The invention is directed to a method and an arrangement for generating
extreme ultraviolet (EUV)
radiation, i.e.,
radiation of high-energy photons in the
wavelength range from 11 to 14 nm, based on a gas
discharge. The object of the invention, to find a novel possibility for generating EUV
radiation in which an extended life of the
system is achieved with stable generation of a dense, hot
plasma column, is met according to the invention in that a preionization
discharge is ignited between two parallel disk-shaped flat electrodes prior to the main
discharge by a
surface discharge along the superficies surface of a cylindrical insulator with a
plasma column generated through the gas discharge with pulsed direct
voltage, which preionization discharge carries out an
ionization of the working gas in the discharge chamber by means of fast charged particles. The preionization discharge is triggered within a first
electrode housing and the main discharge takes place between a narrowed output of the first
electrode housing and a part of the second
electrode housing close to the outlet opening of the discharge chamber. The
plasma develops in a part of the second electrode housing covered by a tubular insulator and, as a result of the current-induced
magnetic field, contracts to form a dense, hot
plasma column, one end of which is located in the vicinity of the outlet opening of the second electrode housing.