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1663results about "Vertical furnaces" patented technology

Substrate treatment apparatus

Provided is a substrate processing apparatus. The substrate processing apparatus includes a chamber body having a passage, through which substrates are transferred, in one side thereof, the chamber body having opened upper and lower portions, an inner reaction tube disposed above the chamber body to provide a process space in which a process with respect to the substrates is performed, the inner reaction tube having an opened lower portion, a substrate holder disposed in the opened lower portion of the chamber to move between a stacking position at which the substrates transferred through the passage are vertically stacked and a process position at which the substrate holder ascends toward the process space to perform the process with respect to the stacked substrates, a blocking plate connected to a lower portion of the substrate holder to ascend or descend together with the substrate holder, the blocking plate closing the opened lower portion of the inner reaction tube at the process position, a connection cylinder vertically disposed on a lower portion of the blocking plate to ascend or descend together with the blocking plate, and a blocking member connected between the opened lower portion of the chamber body and the connection cylinder to isolate the opened lower portion of the chamber body from the outside.
Owner:EUGENE TECH CO LTD

Processes and systems for making inorganic fibers

Inorganic fiber production processes and systems are disclosed. One process includes providing a molten inorganic fiberizable material, forming substantially vertical primary fibers from the molten material, and attenuating the primary fibers using an oxy-fuel fiberization burner. Other processes include forming a composition comprising combustion gases, aspirated air and inorganic fibers, and preheating a fuel stream and / or an oxidant stream prior to combustion in a fiberization burner using heat developed during the process. Flame temperature of fiberization burners may be controlled by monitoring various burner parameters. This abstract allows a searcher or other reader to quickly ascertain the subject matter of the disclosure. It will not be used to interpret or limit the scope or meaning of the claims. 37 CFR 1.72(b).
Owner:JOHNS MANVILLE CORP
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