The invention belongs to the technical field of
semiconductor protection devices, and relates to a low-clamping protection device structure and a manufacturing method thereof. A first conduction typeisolation structure which divides a device into three regions is arranged in a second
conduction type epitaxial layer; a low-
capacitance diode D1 is formed in the first region; a low-
capacitance diodeD2 is formed in the second region; a
discharge tube TSS is formed in the third region; a TVS
voltage-stabilizing
diode Z1 is formed in the first
conduction type isolation structure; the TVS
voltage-stabilizing
diode Z1 is connected in parallel with the
discharge tube TSS, and is connected with the diode D2 in series; the positive
electrode of the diode D2 is connected with the negative electrodeof the TVS
voltage-stabilizing diode Z1, and is connected with an I / O port; and the positive
electrode of the diode Z1 is connected with the positive
electrode of the diode D1 are grounded. By addingthe
discharge tube TSS structure, on the basis of not enlarging the device area and increasing the process cost, a clamping voltage is reduced, and the current capacity is improved, so that the ESD capacity of a high-speed
data transmission channel port is improved, the
data integrity is guaranteed, and meanwhile
burnout caused by excessively high dissipation power is prevented.