The invention discloses a probe inserting device of a scanning probe
microscope. A stepping motor (8) is fixed on a base of the probe inserting device of the scanning probe
microscope in a direction perpendicular to a horizontal direction, wherein the stepping motor (8) is connected with a piezoelectric
ceramic scanner (7); a sample platform (11) is arranged on the piezoelectric
ceramic scanner (7); the tip of a probe (2) is downward and the probe (2) is positioned rightly over the sample platform (11); a
laser source (9) is installed above the probe (2); a
photoelectric sensor (10) is positioned above the probe and is used for receiving a position
signal of a
light spot reflected by the probe (2), converting the position
signal of the
light spot into a
voltage signal and sending the
voltage signal into a controller (4); the stepping motor (8) is controlled by the controller (4) to drive a sample to approach the probe (2); the probe inserting device of the scanning probe
microscope further comprises a dual-channel reflective
optical fiber displacement sensor; and the distance between the probe and the surface of the sample is detected by the dual-channel reflective
optical fiber displacement sensor. Under the control of the controller, the thick probe inserting speed is increased; and in combination with thin probe
insertion control, the probe inserting device realizes quick probe
insertion.