36results about How to "Low ion density" patented technology

First and second gate insulating films are formed so as to cover at least the upper corner of first and second fin-shaped semiconductor regions. The radius of curvature r1′ of the upper corner of the first fin-shaped semiconductor region located outside the first gate insulating film is greater than the radius of curvature r1 of the upper corner of the first fin-shaped semiconductor region located under the first gate insulating film and is less than or equal to 2×r1. The radius of curvature r2′ of the upper corner of the second fin-shaped semiconductor region located outside the second gate insulating film is greater than the radius of curvature r2 of the upper corner of the second fin-shaped semiconductor region located under the second gate insulating film and is less than or equal to 2×r2.

The present invention provides a method for plasma dicing a substrate. The method comprising providing a process chamber having a wall; providing a plasma source adjacent to the wall of the process chamber; providing a work piece support within the process chamber; placing the substrate onto a support film on a frame to form a work piece work piece; loading the work piece onto the work piece support; providing a clamping electrode for electrostatically clamping the work piece to the work piece support; providing a mechanical partition between the plasma source and the work piece; generating a plasma through the plasma source; and etching the work piece through the generated plasma.

A plasma reactor is described that includes a vacuum chamber defined by an enclosure including a side wall and a workpiece support pedestal within the chamber defining a processing region overlying said pedestal. The chamber has at least a first pair of ports near opposing sides of said processing region and a first external reentrant tube is connected at respective ends thereof to the pair of ports. The reactor further includes a process gas injection apparatus (such as a gas distribution plate) and an RF power applicator coupled to the reentrant tube for applying plasma source power to process gases within the tube to produce a reentrant torroidal plasma current through the first tube and across said processing region. A magnet controls radial distribution of plasma ion density in the processing region, the magnet having an elongate pole piece defining a pole piece axis intersecting the processing region.

The present invention relates to a liquid crystal aligning agent, a liquid crystal aligning film and a liquid crystal display component. The liquid crystal display component has the advantages of low ion density, excellent long-term reliability and suitability to be applied for a plurality of driving modes. According to the invention, the liquid crystal aligning agent is formed by the liquid crystal aligning agent which comprises the polyamic acid that is taken as the reaction product of specific diamine and tetracarboxylic dianhydride or the derivative thereof, and the epoxide that has average functional base larger than 1 and has epoxy group. Furthermore a liquid crystal display component with the liquid crystal aligning film is composed.

The invention relates to a diamine, a polymer obtained from a reaction with the presence of the diamine, a liquid crystal aligning agent containing the polymer, a liquid crystal alignment layer and a liquid crystal display device, wherein the diamine contains alkaline nitrogen atoms in diphenylamine structure at two parts of a molecule, so that the diamine reacts with tetracarboxylic dianhydride to obtain a liquid crystal aligning agent containing polyamide acids or derivatives thereof. Moreover, the liquid crystal display device made of the liquid crystal alignment layer formed by the liquid crystal aligning agent exhibits low ion density and long-term reliability.

The invention relates to a liquid crystal orientation agent, a liquid crystal orientation membrane and a liquid crystal displaying unit. The object of the invention is to provide a liquid crystal orientation membrane with high voltage retention rate, low ion density and low residual DC and a liquid crystal orientation agent capable of forming the liquid crystal orientation membrane and a liquid crystal displaying unit which does not easily generate image-retention. The liquid crystal orientation agent comprises the following polymers and solvent, wherein at least one polymer is selected from the polyamic acid formed by reacting mixture of the diamine represented by the above formula (a) and the other diamide with the derivative of the polyamic acid and the other diamide is the mixture of at least one non side-chain type diamine, or at least one of side-chain type diamine, or mixture of at least one of non side-chain type diamine and at least one of side-chain type diamine. And L1 is alkyl, phenyl or benzyl with hydrogen, carbon number of 1-4.

The invention discloses a diamine compound and polyamic acid and preparation methods thereof, polyimide, a liquid crystal alignment agent and a liquid crystal box. The compound disclosed by invention is represented by the formula I described in the specification, wherein R1, R2, R3 and R4 are independently selected from the group consisting of -H, -CH3, -CH2CH3 and -CH2CH2CH3. The preparation method of the compound comprises a coupling step and a hydrogenation step. The invention discloses a preparation method for the polyamide acid by reaction transformation of the diamine compound and an anhydride compound and the polyamide acid prepared by the method. The invention also discloses the polyimide formed by dehydration transformation of the polyamide acid; the invention further discloses the liquid crystal alignment agent comprising the polyamic acid and / or the polyimide and the liquid crystal box containing the liquid crystal alignment agent.

The invention relates to a liquid crystal alignment agent comprising a polymer composition (A), a solvent (B), and a poly(oxyalkyleneglycol)dialkylether compound (C); wherein the number average molecular weight of the poly(oxyalkyleneglycol)dialkylether compound (C) is from 250 to 2000. The invention also provides a liquid crystal alignment film made by the liquid crystal alignment agent as mentioned above and a liquid crystal display element comprising the liquid crystal alignment film, and the liquid crystal display element has high voltage holding rate and low ion density.

The present invention relates to a liquid crystal aligning agent, a liquid crystal aligning film and a liquid crystal display device. To improve display quality of the liquid crystal display device, the ion density of important characteristics required to the liquid crystal aligning film can be enumerated. If the ion density is high, the voltage applied to the liquid crystal in a frame period will be reduced, as a result, the lighteness will be reduced to bring obstruction to normal greyscale display. In addition, even if an initial ion density is low, a condition that the ion density (long-term reliability) is increased after a high-temperature acceleration test is not optimized. The ion density of the liquid crystal display device formed by using the liquid crystal aligning agent is low, and the long-term stability of the liquid crystal display device is excellent. The liquid crystal aligning agent contains a polyamic acid obtained by reacting a specific diamine containing piperazine rings in molecules or a mixture containing the diamine and other diamine with at least two tetracarboxylic acid dianhydrides at a temperature from 70 to 200 DEG C.

Provided is a liquid crystal display device including first and second opposing substrates, a liquid crystal layer containing a liquid crystal composition between the first and second substrates, a plurality of gate lines and data lines arranged in a matrix on the first substrate, thin-film transistors disposed at intersections of the gate lines and the data lines, and pixel electrodes that are driven by the transistors and that are made of a transparent conductive material. Each thin-film transistor includes a gate electrode, an oxide semiconductor layer disposed over the gate electrode with an insulating layer therebetween, and source and drain electrodes electrically connected to the oxide semiconductor layer. The liquid crystal composition contains at least one compound selected from the group consisting of compounds represented by general formulas (LC1) and (LC2) and at least one compound selected from the group consisting of compounds represented by general formulas (II-a) to (II-f).

The invention relates to a liquid crystal alignment agent having low ion density, and a liquid crystal alignment film formed thereby and a liquid crystal display element having the liquid crystal alignment film. The liquid crystal alignment agent according to the invention which provides a polymer (A), a benzotriazole compound (B) and a solvent (C); wherein the polymer (A) is obtained by reacting a mixture comprising a tetracarboxylic acid dianhydride component (a) and a diamine component (b).

The present invention relates to a liquid crystal aligning agent, a liquid crystal aligning layer and a liquid crystal display device. The objective of the invention is to develop a usable liquid crystal aligning agent used for a liquid crystal display device having high voltage holding rate and implementing the stability of the voltage holding rate for a long time. The liquid crystal aligning agent contains polyamic acid or its derivatives obtained by reacting tetracarboxylic dianhydride with special diamine using a bivalence organic group containing nitrogen atoms as residue.

The present invention addresses the problem of providing a liquid crystal element that sufficiently optimizes mainly the electro-optical properties of a VA display, has a wide operating temperature range, a high-speed responsiveness at a low temperature, a halftone response speed, a high contrast, a wide viewing angle, a low threshold voltage and a high resistance value, and, after polymerizing a polymerizable liquid crystal compound, contains little residual monomer and shows a high voltage retention rate. As the results of intensive studies to solve the aforesaid problem, the present inventors found the most appropriate configuration of a liquid crystal element so as to complete the present invention.

The present invention provides a method for plasma dicing a substrate. The method comprising providing a process chamber having a wall; providing a plasma source adjacent to the wall of the process chamber; providing a work piece support within the process chamber; placing the substrate onto a support film on a frame to form a work piece work piece; loading the work piece onto the work piece support; providing a clamping electrode for electrostatically clamping the work piece to the work piece support; providing a mechanical partition between the plasma source and the work piece; generating a plasma through the plasma source; and etching the work piece through the generated plasma.

The invention provides an insulating ring, a pre-cleaning chamber and semiconductor processing equipment. The insulating ring is applied to the pre-cleaning chamber. A base is arranged in the pre-cleaning chamber; the base comprises a first bearing surface for bearing the center area of the lower surface of a wafer; the insulating ring is arranged on the base and surrounds the edge of the first bearing surface; the insulating ring comprises a ring-shaped body, the ring-shaped body is provided with a second bearing surface and a ring-shaped boss, the second bearing surface and the edge area of the lower surface of the wafer are arranged oppositely, the ring-shaped boss surrounds the edge of the second bearing surface, and the upper surface of the ring-shaped boss is higher than that of the wafer. According to the insulating ring provided in the invention, the etching rate of the edge area of the wafer can be reduced, the difference between the etching rate of the edge area of the wafer and the etching rate of the center area of the wafer can be reduced, and the etching uniformity can be further improved.

A liquid crystal alignment agent includes a polymer composition obtained by subjecting a diamine component and a tetracarboxylic dianhydride component to a reaction, a solvent, and a hydroxyl compound. Preferably, the hydroxyl compound has a weight average molecular weight ranging from 300 to 1,000,000. A liquid crystal alignment film formed from the liquid crystal alignment agent and a liquid crystal display element including the liquid crystal alignment film are also disclosed.

The invention relates to a diamine, a liquid crystal aligning agent and a liquid crystal display element, and provides a liquid crystal display element which is low in ion density and excellent in long-term reliability, a liquid crystal alignment layer having such properties, a liquid crystal aligning agent forming the liquid crystal alignment layer, a polymer used in the liquid crystal aligning agent and a diamine, serving as a raw material of the polymer. The liquid crystal aligning agent employs the polymer which is obtained through reaction between a special diamine having a triazine structure and a tetracaboxylic dianhydride. The liquid crystal display element containing the liquid crystal liquid alignment layer formed by the liquid crystal aligning agent has the properties of low-density of ions and long term reliability.

A liquid crystal alignment agent having both good ultraviolet reliability and low ion density, a liquid crystal alignment film formed by the liquid crystal alignment agent, and a liquid crystal display element having the liquid crystal alignment film are provided. The liquid crystal alignment agent includes a polymer composition (A) and a solvent (B). The polymer composition (A) is obtained by reacting a mixture. The mixture includes a carboxylic anhydride component (a) and a diamine component (b). The carboxylic anhydride component (a) includes a tetracarboxylic dianhydride compound (a-1) and a tricarboxylic anhydride compound (a-2). The diamine component (b) includes a diamine compound (b-1) represented by formula (I).

The invention relates to a liquid crystal alignment agent and a liquid crystal alignment film and a liquid crystal display element formed from the liquid crystal alignment agent. The liquid crystal alignment agent contains a polymer composition, a polysiloxane, and a solvent. The polymer composition is obtained by subjecting a mixture including a tetracarboxylic dianhydride component and a diamine component to a reaction. The diamine component includes first and second diamine compounds. The polysiloxane contains an epoxy-based group. A liquid crystal alignment film is formed by a foresaid liquid crystal alignment agent. A liquid crystal display element comprises the liquid crystal alignment film.

A liquid crystal alignment agent contains a polymer composition, a polysiloxane, and a solvent. The polymer composition is obtained by subjecting a mixture including a tetracarboxylic dianhydride component and a diamine component to a reaction. The diamine component includes first and second diamine compounds. The polysiloxane contains an epoxy-based group. A liquid crystal display element made from the aforesaid liquid crystal alignment agent has reduced ion density.

A method for making low emissivity panels, including control the ion characteristics, such as ion energy, ion density and ion to neutral ratio, in a sputter deposition process of a layer deposited on a thin conductive silver layer. The ion control can prevent or minimize degrading the quality of the conductive silver layer, which can lead to better transmittance in visible regime, block more heat transfer from the low emissivity panels, and potentially can reduce the requirements for other layers, so that the overall performance, such as durability, could be improved.

The invention relates to a liquid crystal orientation agent, a liquid crystal orientation membrane and a liquid crystal displaying unit. The object of the invention is to provide a liquid crystal orientation membrane with high voltage retention rate, low ion density and low residual DC and a liquid crystal orientation agent capable of forming the liquid crystal orientation membrane and a liquid crystal displaying unit which does not easily generate image-retention. The liquid crystal orientation agent comprises the following polymers and solvent, wherein at least one polymer is selected from the polyamic acid formed by reacting mixture of the diamine represented by the above formula (a) and the other diamide with the derivative of the polyamic acid and the other diamide is the mixture of at least one non side-chain type diamine, or at least one of side-chain type diamine, or mixture of at least one of non side-chain type diamine and at least one of side-chain type diamine. And L<1> is alkyl, phenyl or benzyl with hydrogen, carbon number of 1-4.

A diphenylamine compound is represented by the following formula (I). The ranges of each functional group and substituent in the formula (I) are as defined in the description and claims respectively. The polyamic acid composition or polyimide composition prepared by the diphenylamine compound of the present invention has the advantage of being able to effectively solve the problem of residual images of liquid crystal display elements when it is subsequently used as a liquid crystal alignment agent and forms a liquid crystal alignment film.

The invention relates to a liquid crystal alignment agent which provides a polymer composition (A), a solvent (B), and a poly(oxyalkyleneglycol)dialkylether compound (C); wherein the number average molecular weight of the poly(oxyalkyleneglycol)dialkylether compound (C) is from 250 to 2000. The invention also provides a liquid crystal alignment film made by the liquid crystal alignment agent as mentioned above and a liquid crystal display element which provides the liquid crystal alignment film, and the liquid crystal display element has high voltage holding rate and low ion density.

A diamine, a liquid crystal alignment agent, and a liquid crystal display device are provided in this invention. The liquid crystal display device having low ion density and excellent long-term reliability, a liquid crystal alignment agent for forming the liquid crystal alignment film polymer, a polymer used in this liquid crystal alignment agent, and a diamine to form the raw materials of the polymer are provided. By using the liquid crystal alignment agent containg the polymer obtained by a reaction from a specific diamine having a triazine in the molecular and tetracarboxylic acid dianhydride, the liquid crystal display device having the liquid crystal alignment film formed by the liquid crystal alignment agent has low ion density and excellent long-term reliability.

The present invention relates to a liquid crystal aligning agent, a liquid crystal aligning layer and a liquid crystal display device. The objective of the invention is to develop a usable liquid crystal aligning agent used for a liquid crystal display device having high voltage holding rate and implementing the stability of the voltage holding rate for a long time. The liquid crystal aligning agent contains polyamic acid or its derivatives obtained by reacting tetracarboxylic dianhydride with special diamine using a bivalence organic group containing nitrogen atoms as residue.

The invention provides semiconductor process equipment, and the equipment comprises a process chamber provided with a process cavity, wherein the process cavity comprises a generation cavity for generating plasma and a processing cavity for processing a wafer; a filtering structure and a direct-current power supply, wherein the filtering structure comprises a first filtering part, the first filtering part is arranged between the generating cavity and the processing cavity, is provided with a plurality of first through holes for communicating the generating cavity with the processing cavity, and is made of a conductive material, and the direct-current power supply is electrically connected with the first filtering part, and a negative voltage is applied to the first filtering part through the direct-current power supply; when the plasma passes through the first filtering part, the plasma is filtered through the multiple first through holes, and at least part of ions in the plasma are compounded under the action of the negative voltage, so that the number of ions in the plasma entering the processing cavity after filtering is reduced. According to the invention, the influence on the number of free radicals entering the processing cavity can be reduced as much as possible while the number of ions entering the processing cavity is reduced.

The present invention is a liquid crystal alignment agent for liquid crystal display element, in which the ion density of the liquid crystal alignment agent and the long term reliability problem and image retention characteristic problem corresponding to the electrical characteristics accompanied with the change of ion density along with time. The inventive liquid crystal alignment agent containsa constituent of an alkenyl-substituted Nadic imine compound, a compound with free radical polymerism unsaturated double-bond, and polyamic acid or its derivates, wherein, the alkenyl-substituted Nadic imine compound is a compound represented by the formula (Ina), the proportionality of the alkenyl-substituted Nadic imine compound is 0.01-1.00 relative to the weight of the polyamic acid or its derivates, the proportionality of the compound with free radical polymerism unsaturated double-bond is 0.01-1.00 relative to the weight of the polyamic acid or its derivates, and the proportionality of the polyamic acid or its derivates is 0.5wt%-30wt% of the constituent.