287 results about "Plasma polymerization" patented technology

A method of forming a transparent hydrocarbon-based polymer film on a substrate by plasma CVD includes: introducing a main gas consisting of a hydrocarbon gas (CαHβ, wherein α and β are natural numbers) and an inert gas at a flow ratio (R) of CαHβ / inert gas of 0.25 or less into a CVD reaction chamber inside which a substrate is placed; and forming a hydrocarbon-based polymer film on the substrate by plasma polymerization of the gas at a processing temperature (T) wherein T≦(−800R+500).

A method forms a hydrocarbon-containing polymer film on a semiconductor substrate by a capacitively-coupled plasma CVD apparatus. The method includes the steps of: vaporizing a hydrocarbon-containing liquid monomer (CαHβXγ, wherein α and β are natural numbers of 5 or more; γ is an integer including zero; X is O, N or F) having a boiling point of about 20° C. to about 350° C.; introducing the vaporized gas into a CVD reaction chamber inside which a substrate is placed; and forming a hydrocarbon-containing polymer film on the substrate by plasma polymerization of the gas.

A method of manufacturing a semiconductor device includes forming a first insulating film over an underlying film by plasma polymerization of cyclic siloxane, and forming a second insulating film on the first insulating film by plasma polymerization of the cyclic siloxane continuously, after forming the first insulating film. The deposition rate of the first insulating film is slower than the deposition rate of the second insulating film.

A method of forming a hydrocarbon-containing polymer film on a semiconductor substrate by a capacitively-coupled plasma CVD apparatus. The method includes the steps of: vaporizing a hydrocarbon-containing liquid monomer (CαHβXγ, wherein α and β are natural numbers of 5 or more; γ is an integer including zero; X is O, N or F) having a boiling point of about 20° C. to about 350° C. which is not substituted by a vinyl group or an acetylene group; introducing the vaporized gas into a CVD reaction chamber inside which a substrate is placed; and forming a hydrocarbon-containing polymer film on the substrate by plasma polymerization of the gas.

A novel biosensor was accomplished using a plasma-polymerized membrane. The biosensor of the present invention is a high-performance biosensor produced by a simpler method and applicable to a wide range of fields.

A seal assembly is provided for reception of an elongated surgical instrument, which comprises a body having at least one opening configured and dimensioned to permit entry of an elongated surgical instrument and defining a central longitudinal axis; a seal member formed of a resilient material and defining an aperture therein, the aperture being configured and dimensioned such that insertion of the surgical instrument into the aperture causes the resilient material defining the aperture to resiliently contact the outer surface of the surgical instrument in a substantially fluid tight manner, the seal member further including a peripheral flange element which contacts a surface of the body to form a contact seal therewith; and a fabric layer juxtaposed relative to the resilient material. The seal assembly may further include a coating applied to the seal member to reduce friction between the seal member and surgical instrumentation inserted therein. The coating is preferably a hydrocyclosiloxane membrane prepared by plasma polymerization process.

Coatings for implantable medical devices, such as stents, and methods of coating the devices are disclosed. The method includes forming a coating by plasma polymerization of a monomer or a blend of monomers.

A method for forming a film having a low dielectric constant and high mechanical hardness on a semiconductor substrate by plasma reaction includes the steps of: (i) introducing a silicon-containing hydrocarbon gas as a source gas into a reaction space for plasma CVD processing wherein a semiconductor substrate is placed; and (ii) applying radio-frequency (RF) power of 1,000 W or higher to the reaction space while maintaining a pressure of the reaction space at 100 Pa or higher to activate plasma polymerization reaction in the reaction space, thereby forming a thin film on the semiconductor substrate.

Suture filaments coated by a plasma polymerization process exhibit a good balance of knot run down and knot security characteristics, superior tissue drag characteristics, and improved fray resistance.

An objective of the present invention is to provide a measuring chip for a surface plasmon resonance sensor that can detect a small amount of target substances in high sensitivity. The present invention provides a measuring chip for a surface plasmon resonance sensor comprising a metal layer, one or more plasma polymerization layers formed on said metal layer, and a biologically active substance immobilized on the surface of said plasma polymerization layer.

An implantable medical device, such as a stent, is disclosed comprising an amino acid or a polypeptide bonded to a plasma polymerized film layer formed on the device. A method of manufacturing the same is also disclosed.

A system and method for coating implantable medical devices so that they do not interfere with MR imaging are described. Using any of the coating processes well known to those skilled in the art, e.g., physical vapor deposition such as evaporation, sputtering, or cathode arc, or chemical vapor deposition, spraying, plasma polymerization, plasma enhanced chemical vapor deposition and the like, multiple sources, including at least one source of an electrically insulating material and at least one source of an electrically conducting material, are oriented and shielded so as to coat separate sections of the implantable medical device. The object being coated is then rotated so that overlapping spiral coatings of the materials from the different coating sources are produced on the object.

The present invention includes systems, methods and compositions for the encapsulation of particles. In one form, the system comprises one or more particles, a rotatable reaction chamber in a plasma enhanced chemical reactor to accept one or more particles, and at least one carbonaceous compound to be used in the rotatable reaction chamber, wherein the carbonaceous compound is polymerized onto a surface of one or more particles forming a polymer film encapsulating one or more particles. Using systems, methods, and compositions of the present invention, any particle encapsulated with a degradable or nondegradable polymer film may be introduced and / or released into an environment. The polymer film as well as introduction of encapsulated particles and release therefrom into an environment are controlled by the present invention.

The present invention relates to a method for the preparation of a layer of a plasma-polymerised material on the surface of a substrate, e.g. a substrate of a glass, an organosiloxane-based or polysiloxane-based material, silicon, fluoro-polymer (e.g. Teflon®), etc. The present invention also relates to novel objects and microstructured or micro-patterned devices, e.g. by lift-off techniques, in particular such objects and devices that have layers of electrically conducting materials providing a conductivity of at least 0.01 S / cm. A feature of the invention is the plasma-polymerization of a compound including at least one polycyclic compound, said polycyclic compound(s) comprising a non-aromatic heterocyclic ring fused to an aromatic or heteroaromatic ring or ring system. Examples of such compounds are 3,4-ethylenedioxythiophene (EDT) forming layers of poly(ethylenedioxythiophene) (PEDT), and piperonylamine, piperonyloyl chloride, safrole, 3,4-ethylenedioxypyrrole, 3,4-ethylenedioxy-N-methylpyrrole, and 3,4-methylenedioxythiophene.

A material containing, as a main component, an organic silicon compound represented by the following general formula:R1xSi(OR2)4-x(where R1 is a phenyl group or a vinyl group; R2 is an alkyl group; and x is an integer of 1 to 3) is caused to undergo plasma polymerization or react with an oxidizing agent to form an interlayer insulating film composed of a silicon oxide film containing an organic component. As the organic silicon compound where R1 is a phenyl group, there can be listed phenyltrimethoxysilane or diphenyldimethoxysilane. As the organic silicon compound where R1 is a vinyl group, there can be listed vinyltrimethoxysilane or divinyldimethoxysilane.

Anisotropic hydrophobic / hydrophilic nanoporous membranes and methods of forming anisotropic hydrophobic / hydrophilic nanoporous membranes are disclosed. The method of forming the nanoporous membrane includes growing a nanoporous oxide film on a substrate. A nanoporous membrane having a top side and a bottom side can then be formed by partially separating the nanoporous oxide film from the substrate. A fluorocarbon film can be deposited on the top side of the nanoporous membrane by plasma polymerization. The disclosed anisotropic hydrophobic / hydrophilic nanoporous membranes can have extremely different hydrophobicity between the top side and the bottom side of the nanoporous membrane.

An objective of the present invention is to provide a measuring chip for a surface plasmon resonance sensor that can detect a small amount of target substances in high sensitivity. The present invention provides a measuring chip for a surface plasmon resonance sensor comprising a metal layer, one or more plasma polymerization layers formed on said metal layer, and a biologically active substance immobilized on the surface of said plasma polymerization layer.

The invention discloses an anticoagulation high polymer biomaterial which comprises a substrate layer, an anticoagulation coating, and a plasma polymerization layer positioned between the substrate layer and the anticoagulation coating, wherein the substrate layer is made of a biomedical material; the plasma polymerization layer is an allylamine plasma polymerization membrane layer deposited on the substrate layer; the anticoagulation coating is an anticoagulant layer fixed on the plasma polymerization layer; and the anticoagulants comprise hirudin, heparin and the like. Anticoagulant molecules are fixedly grafted on the material surface by utilizing the pulsed plasma technology and surface heparin grafting method, and effective molecule orientation is remained by heparin molecules, so the anticoagulant performance is close to the performance of heparin molecules in the solution. Meanwhile, the heparin molecules are difficultly scoured off by blood, the persistence and stability of the anticoagulation effect are guaranteed, and the service life is long. The invention further discloses a preparation method and application of the anticoagulation high polymer biomaterial.

A method of forming a transparent hydrocarbon-based polymer film on a substrate by plasma CVD includes: introducing a main gas consisting of a hydrocarbon gas (CαHβ, wherein α and β are natural numbers) and an inert gas at a flow ratio (R) of CαHβ / inert gas of 0.25 or less into a CVD reaction chamber inside which a substrate is placed; and forming a hydrocarbon-based polymer film on the substrate by plasma polymerization of the gas at a processing temperature (T) wherein T≦(−800R+500).

A bonding film-attached substrate includes: a substrate whose main component is not silicon dioxide, or that does not have a Si-group skeleton; a silicon oxide film formed on a surface of the substrate and adjacent to the substrate using a vapor-phase deposition method, and that has a thickness of from 100 nm to 2,000 nm, inclusive; and a bonding film provided by plasma polymerization, wherein the bonding film includes (i) a Si skeleton that contains a siloxane (Si—O) bond, and has a crystallinity of 45% or less, and (ii) an elimination group that binds to the Si skeleton, the elimination group being an organic group.

The invention provides compositions that include crosslinking agents having multiple photoactivatable groups, such as diaryl ketones, or a diaryl ketone, such as benzophenone, and at least one polymerizable monomer, such as a zwitterionic monomer. The compositions are useful as surface coating agents that provide brush type polymeric coatings. These polymeric coatings can be used on medical devices, such as artificial joints, to reduce wear and tear between the components of the joint and thus reduce or eliminate debris generated by friction between the joint components.

A seal assembly for reception of an elongated surgical instrument is provided which includes a body having at least one opening configured and dimensioned to permit entry of an elongated surgical instrument and defining a central longitudinal axis; a seal member formed of a resilient material and defining an aperture therein, the aperture being configured and dimensioned such that insertion of the surgical instrument into the aperture causes the resilient material defining the aperture to resiliently contact the outer surface of the surgical instrument in a substantially fluid tight manner; and a fabric layer juxtaposed relative to the resilient material. A coating may be applied to the seal member to reduce friction between the seal member and surgical instrumentation inserted therein. The coating is preferably a hydrocyclosiloxane membrane prepared by plasma polymerization process.

An optical element includes a first optical component and a second optical component each having light transmission properties; and a bonding film bonding together the first and the second optical components. The bonding film is formed by plasma polymerization and includes an Si skeleton having a random atomic structure including a siloxane (Si—O) bond and leaving groups binding to the Si skeleton. The first and the second optical components are bonded together by the bonding film having adhesive properties provided by applying energy to at least a part of the bonding film to eliminate the leaving groups from the Si skeleton at a surface of the bonding film. Additionally, the bonding film is formed so as to have approximately the same refractive index as that of at least one of the first and the second optical components by adjusting a film forming condition of the plasma polymerization.

Anisotropic hydrophobic / hydrophilic nanoporous membranes and methods of forming anisotropic hydrophobic / hydrophilic nanoporous membranes are disclosed. The method of forming the nanoporous membrane includes growing a nanoporous oxide film on a substrate. A nanoporous membrane having a top side and a bottom side can then be formed by partially separating the nanoporous oxide film from the substrate. A fluorocarbon film can be deposited on the top side of the nanoporous membrane by plasma polymerization. The disclosed anisotropic hydrophobic / hydrophilic nanoporous membranes can have extremely different hydrophobicity between the top side and the bottom side of the nanoporous membrane.

A method of forming a hydrocarbon-containing polymer film on a semiconductor substrate by a capacitively-coupled plasma CVD apparatus. The method includes the steps of: vaporizing a hydrocarbon-containing liquid monomer (CαHβXγ, wherein α and β are natural numbers of 5 or more; γ is an integer including zero; X is O, N or F) having a boiling point of about 20° C. to about 350° C. which is not substituted by a vinyl group or an acetylene group; introducing the vaporized gas into a CVD reaction chamber inside which a substrate is placed; and forming a hydrocarbon-containing polymer film on the substrate by plasma polymerization of the gas.

The invention relates to a surface modification method of a lithium iron phosphate cathode material. The surface modification method comprises conductive polymer cladding by plasma polymerization, surface fluorination, nitridation, vulcanization and so on. The method particularly comprises the steps of uniformly blending lithium iron phosphate powder with conductive polymer monomers, and placing the mixture into a discharge plasma reactor to clad the surface of lithium iron phosphate powder with the conductive polymer; or placing the lithium iron phosphate powder in the discharge plasma reactor, introducing working gas CF4, NH3, CS2 or H2S to generate F, N, S free groups by ionization, and subjecting lithium iron phosphate powder to surface fluorination, nitridation, vulcanization. The method provided by the invention has important meanings for improving the comprehensive performance of lithium iron phosphate cathode material, and particularly has significant effect in improving large-current charge-discharge capacity and low-temperature performance of the material. The modified material can be charged or discharged at 10C to 30C, and the discharge capacity at -20 DEG C is not less than 75% the normal temperature discharge capacity, so that the lithium iron phosphate cathode material is suitable for power cells.

An SiCN layer 108, BCB layer 110 and MSQ layer 112 are deposited in this sequence on a copper interconnect line constituted by a barrier metal layer 104 and a copper layer 106. The BCB layer 110 is formed by plasma polymerization of a monomer containing a divinylsiloxane bisbenzocyclobutene unit.

Biocompatible materials for use in vascular applications or for implantation have been engineered, combining human recombinant tropoelastin with other synthetic or natural biomaterials to form protoelastin. The materials can be in the form of elastin films on metal or polymer substrates, laminates of alternating polymer and elastin, blends of polymer and elastin, or elastin crosslinked with or tethered to polymer or metal. These are mechanically stable, elastic, strong and biocompatible (i.e., not thrombogenic and promoting adhesion of cells, especially human endothelial cells), not eliciting a foreign body response. Plasma polymerization of substrate is shown to enhance biocompatibility, especially when used to bind elastin or other protein to the substrate.

A seal assembly is provided for reception of an elongated surgical instrument, which comprises a body having at least one opening configured and dimensioned to permit entry of an elongated surgical instrument and defining a central longitudinal axis; a seal member formed of a resilient material and defining an aperture therein, the aperture being configured and dimensioned such that insertion of the surgical instrument into the aperture causes the resilient material defining the aperture to resiliently contact the outer surface of the surgical instrument in a substantially fluid tight manner, the seal member further including a peripheral flange element which contacts a surface of the body to form a contact seal therewith; and a fabric layer juxtaposed relative to the resilient material. The seal assembly may further include a coating applied to the seal member to reduce friction between the seal member and surgical instrumentation inserted therein. The coating is preferably a hydrocyclosiloxane membrane prepared by plasma polymerization process.