The invention provides a method for detecting
wave aberration of a
high numerical aperture oil immersion lens. An outgoing beam emitted by a
light source converges on a light bar at the focal point of a collimating lens. After the beam is divided by a
beam splitting prism, the beams are emitted along the collimating lens in parallel and projected onto a standard flat
crystal. The incidence plane of the standard flat
crystal is taken as the
reference plane, a part of the light is reflected along the
reference plane, and the other part of the light is transmitted through the
reference plane and is focused on the focal point through a measured lens and medium oil. The
light beam enters a super-hemispherical reflector in the point incidence direction of the focal point and returned, finally, the two light beams are reflected through the
beam splitting prism, two bright holes are formed in the
exit pupil position, by adjusting an air wedge between the standard flat
crystal and the measured lens, images of the two small holes are overlapped, and finally through the CCD, the images at the small holes are converted into electrical signals. The super-hemispherical reflector is made of glass, the vector height of the super-hemispherical reflector is larger than the
radius R of the super-hemispherical reflector, and the super-hemispherical excircle surface is plated with a total reflection film.