The invention discloses a biological sensor, which comprises a sensor wafer, a measuring pad point, a differential inductance coil, an air bridge structure, a point array capacitor, a capacitor upper plate, and a capacitor lower plate. The preparation method is as follows: deposit the gallium nitride dielectric layer on the surface of the wafer; use Ti / Au as the first layer of seed metal; use photoresist to define the underlying metal, SiNx dielectric layer, air bridge column, and air bridge metal. structure, electroplating the lower metal and upper metal on the seed metal; depositing the gallium nitride passivation layer on the surface of the wafer; defining the structure of the contact electrode Pad; grinding, polishing, cutting, and metal jumper bonding, and packaging. The present invention forms a microwave resonator device through intertwining differential inductors and circular point array capacitors in series, which greatly reduces the chip size occupied by the device while improving the quality factor of the device; solves the problem of measuring biomarkers by microwave devices The problem of low sensitivity when the solution concentration is low.