information to the supermarket shopping platform and sending goods information fed back by the supermarket shopping platform to the display equipment. Through the intelligent shopping cart system based on the WeChat public platform and the method, convenience is provided for customers, queueing time in front of a cashier counter is saved, moreover, cost can be saved for supermarkets through the intelligent shopping cart system, and cost for cashier employment is further saved.
Owner:江苏睿博信息科技股份有限公司

Supermarket payment system and method

The invention relates to a supermarket payment system and method. The system comprises ultrahigh-frequency RFID electronic tags, an ultrahigh-frequency RFID reader-writer, a gravity sensing device, a local processor, a cloud server and a commodity settlement device. The method comprises the following steps of: reading all the commodities labelled with the ultrahigh-frequency RFID electronic tags on a cashier desk at once through the ultrahigh-frequency RFID reader-writer below the cashier desk; comparing a total commodity weight measured by the gravity sensing device and a total commodity weight calculated by the local processor and the cloud server; when the difference between the two total commodity weights is in a preset range, namely, when information of all the to-be-settled commodities is read, generating payment information to be displayed by the commodity settlement device, and completing payment by consumers through code scanning. According to the supermarket payment system and method, the queueing time of the consumers can be shortened, the supermarket cashier efficiency can be improved and the labor cost can be saved.
Owner:任飞翔

Automatic dispensing machine for traditional Chinese medicine

The invention discloses an automatic dispensing machine for traditional Chinese medicine. The automatic dispensing machine for the traditional Chinese medicine comprises a control panel, a traditional Chinese medicine transferring device, a weighing device and a packing device. The traditional Chinese medicine transferring device, the weighing device and the packing device are all electrically connected with the control panel. The traditional Chinese medicine transferring device comprises a first conveying device and multiple medicine storage pots arranged on the first conveying device. Each medicine storage pot is provided with a feeding device. The weighing device comprises a second conveying device and at least one medicine dispensing cup fixed to the second conveying device. Each medicine dispending cup is provided with a weighing sensor. The multiple medicine storage pots rotate circularly along with the first conveying device. One of the multiple medicine storage pots is selectively aligned with one medicine dispensing cup. The packing device packs the traditional Chinese medicine in the medicine dispensing cups. The automatic dispensing machine for the traditional Chinese medicine can achieve full-automatic accurate-weighing dispensing of the traditional Chinese medicine.
Owner:LAUNCH TECH CO LTD

Intelligent parking space managing and charging method and system for parking lots

The invention relates to the technical field of intelligent vehicles, and discloses an intelligent parking space managing and charging method and system for parking lots. The method includes the following steps: when a vehicle drives into a parking space, a video parking space detection device collects the parking space image information and the license plate number information of the current vehicle, and uploads the collected information to a parking lot server; the parking lot server records the parking start time, the parking space image information and the license plate number informationof the current vehicle, and sends the parking information of the current vehicle to an account corresponding to the license plate number; when the vehicle drives away from the parking space, the videoparking space detection device collects the parking space image information and the license plate number information of the current vehicle, and uploads the collected information to the parking lot server; and the parking lot server records the departure time of the current vehicle, calculates the payable fare and sends the payable fare information to the account for a user to pay the fare. The method makes it convenient for users to make self-service payment and for the staff to manage parking space information.
Owner:CHERY AUTOMOBILE CO LTD

Intelligent registering and interrogation medical system

The invention provides an intelligent registering and interrogation medical system which comprises an identity information acquiring module, a human body model module and a registering module, whereinthe identity information acquiring module is used for acquiring and analyzing identity information. The human body model module is used for performing matching displaying of the human body model according to the identity information. The human body model and the parts of the human body are in one-to-one correspondence. A user performs part selection according to the human body model. The registering module is used for finishing a registering operation according to the part and the identity information. The intelligent registering and interrogation medical system can effectively settle a problem of long queues for registering, diagnosis and charging in a hospital and improves diagnosis efficiency of the user in the hospital.
Owner:佛山市为博康医疗科技有限公司

Method and device for touring route recommendation, and storage medium

The invention discloses a method for touring route recommendation. The method comprises the following steps: according to the number of queuing people of each scenic spot at the current time, the travel duration of each scenic spot and the distance between each scenic spot and a tourist, the travel duration currently needed by the tourist to travel the scenic spots is calculated, and all routes from the tourist to the scenic spots are arranged in an exhaustive mode; and the travel duration of each scenic spot route is calculated according to the travel duration currently required by the tourist to travel each scenic spot, and the scenic spot route with the shortest time consumption is taken as a recommended route. Through the steps, the tourism efficiency can be improved, shunting can be assisted, the queuing pressure of tourist attractions is reduced, and the purposes that tourists expect to reduce the queuing time and finish tourism are well achieved. The invention further disclosesa device for touring route recommendation, and a storage medium.
Owner:EVERGRANDE SMART TECH CO LTD

Wireless safety networking system and method for financial grid point terminal

The invention provides a financial network terminal wireless safe network deployment system and a method thereof. The system includes: an interface router, a center VPN encrypting fire wall, a AAA software authentication server, a wireless CDMA router, wherein, the interface router is a network equipment for establishing special line connection by a financial center and CDMA operator.
Owner:北京神州数码云科信息技术有限公司

Intelligent-community-based intelligent medical system and implementation method

InactiveCN110491484AConvenient online submissionSaving awarenessMedical communicationReservationsConsultation systemDisease
The invention relates to an intelligent-community-based intelligent medical system and an implementation method. The system comprises a medical service platform, a data processing platform and a medical service platform; the medical service platform includes an online disease submission system, a message service system, an appointment system and a history consultation system; the data processing platform includes a medical treatment classification database, an intelligent recommendation system and a personal condition history data system; the medical service platform includes a medical resource allocation system and a diagnosis result feedback system; the medical resource allocation system includes a medical examination project module and an expert module. Accordingly, users can submit illnesses online conveniently, and a rich medical database is adopted for conducting preliminary diagnosis on the illnesses, and a lot of time for consultation is shortened; meanwhile, the users can havea clearer understanding of their own illnesses, and communication of the doctors and patients on the illnesses is sped up; the users can make appointments for registration through the internet, hospital resources are updated in real time, unnecessary queuing time is shortened, and personalized medical needs of people are met.
Owner:上海好医通健康信息咨询有限公司

Outpatient and emergency transfusion management system based on RFID (Radio Frequency Identification Devices) technology

The invention relates to an outpatient and emergency transfusion management system based on RFID (Radio Frequency Identification Device) technology, wherein a hospital information system and a digitalized transfusion chamber are seamlessly linked together by combining an outpatient and emergency transfusion management intellectualized system based on the RFID technology with a wireless network technology; and a discrete distribution management is updated to be a methodic digitalized management; Compared with the conventional transfusion mode, the outpatient and emergency transfusion management system has the advantages that by the reconfirmation on patients and transfusion medicines of the RFID radiofrequency non-contact function and the wireless transmission system of a therapy vehicle, the possible medical errors can be further reduced. A more reliable guarantee is provided for therapy and nursing for transfusion patients; and by the system integration integrating software functions and hardware functions such as identity authentication and therapeutic treatment and rescue, a more comprehensive management mode is provided for therapy for the transfusion patients in a hospital, and a solution scheme which is advanced in technology, safe, reliable and feasible is provided for transfusion management.
Owner:SHANGHAI PUDONG NEW AREA PEOPLES HOSPITAL

Automatic meal selling machine for dining hall

The invention discloses an automatic meal selling machine for a dining hall. An empty bin is arranged inside the automatic meal selling machine. Both front and rear surfaces of the empty bin are provided with automatic lifting transparent windows. The tail end of a belt conveyer which is connected into the empty bin from the inside of the dining hall and is used for conveying dinner plates is arranged at the bottom of the empty bin. A belt extends into the empty bin from the transparent window positioned at the rear surface. A magnetic card automatic cashing machine and a touch screen for showing sample meals, publishing a menu and price and ordering are arranged above the empty bin. A plurality of automatic meal selling machines can be arranged beside a selling window of the dining hall, so that part of diners are diverted and the diners are unnecessary to queue up before the selling window in a centralized mode, and thus, the time of the diners is greatly saved.
Owner:THE SECOND FOREIGN LANGUAGE SCHOOL AFFILIATED TO SHANGHAI NORMAL UNIV

Prevention of trench photoresist scum

Methods of preventing photoresist scum formation for etch processes for patterning material layers of semiconductor device material layers are disclosed. A treatment of N2 and O2 is used to prevent the formation of photoresist scum. The treatment may be performed in-situ, and may be performed during the etch process, after the etch process, or both. The treatment is particularly beneficial when implemented during the patterning of low dielectric constant material layers, and when used for the formation of isolated via patterns.
Owner:TAIWAN SEMICON MFG CO LTD
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