33results about How to "Large calibration range" patented technology

The present invention provides gas calibration method for semiconductor equipment. After certain amount of gas is introduced through mass flowmeter to closed chamber, the pressure change before and after gas introduction is measured and inside gas mass change is calculated based on the gas state equation, so as to judge whether the mass flowmeter has normal operation. Compared with available technology, the present invention has the advantages of wide calibration range, fast calibration, low cost and excellent calibration effect.

The invention relates to a photoelectric response characteristic calibration method for a two-dimensional imaging device, which comprises a ray diffraction grating, a focusing optical system, a two-dimensional imaging device to be calibrated and a computer system, wherein an incident light beam for calibrating the two-dimensional imaging device is a light beam parallel to the plane, the light beam is imaged on the photosensitive surface of the two-dimensional imaging device after being modulated by the space intensity of the ray diffraction grating and being converged by the focusing optical system, the incident light beam forms a series of diffraction sub light spots with modulated light intensity on the photosensitive surface of the two-dimensional imaging device through the beam splitting characteristic of the ray diffraction grating, a plurality of groups of measured data are fused through peak value measuring data of each diffraction sub light spot and peak value theoretical dataobtained by theoretical calculation, the measured data and the corresponding theoretical data are obtained, the two groups of data are combined for completing the photoelectric response characteristic calibration of the two-dimensional imaging device. The photoelectric response characteristic calibration method has high light energy utilization rate, is applicable to the photoelectric response characteristic calibration of the two-dimensional imaging device under the condition with strong light sources and is also applicable to weak light sources, and the calibration range is enlarged throughthe fusion of a plurality of groups of measured data.

The present invention discloses an impact test system based on an integral Hopkinson rod PVDF sensor. The invention belongs to the technical field of PVDF sensor test calibration, specifically, relates to an impact test system based on an integral Hopkinson rod PVDF sensor. The present invention is to solve the problem that existing split Hopkinson rods can only calibrate one PVDF sensor per shockpulse, for example, multi-sensor simultaneous calibration will result in uneven distribution of shock pulse signal and short calibration range. An impact test system based on an integral Hopkinson rod PVDF sensor consists of an integral Hopkinson rod, a PVDF sensor test assembly, and a signal acquisition system. The integral Hopkinson rod is a one-piece structure. The PVDF sensor test assembly isthreaded to the sample to be tested of the integral Hopkinson rod. The impact test system based on integral Hopkinson rod PVDF sensor has simple structure and can simultaneously calibrate multiple batches of PVDF samples.

The invention discloses a six-dimensional force / torque sensor calibration device and calibration method. The device comprises a calibration work bench, wherein two ends of the calibration work bench are respectively provided with a supporting rod, upper ends of the supporting rods are provided with pulleys, the pulleys on the two supporting rods are parallelly arranged, the calibration work benchis movably provided with a sensor base used for fixing a six-dimensional force sensor, the sensor base is detachably connected with a load loading rod, two ends of the load loading rod are respectively provided with a connection hole used for fixing a load loading rope, the load loading ropes are connected with a tensiometer through the pulleys, and dynamic or / and static calibration of the six-dimensional force sensor is performed.

The invention discloses a falling body type impact calibration device. The device comprises a bottom plate, a lifting mechanism is arranged on one side of the bottom plate, lifting installation framesfixedly connected with the bottom plate and the top plate are arranged at the upper end and the lower end of the lifting mechanism respectively, a double-acting air cylinder is arranged on one side of the lifting mechanism, a base is arranged on the bottom plate, guide columns and buffer devices are symmetrically arranged at the two ends of the upper portion of the base, and retainers are arranged on the guide columns and can move along the guide columns, and a hammer head is arranged in the retainer. The device has the beneficial effects that required test data are acquired through the sensor mounted on the hammer head, the provided acceleration range is 50-20000 m / s^2, the pulse width range is 1-30 ms, and the device is small in size, large in instantaneous energy, wide in calibration range, good in repeatability, high in precision and high in safety.

The invention discloses a single-end SAR ADC capacitance mismatch calibration method, which can calibrate the error caused by the capacitance mismatch of the SAR ADC. This method only needs to insert two pairs of redundant capacitors in the analog domain, and compensates for capacitance mismatch in the digital domain. The binary capacitor DAC containing two pairs of redundant point capacitors includes the segmented binary capacitor DAC and the redundant capacitors Cjr+, Cjr- inserted in the lowest bit Cj of the segmented capacitor MSB segment, and the redundant capacitors Cqr+, Cqr+ inserted in the LSB segment Cqr‑. The redundant bit calculation module adds the inserted redundant bit and other normal bits to calculate an effective output of N-bit. The capacitance mismatch calibration module performs capacitance mismatch compensation on the output result. This calibration method only adds two pairs of redundant capacitors to the traditional SAR ADC structure, and the calculation of mismatch compensation is performed in the digital domain, thereby reducing the layout area and the complexity of the analog circuit.

The invention discloses a magnification factor calibration method for a microscope. The magnification factor calibration method comprises the following steps of: with a standard raster with a known raster pitch as a reference, acquiring a raster image in a microscope to be calibrated; carrying out fast Fourier transform on the acquired image to obtain a spatial frequency spectrum; selecting an interval where certain level of resonant frequency is located from the spatial frequency spectrum, and carrying out local high-resolution discrete Fourier transform to obtain a local high-resolution spatial frequency spectrum; selecting a frequency with a maximum amplitude as a resonant frequency from the local high-resolution spatial frequency spectrum, and dividing the resonant frequency by the level to obtain a base frequency; calculating the size of the standard raster corresponding to the image by using the raster pitch and the base frequency; and calculating the magnification factor of the microscope by using a ratio of the display size of the image to the size of the standard raster corresponding to the image. Compared with the traditional method, the magnification factor calibration method is high in precision, large in calibration range and wide in applicability when being used for calibrating the magnification factor of the microscope.

The present invention provides gas calibration method for semiconductor equipment. After certain amount of gas is introduced through mass flowmeter to closed chamber, the pressure change before and after gas introduction is measured and inside gas mass change is calculated based on the gas state equation, so as to judge whether the mass flowmeter has normal operation. Compared with available technology, the present invention has the advantages of wide calibration range, fast calibration, low cost and excellent calibration effect.

The invention relates to a method for calibrating misalignment angles of a two-dimensional autocollimator. The method comprises the following steps: (1) rotating azimuth angles and pitch angles of a reflecting mirror to determine pixel numbers, azimuth angles and pitch angles (x, y, h, v) in the horizontal direction and the vertical direction corresponding to m*n points; performing fitting on the m*n points by using multiple curved surfaces to obtain corresponding coefficient matrixes of the azimuth angles and pitch angles, and for any point in an imaging region, resolving the azimuth angle and the pitch angle of the point according to the pixel numbers x and y in the horizontal direction and the vertical direction of the point and the coefficient matrix of the azimuth angle and the pitch angle. The method provided by the invention is flexible to use, the fit maximum number of times and the number of measuring points can be continuously changed according to a calibration result until the requirement on the calibration accuracy is met, and moreover, the higher the fitting times is, the more the measuring points are, and the higher the calibration accuracy is.

The invention provides a device for calibrating space charge density measurement equipment, and the device comprises a power supply, an upper electrode plate, a lower electrode plate, insulating supporting columns, an arc light lamp, a galvanometer, a platform, and a fan. The positive and negative electrodes of the power supply are respectively connected with the lower and upper electrode plates through wires, and the lower and upper electrode plates are supported by the insulating supporting columns. The galvanometer is disposed on a wire between the negative electrode of the power supply and the upper electrode plate. The arc light lamp is disposed at the edge of the lower electrode plate, and the fan is located above the arc light lamp. The platform of the space charge density measurement equipment is placed between the upper electrode plate and the lower electrode plate. The device is clear in principle, is simple in structure, is low in manufacture cost, is safe and convenient for use, is large in calibration range, and is suitable for the calibration of different types of space charge density measurement equipment. The device is mainly used for the calibration of the space charge density measurement equipment based on an ion counting method, a Faraday cage method, a charge screening method and a probe array method.

The invention relates to a photoelectric response characteristic calibration method for a two-dimensional imaging device, which comprises a ray diffraction grating, a focusing optical system, a two-dimensional imaging device to be calibrated and a computer system, wherein an incident light beam for calibrating the two-dimensional imaging device is a light beam parallel to the plane, the light beam is imaged on the photosensitive surface of the two-dimensional imaging device after being modulated by the space intensity of the ray diffraction grating and being converged by the focusing optical system, the incident light beam forms a series of diffraction sub light spots with modulated light intensity on the photosensitive surface of the two-dimensional imaging device through the beam splitting characteristic of the ray diffraction grating, a plurality of groups of measured data are fused through peak value measuring data of each diffraction sub light spot and peak value theoretical dataobtained by theoretical calculation, the measured data and the corresponding theoretical data are obtained, the two groups of data are combined for completing the photoelectric response characteristic calibration of the two-dimensional imaging device. The photoelectric response characteristic calibration method has high light energy utilization rate, is applicable to the photoelectric response characteristic calibration of the two-dimensional imaging device under the condition with strong light sources and is also applicable to weak light sources, and the calibration range is enlarged throughthe fusion of a plurality of groups of measured data.

The invention belongs to the technical field of optical fiber measurement, and particularly relates to a calibration device for optical coherence polarization measurement and a dynamic range calibration method thereof. The device comprises a broadband optical source and power monitoring device 510, a first optical fiber connector 521, a second optical fiber connector 522, a high-precision calibration device 530, an optical path correlator 540, and a polarization crosstalk detection and signal recording device 550. A polarization-maintaining optical fiber with a specific length and an alignment angle is used for building a calibration device, and the position and the magnitude of a measurement peak are precisely positioned; by using two-order interference peaks of multiple crosstalk points, a low peak value is precisely positioned; and by using different calibration gradients, the calibration precision and the accuracy are improved.

The invention relates to an underwater pressure sensor based on a magneto-rheological effect. The underwater pressure sensor is composed of an upper shell, a second O-shaped ring, a magnet exciting coil, a bolt, a nut, a first elastic body, a third polar plate, a second polar plate, a first polar plate, a positioning block, a lower shell, a framework, a third elastic body, a second elastic body, aprotective sleeve, a power-on wire, a current controller, a fourth polar plate, a push plate and a first O-shaped ring. The upper shell and the lower shell are connected through the bolt and the nut;the positioning block is mounted at the lower shell, and the framework is mounted at the upper part of the positioning block; the framework is provided with the magnet exciting coil and the protective sleeve; the push plate is in clearance fit with the upper shell, and first-stage sealing is carried out through the first O-shaped ring; and the push plate is arranged on the fourth polar plate, andsecondary sealing is carried out through the second O-shaped ring. The sensor has the advantages that the manufacturing cost is low, the piezoresistive effect of the magneto-rheological elastomer isutilized, the pressure calibration range is wider, and certain accuracy can be improved.

The invention relates to the technical field of meter calibration, and discloses a computer aided calibration method for a coal flow meter in the shell coal gasification process, which includes: acquiring production information related to a coal circulation phase online to automatically divide coal circulation load intervals and automatically search stable flow intervals; estimating reliability of data of the stable intervals; and finally giving linear regression, quadratic regression and cubic regression functions according to the calibration requirement, and giving a selection standard for regression ways. The computer aided calibration method can be used for effectively avoiding errors occurring in manual reading and calculation in calibration of a traditional coal flow meter, improving flexibility of data processing, and increasing calibration speed and improving calibration precision evidently.

The invention relates to a space pose calibration method of a high-precision laser beam of a non-orthogonal shafting laser total station. The method comprises the following steps of constructing a calibration device by adopting a two-dimensional turntable with high precision and a hemispherical target, keeping the hemispherical target in a camera view field, and fixing the hemispherical target ona target seat on an optical platform so that a sphere center of the hemispherical target is superposed with the sphere center of a reflective hollow target sphere; acquiring a three-dimensional coordinate of a first position of the hemispherical target in a world coordinate system; randomly moving the hemispherical target to obtain the three-dimensional coordinate of a second position in the worldcoordinate system; repeating operation till that world coordinates of the hemispherical targets at n positions in a space and pitching and horizontal angles corresponding to the precise two-dimensional turntable; carrying out quaternion rotation reverse calculation on the coordinates of fixed points on laser beams from the second position to an nth position to obtain the coordinate at an initialposition; and using a least square method to carry out fitting and obtaining a space pose of the laser beam.

The invention discloses a vidicon calibrating method based on double one dimensional drones; the method includes the following steps: two freely arranged one dimensional drones are set; the images of the drones are shot from different angles through a vidicon; vidicon coordinate systems and image plane coordinate systems of the vidicon under different shooting positions as well as a world coordinate system are respectively built; internal parameters and external parameters of the vidicon are solved after carrying out aberrance calibrating on the shot drone images. The calibrating method of the invention takes two one dimensional drones as a calibrating object, carries out shooting on the drone images from different angles after freely arranging two one dimensional drones on the field area of the vidicon and can carry out calibrating on the internal parameters and the external parameters of the vidicon only after picking up three or more characteristic points of each drone image; auxiliary devices are not needed; the vidicon calibrating method based on double one dimensional drones of the invention is simple to operate, and can improve the calibrating precision of the vidicon and enlarge the calibrating range of the vidicon.

The invention relates to a device and a method for verifying or correcting instrument equipment for measuring the flow rate. In order to solve the problems of low verification accuracy, narrow verification range, low safety and the like of an existing verifying device and verifying method of a liquid metal flowmeter, the invention provides a verifying device and a verifying method of a liquid metal flowmeter. The device comprises a storage tank, a heater, an electromagnetic pump, a main measuring cylinder, an auxiliary measuring cylinder, a preheater, a liquid metal flowmeter connector A, a liquid metal flowmeter connector B and a vapor trap. The verifying method employing the verifying device is used for verifying different measuring ranges of the liquid metal flowmeter in a segmental verifying mode. The verifying device of the liquid metal flowmeter provided by the invention is an original standard device, is capable of realizing actual flow verification on the transfer flow magnitude or the test accuracy of the liquid metal flowmeter, and is high in verification accuracy, large in verification measuring range, high in safety, low in cost and excellent in applicability.

The invention discloses a method and a device for calibrating a flow coefficient of an orifice plate by adopting a pressure method, and the method comprises the following steps: measuring the pressure change to obtain the relationship between multiple groups of pressure and flow, and further fitting the slope and intercept of a flow coefficient function expression. The device comprises a feeding container, a feeding slow pressure tank, a pressure stabilizing tank and a receiving container which are sequentially communicated through a vacuum pipeline, a valve is arranged at an outlet of the feeding container, an electric pressure regulating valve is arranged between the feeding slow pressure tank and the pressure stabilizing tank, and a pore plate is arranged in the vacuum pipeline between the pressure stabilizing tank and the receiving container. According to the invention, mass weighing is not needed; the number of test points is not limited by the number of collection containers in a weighing method, and the test points can be freely increased; the flow coefficients of pore plates with different pore diameters can be measured by adjusting the volume V of the gray area, and the calibration range of the pore plates is wide; the influence of weight error of the weighing and receiving container is avoided; and the potential safety hazard of excessive gas collected by the material collecting container is avoided.