39results about How to "Reduce collector resistance" patented technology

A method of producing a semiconductor device includes the steps of: preparing a double SOI substrate, forming a deep trench, filling the deep trench, forming an opening, forming a cavity, depositing a polycrystalline silicon layer, and forming a bipolar transistor.

The object of the present invention is to provide a semiconductor device and the manufacturing method thereof which are capable of preventing decrease in the collector breakdown voltage and reducing the collector resistance. The semiconductor device according to the present invention includes: a HBT formed on a first region of a semiconductor substrate; and an HFET formed on a second region of the semiconductor substrate, wherein the HBT includes: an emitter layer of a first conductivity; a base layer of a second conductivity that has a band gap smaller than that of the emitter layer; a collector layer of the first conductivity or a non-doped collector layer; and a sub-collector layer of the first conductivity which are formed sequentially on the first region, and the HFET includes an electron donor layer including a part of the emitter layer, and a channel layer formed under the electron donor layer.

In a semiconductor device of the present invention, an N type epitaxial layer is formed on a P type single crystal silicon substrate. In the substrate and the epitaxial layer, an N type buried diffusion layer is formed on a P type buried diffusion layer. With this structure, an upward expansion of the P type buried diffusion layer is checked and a thickness of the epitaxial layer can be made small while maintaining the breakdown voltage characteristics of a power semiconductor element. Accordingly, a device size of a control semiconductor element can be reduced.

The present invention has as an objective to provide: a semiconductor device to satisfy both of the trade-off characteristic advantages of the HBT; and the HFET and a manufacturing method thereof. The semiconductor device in the present invention is an HBT and HFET integrated circuit. The HBT includes a sub-collector layer, a GaAs collector layer, a GaAs base layer, and an InGaP emitter layer which are sequentially stacked. The sub-collector layer includes a GaAs external sub-collector region, and a GaAs internal sub-collector region disposed on the GaAs external sub-collector region. A mesa-shaped collector part and a collector electrode are separately formed on the GaAs external sub-collector region. The HFET includes a GaAs cap layer, a source electrode, and a drain electrode, the GaAs cap layer including portion of the GaAs external sub-collector region, and the source electrode and the drain electrode being formed on the GaAs cap layer.

A vertical parasitic PNP device in a SiGe HBT process is disclosed which comprises a collector region, a base region, an emitter region, P-type pseudo buried layers and N-type polysilicons. The pseudo buried layers are formed at bottom of shallow trench field oxide regions around the collector region and contact with the collector region; deep hole contacts are formed on top of the pseudo buried layers to pick up collector electrodes. The N-type polysilicons are formed on top of the base region and are used to pick up base electrodes. The emitter region comprises a P-type SiGe epitaxial layer and a P-type polysilicon both of which are formed on top of the base region. A manufacturing method of a vertical parasitic PNP device in a SiGe HBT process is also disclosed.

A substrate with a plurality of isolation structures for defining at least an active area thereon is provided. Ions of a first conductive type are implanted into the substrate to form a doping region in the active area. Following that, a protective layer is formed on the substrate, the protective layer having an opening to expose the doping region. A first doping layer of a second conductive type and a second doping layer of the first conductive type are formed on the doping region, respectively, to complete fabrication of a bipolar junction transistor.

A substrate with a plurality of isolation structures for defining at least an active area thereon is provided. Ions of a first conductive type are implanted into the substrate to form a doping region in the active area. Following that, a protective layer is formed on the substrate, the protective layer having an opening to expose the doping region. A first doping layer of a second conductive type and a second doping layer of the first conductive type are formed on the doping region, respectively, to complete fabrication of a bipolar junction transistor.

A semiconductor device including a bipolar transistor in which the collector resistance. The bipolar transistor includes a first conduction type semiconductor substrate having a main surface. A second conduction type collector region is formed in the semiconductor substrate. A shallow trench isolation structure isolates the main surface of the semiconductor substrate into two insulated active regions. A collector leading portion is formed in one of the active regions. A first conduction type base region and a second conduction type emitter region are formed on the other one of the active regions. The collector region has a first depth from the main surface immediately below the shallow trench isolation structure, and the collector region has a second depth from the main surface immediately below the two active regions. The first depth is less than the second depth.

The invention discloses a vertical parasitic PNP transistor in a BiCMOS process and manufacturing method of the same, wherein an active region is isolated by STIs. The transistor includes a collector region, a base region, an emitter region, pseudo buried layers, and N-type polysilicon. The pseudo buried layers, formed at the bottom of the STIs located on both sides of the collector region, extend laterally into the active region and contact with the collector region, whose electrodes are picked up through making deep-hole contacts in the STIs. The N-type polysilicon is formed on the base region and contacts with it, whose electrodes are picked up through making metal contacts on the N-type polysilicon. The transistors can be used as output devices in high-speed and high-gain circuits, efficiently reducing the transistors area, diminishing the collector resistance, and improving the transistors performance. The method can reduce the cost without additional technological conditions.

A SiGe HBT is disclosed. A collector region consists of a first ion implantation region in an active area as well as second and third ion implantation regions respectively at bottom of field oxide regions. Each third ion implantation region has a width smaller than that of the field oxide region, has one side connected to first ion implantation region and has second side connected to a pseudo buried layer; each second ion implantation region located at bottom of the third ion implantation region and pseudo buried layer is connected to them and has a width equal to that of the field oxide region. Third ion implantation region has a higher doping concentration and a smaller junction depth than those of first and second ion implantation regions. Deep hole contacts are formed on top of pseudo buried layers in field oxide regions to pick up collector region.

A semiconductor device includes a sub-collector layer, a collector layer, a base layer, an emitter layer, and an emitter cap layer, which are sequentially laminated on a substrate. It also includes an emitter electrode, a base electrode, and a collector electrode, which are respectively formed on the emitter cap layer, the base layer, and the sub-collector layer. The sub-collector layer is made up of a first sub-collector layer adjacent to the substrate and a second sub-collector layer adjacent to the collector layer. In the area between adjacent device elements, the first sub-collector layer has an element insulating region created by ion implantation, and the second sub-collector layer has a recess-shaped element insulating region.

Disclosed is a method of manufacturing a heterojunction bipolar transistor comprising a substrate, an upper region of said substrate comprising an active region of the bipolar transistor bordered by shallow trench insulation, said active region comprising a buried collector region extending to a depth beyond the depth of the shallow trench insulation, the method comprising forming a trench in the substrate adjacent to said active region, said trench extending through the shallow trench insulation; at least partially filling said trench with an impurity; and forming a collector sinker in the substrate by developing said impurity to extend into the substrate to a depth beyond the depth of the shallow trench insulation. An IC comprising a heterojunction bipolar transistor manufactured by this method is also disclosed.

The storage cell includes a flat roll electrode that includes a strip of positive electrode having a positive electrode current collector foil and a positive electrode layer formed thereon, a strip of negative electrode having an electrode current collector foil and a negative electrode layer formed, and a strip of electrically insulated separator, the strip of positive electrode and the strip of negative electrode being wound into a flat roll configuration with the strip of electrically insulated separator sandwiched therebetween; a sealed casing that hermetically seals the flat roll electrode impregnated with an electrolyte; a positive terminal and a negative terminal each electrically insulated from the sealed casing, connected to the positive current collector foil and the negative current collector foil, respectively.

A semiconductor device and manufacturing method satisfies both of the trade-off characteristic advantages of the HBT and the HFET. The semiconductor device is an HBT and HFET integrated circuit. The HBT includes a sub-collector layer, a GaAs collector layer, a GaAs base layer, and an InGaP emitter layer that are sequentially stacked. The sub-collector layer includes a GaAs external sub-collector region, and a GaAs internal sub-collector region disposed on the GaAs external sub-collector region. A mesa-shaped collector part and a collector electrode are separately formed on the GaAs external sub-collector region. The HFET includes a GaAs cap layer, a source electrode, and a drain electrode. The GaAs cap layer includes a portion of the GaAs external sub-collector region. The source electrode and the drain electrode are formed on the GaAs cap layer.

A heterojunction bipolar transistor includes a collector layer, a base layer, and an emitter layer that are stacked on a substrate. The collector layer includes a graded semiconductor layer in which an electron affinity increases from a side closer to the base layer toward a side farther from the base layer. An electron affinity of the base layer at an interface closer to the collector layer is equal to an electron affinity of the graded semiconductor layer at an interface closer to the base layer.

The invention discloses a vertical parasitic PNP transistor in the silicon-germanium BICMOS technique. A groove which is in contact with a base region is formed in a shallow trench field oxide around the base region, the depth of the groove is smaller than or equal to the depth of the base region, polycrystalline silicon is filled in the groove and doped with N-type dopant, the polycrystalline silicon doped with the N-type dopant is formed into an outer base region, which is in contact with the side of the base region, and a metal contact is formed on the outer base region, and leads out a base. The invention also discloses a fabrication method for the vertical parasitic PNP transistor in the silicon-germanium BICMOS technique. The vertical parasitic PNP transistor can be used as an output device in a high-speed, high-gain HBT (heterojunction bipolar transistor) circuit, so that one more type of device is provided as an option for the circuit, the area of the device can be effectively reduced, the parasitic effect of the device can be effectively decreased, the collector resistance of the PNP transistor can be effectively decreased, and the performance of the device can be effectively enhanced; and the method does not need additional process conditions, and can reduce the production cost.

The invention discloses a germanium-silicon heterojunction bipolar transistor (HBT) single tube structure. A collector region C is manufactured through a low-doping N type epitaxy technique, and the bottom of the collector region C is extracted by a heavy N type doping buried layer; a base region B is composed of a boron heavy doping germanium-silicon epitaxial layer; a transmitting region E is formed by etching media deposited on the base region to form a window and then depositing N type doping polycrystalline silicon; an N type epitaxy at the bottom of field oxide under outer base region polycrystalline silicon is converted to a P type region through P type ion injection and high-temperature annealing; and a collector electrode is extracted by a deep groove contact hole and metals. The invention further discloses a multi-finger structure in a CBEBE...BEBC or CEBECBE...CEBEC mode. The deep groove contact hole penetrates through the field oxide and the N type epitaxy to penetrate into the N type buried layer, the space of two transmitting electrodes can be greatly reduced, the collector resistance of device is reduced, and junction capacitance of the collector electrode for the base region and a silicon substrate is reduced. A P type ion injection region is not communicated with a P type ion injection region arranged outside the device, so that base electrode-collector electrode medium capacitance is reduced. The multi-finger structure can obtain the largest output power and power gain.