The invention discloses an
optical fiber and
silicon waveguide coupling structure based on
polymer waveguides and a manufacturing method of the
optical fiber and
silicon waveguide coupling structure. The
optical fiber and
silicon waveguide coupling structure based on the
polymer waveguides comprises an SOI
wafer and an optical
fiber arranged on the SOI
wafer, the
polymer straight waveguide and the polymer tapered waveguide are arranged on a
buried oxide layer of the SOI
wafer in sequence from
right to left, the narrower end of the polymer tapered waveguide is connected with the polymer straight waveguide, and the wider end of the polymer tapered waveguide is aligned with a
fiber core of the optical
fiber; the silicon waveguide is arranged on upper layer silicon, the left end of the silicon waveguide is a back taper structure with a gradually changing width, the right end of the silicon waveguide is of a straight silicon waveguide back taper structure, part of the straight silicon waveguide wrapped in the polymer straight waveguide, and other parts of the straight silicon waveguide is covered with a
silicon dioxide covering layer; a V-shaped groove is formed in the top surface of the left end of the SOI wafer, the
silicon dioxide covering layer, the upper layer silicon and the
buried oxide layer sequentially penetrate through the V-shaped groove in the
depth direction, and the bottom end of the V-shaped groove is located at substrate silicon; the optical fiber is fixed in the V-shaped groove. The optical fiber and silicon
waveguide coupling structure based on the polymer waveguides and the manufacturing method of the optical fiber and silicon
waveguide coupling structure not only improve
coupling efficiency, reduce
process complexity and guarantee the reliability of the
optical fiber coupling structure.