The invention belongs to the technical fields of materials and micro machinery, in particular relating to an optical driving micro valve and a driving method thereof. The optical driving micro valve comprises a unit capable of generating deformation, and the unit comprises a photoinduced deformation material capable of generating telescopic deformation under the condition of illumination. The micro valve can be in a cantilever beam structure or valve membrane structure, wherein the cantilever beam structure comprises a substrate, a cantilever support, a valve plug and a cantilever beam made of the photoinduced deformation material; and the valve membrane structure comprises a valve base and a substrate, the space between the base and the substrate forms a flow channel of the micro valve, and an upper valve membrane positioned on the valve base is jointed with a lower valve membrane positioned on the substrate. The invention also provides a method of driving the micro valve, which comprises the following steps: irradiating the light onto the photoinduced deformation material of the micro valve, and then, controlling the opening and the closing of the micro valve through the deformation of the photoinduced deformation material. The micro valve of the invention has simple structure and smaller size and is suitable for the technical fields of micro fluid transmission and control and micro machinery. The optical driving method of the invention has the advantages of large transmission power, non-contact, rapidness, accuracy, cleanness and the like and realizes the purpose of directly converting the optical energy into the mechanical energy.