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A microwave biosensor applied to healthy-iot and its preparation method

A sensor and seed technology, applied in the field of physical analysis devices for biological substances, can solve the problems of low sensitivity, large size, and low quality factor, and achieve the effects of solving low sensitivity, reducing chip size, and improving quality factor.

Active Publication Date: 2021-09-28
JIANGNAN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Due to the characteristics of the existing microwave biosensors, such as large size, low quality factor, low sensitivity, and large amount of measurement solution, the wide application of microwave biosensors is largely limited.

Method used

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  • A microwave biosensor applied to healthy-iot and its preparation method
  • A microwave biosensor applied to healthy-iot and its preparation method
  • A microwave biosensor applied to healthy-iot and its preparation method

Examples

Experimental program
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Effect test

Embodiment 1

[0025] a sensor such as figure 2 As shown, including the wafer as the bearing reference, at least two measurement Pad points are set on the surface of the wafer. In this embodiment, two measurement Pad points are set on the wafer, and the two measurement Pad points are represented by the wafer The center of is the symmetric datum, which is set symmetrically on both sides of the wafer center point. An area is reserved between the two measurement pad points, and a differential inductance coil is set in the reserved area, and several air bridge structures are arranged on the differential inductance coil, and the air bridge structure ring array is on the differential inductance coil, in this embodiment , there are five air bridge structures, two of which are just aligned with the measurement pad point.

[0026] In the area surrounded by the differential inductance coil, there is also a point array capacitor. The point array array contains several point capacitors. All the capaci...

Embodiment 2

[0028] A method for preparing a sensor, comprising the steps of:

[0029] Step (1): Use plasma to clean the surface of the GaAs wafer; the specific cleaning process is: sequentially wash with acetone Acetone, isopropanol IPA and deionized water DI-water, and then use hydrochloric acid solution HCl / H 2 O chemically polishes the wafer.

[0030] Step (2): Using plasma-enhanced chemical vapor deposition equipment, deposit a gallium nitride dielectric layer on the surface of the GaAs wafer. In this embodiment, the thickness of the dielectric layer ranges from 190-210 microns, and the optional endpoint value is 190mm , 210mm, the middle value is 200mm;

[0031] Step (3): Ti / Au is sputtered onto the surface by metal sputtering equipment as the first layer of seed metal; the thickness of the seed metal is 20 / 80 nanometers of Ti / Au.

[0032] Step (4): Based on the first photomask, use photoresist to define the required structure of the underlying metal, and use the solution replaceme...

Embodiment 3

[0039] A microwave biosensor with high sensitivity applied to Healthy-IoT, when designing, use Advanced Design System 2015 software on the computer to design and simulate a compact microwave LC resonator; The detection of the concentration of the biomarker solution can be completed by dropping the micro-upgraded biomarker solution in the area where the point array capacitor is located; when the concentration of the biomarker solution changes, the dielectric constant of the biomarker solution itself also changes, and the two Therefore, the biomarker solutions with different concentrations will have different effects on the electromagnetic field characteristics of the microwave resonator device after being dropped into the capacitance area, so that the parameter characteristics of the microwave device will also change accordingly. The microwave LC type resonator proposed by the present invention is just by detecting the center frequency of the microwave resonator device, thereby ...

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Abstract

The invention discloses a biological sensor, which comprises a sensor wafer, a measuring pad point, a differential inductance coil, an air bridge structure, a point array capacitor, a capacitor upper plate, and a capacitor lower plate. The preparation method is as follows: deposit the gallium nitride dielectric layer on the surface of the wafer; use Ti / Au as the first layer of seed metal; use photoresist to define the underlying metal, SiNx dielectric layer, air bridge column, and air bridge metal. structure, electroplating the lower metal and upper metal on the seed metal; depositing the gallium nitride passivation layer on the surface of the wafer; defining the structure of the contact electrode Pad; grinding, polishing, cutting, and metal jumper bonding, and packaging. The present invention forms a microwave resonator device through intertwining differential inductors and circular point array capacitors in series, which greatly reduces the chip size occupied by the device while improving the quality factor of the device; solves the problem of measuring biomarkers by microwave devices The problem of low sensitivity when the solution concentration is low.

Description

technical field [0001] The invention relates to a microwave biosensor applied to Healthy-IoT and a preparation method thereof, belonging to the field of physical analysis devices for biological substances. Background technique [0002] The Healthy Internet of Things (Healthy-IoT) collects various biological information closely related to health of the human body in real time through various devices and technologies such as medical information sensors, radio frequency identification technology, global positioning system, and communication transmission network. The network access realizes the ubiquitous connection between things and things, things and people, and realizes the intelligent perception, identification and management of human health. Healthy-IoT can provide corresponding solutions for electronic healthcare, patient care, and medical data management. It has already made some major advances in the healthcare and medical field, such as reducing emergency room wait ti...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N22/00G01N27/22C23C14/18C23C14/34C23C16/30C23C28/00H03H9/24
CPCC23C14/185C23C14/34C23C16/301C23C28/34G01N22/00G01N27/221H03H9/24
Inventor 强天雷玉双王琮
Owner JIANGNAN UNIV
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