The invention discloses a double-channel anti-vibration interference measuring device and a method thereof. The device comprises a
light source beam expanding and collimating
system which is used forperforming beam expanding and collimating on the
light source, an auxiliary interference measuring
system for detecting the vibration
phase plane of the measured piece, a main interference measurementsystem for measuring the phase distribution of the measured piece by combining with an auxiliary interference measurement
system, and an
optical path system of the measured piece, which are arrangedin sequence. The
light source beam expanding and collimating system and the
optical path system of the measured piece have the same
optical axis, which is marked as the first
optical axis, and the optical axes of the auxiliary interference measurement system and the main interference measurement system are respectively marked as the second
optical axis and the third optical axis which are verticalto the first optical axis; the light source beam expanding and collimating system, the main interference measurement system and the
optical path system of the measured piece form a main Twyman-Greeninterference light path; and the light source beam expanding and collimating system, the auxiliary interference measurement system and the optical
path system of the measured piece form an auxiliary Twyman-Green interference optical path. The device and the method have the advantages of good vibration resistance effect, high
measurement precision, simple and compact structure and lower cost.