A high-purity
copper sputtering target, wherein a Vickers
hardness of a
flange part of the target is in a range of 90 to 100 Hv, a Vickers
hardness of an
erosion part in the central area of the target is in a range of 55 to 70 Hv, and a
crystal grain size of the
erosion part is 80 μm or less. This invention relates to a high-purity
copper sputtering target that does not need to be bonded to a backing plate (BP), and aims to provide a high-purity
copper sputtering target capable of forming a thin film having superior uniformity by enhancing a strength (
hardness) of the
flange part of the target, and reducing an amount of warpage of the target. Moreover, the uniformity of the film thickness is improved by adjusting the (111) orientation ratio of the
erosion part and the
flange part in the target. The present invention thereby aims to provide a high-purity copper sputtering target, which is capable of improving the yield and reliability of
semiconductor products that are being subject to further
miniaturization and higher integration, and useful for forming a
copper alloy wiring for semiconductors.