The invention provides a device for calibrating space charge density measurement equipment, and the device comprises a power supply, an upper electrode plate, a lower electrode plate, insulating supporting columns, an arc light lamp, a galvanometer, a platform, and a fan. The positive and negative electrodes of the power supply are respectively connected with the lower and upper electrode plates through wires, and the lower and upper electrode plates are supported by the insulating supporting columns. The galvanometer is disposed on a wire between the negative electrode of the power supply and the upper electrode plate. The arc light lamp is disposed at the edge of the lower electrode plate, and the fan is located above the arc light lamp. The platform of the space charge density measurement equipment is placed between the upper electrode plate and the lower electrode plate. The device is clear in principle, is simple in structure, is low in manufacture cost, is safe and convenient for use, is large in calibration range, and is suitable for the calibration of different types of space charge density measurement equipment. The device is mainly used for the calibration of the space charge density measurement equipment based on an ion counting method, a Faraday cage method, a charge screening method and a probe array method.