792 results about "Reaction layer" patented technology

A method for removing an oxide layer such as a natural oxide layer and a semiconductor manufacturing apparatus which uses the method to remove the oxide layer. A vertically movable susceptor is installed at the lower portion in a processing chamber and a silicon wafer is loaded onto the susceptor when it is at the lower portion of the processing chamber. The air is exhausted from the processing chamber to form a vacuum condition therein. A hydrogen gas in a plasma state and a fluorine-containing gas are supplied into the processing chamber to induce a chemical reaction with the oxide layer on the silicon wafer, resulting in a reaction layer. Then, the susceptor is moved up to the upper portion of the processing chamber, to anneal the silicon wafer on the susceptor with a heater installed at the upper portion of the processing chamber, thus vaporizing the reaction layer. The vaporized reaction layer is exhausted out of the chamber. The oxide layer can be removed with a high selectivity while avoiding damage or contamination of the underlying layer.

A method for determining the concentration of a substrate in a sample solution using an electrode system comprising a working electrode and a counter electrode, both being formed on an electrically insulating base plate, and a reaction layer which contains at least an oxidoreductase and an electron mediator and is formed on the electrode system to electrochemically measure a reduced amount of the electron mediator resulting from enzyme reaction in the reaction layer, wherein a third electrode is formed as an interfering substance detecting electrode somewhere apart from the reaction layer to detect supply of the sample solution on the basis of an electrical change between the counter electrode and the third electrode. A current flowing between the counter electrode and the third electrode is measured which is taken as a positive error. Subsequently, voltage application between the counter electrode and the third electrode is released and a voltage for oxidizing the reduced form electron mediator is applied between the working electrode and the counter electrode to measure a current flowing between the two electrodes. Influences of any interfering substance such as easy-to-oxidize substance are reduced, whereby a highly reliable value of substrate determination can be obtained.

A biosensor includes: an insulating base plate; an electrode system which is provided on the base plate and has a measurement electrode and a counter electrode; a reaction layer including at least oxidoreductase and an electron mediator; a sample solution supply pathway which includes the electrode system and the reaction layer and has an air aperture on the termination side thereof; a sample supply portion; and a filter which is disposed between the sample solution supply pathway and the sample supply portion and filters hemocytes, where plasma with the hemocytes therein filtered with the filter is sucked into the sample solution supply pathway due to capillarity, the central part of a secondary side portion of the filter is protruded into the sample solution supply pathway more than both the right and left ends thereof.

A reaction layer 12 which reacts with a substance to be measured in a sample solution is provided on a working electrode 1, a counter electrode 2, and a third electrode 3 which are provided on an insulating substrate 7 so as to bridge the respective electrodes, the content of the substance to be measured is measured from a current value which reaction is obtained between the working electrode 1 and the counter electrode 2, and the types of sample solution is judged by a difference between oxidation current values or between oxidation current waveforms, which are obtained between the third electrode 3 and the counter electrode 2 or between the third electrode 3 and the working electrode 1, thereby automatically judging the types of sample solution.

An electrochemical biosensor formed by screen printing and method of fabricating such biosensor is disclosed in the present invention. The biosensor can quickly absorb a sample to be measured therein, effectively control volume of the sample fed and “fill-and-position” the sample therein. The biosensor includes an electrode layer (electrode area) comprising two or three electrodes, which are a working electrode, a reference electrode and an auxiliary electrode (tri-electrode) on an insulating substrate. An active reaction layer containing reactant, reaction catalyst, mediator, wetting agent and surfactant is spread on the surface of the electrode layer. A sample inflow area is formed above the electrode area by adding an upper cover on top of a middle insulating layer with a U-shaped opening formed therein. Sample solution with a minute amount about 0.8 to 1 μl can be rapidly introduced into the electrode area and the active reaction layer via the inflow area by siphon or capillary, where the ingredient of the sample can be analysed by measuring reaction between the sample, reaction catalyst and mediator in the reaction layer using electrochemical potentiometric or amperometric method. An upwardly extended closed space formed within the upper cover above the electrode area adjacent to the front of conductive wires can be effectively used to control sample volume and “fill-and-position” the sample.

A biosensor including an insulating base plate, an electrode system, a cover for covering the insulating base plate, at least one reaction layer, a sample solution supply pathway communicating with an air aperture at a terminal end side, a sample solution supply part and a filter provided between the sample solution supply pathway and the sample solution supply part to filter hemocytes, an end face and a top face of a primary portion of the filter are exposed and the sample solution supply part is provided adjacently to the primary side portion so as to provide an improved biosensor which allows easy addition of whole blood to the sensor and rapid supply of the added whole blood to a filter even in the case of collecting blood by fingertip centesis for measurement.

A sensor including an insulating base plate; an electrode system, provided on the base plate, having a measuring electrode and a counter electrode; a reaction layer including at least an oxidoreductase and an electron mediator; a sample solution supply pathway including the electrode system and the reaction layer; and a sample supply unit, wherein the sensor is so structured that, between the sample supply unit and the sample solution supply pathway, there is provided a filter having a function to filter out hemocytes and having a cross-sectional area larger than an opening of the sample solution supply pathway, and that plasma of a blood with hemocytes thereof having been filtered out is sucked into the inside of the sample solution supply pathway owing to capillary phenomena.

A biosensor for quantifying a specific substance contained in a biological sample includes an electrically insulating base plate, a plurality of lead terminals formed on the base plate, a plurality of lead wires connected to the lead terminals, respectively, an electrode system including two working electrodes and one reference electrode connected to the lead wires, respectively, an insulating layer that insulates the electrodes, an enzyme reaction layer formed on the insulating layer and the electrodes, a spacer formed on the enzyme reaction layer so as to ensure a sufficient space that receives a sample, and a cover formed on the spacer. Further, the spacer has a sample introduction port opened at one side of the spacer, the cover has at least one slit for venting air existing in a sample receiving space defined by the spacer and the cover, and the slit extends to above the electrodes from one end of the cover.

To provide an improved biosensor which allows easy addition of whole blood to the sensor and rapid supply of the added whole blood to a filter even in the case of collecting blood by fingertip centesis for measurement, a second air aperture is provided in a sample solution supply pathway including an electrode system and a reaction layer and communicating with a first air aperture on the terminal end side.

A method and apparatus for depositing a film on a substrate. According to the present invention a prewafer reaction layer is deposited onto a susceptor placed in the reaction chamber to form a prewafer reaction layer coated susceptor prior to film deposition. A deposition gas is then fed into the reaction chamber so that it flows over the prewafer reaction layer coated susceptor and the substrate to form a film on the prewafer reaction layer coated susceptor and the substrate.

The present invention provides a fuel electrode of a solid polymer electrolyte fuel cell for advancing a fuel cell reaction to oxidize the fuel introduced through a diffusion layer, comprising at least one reaction layer which is in contact with a solid polymer electrolyte membrane and advances the fuel cell reaction and at least one water decomposition layer which is in contact with the diffusion layer and electrolyzes the water in the fuel electrode. The layer taking charge of the fuel cell reaction is protected by providing the fuel electrode having a multilayer structure and providing the layer for preferentially performing the electrolysis of the water contained in the fuel or the like. This results in a fuel electrode in which the reduction of the electrode performance will not easily occur even when fuel shortage may be created.