The invention relates to a wedge type
diamond-shaped amplification mechanism piezoelectric stick-slip
linear motor and excitation method thereof, aims to solve the problem that the output
mechanical property of the current piezoelectric stick-slip
linear motor is limited caused by difficulty in comprehensive control on a
friction force. The piezoelectric stick-slip
linear motor comprises a pre-stress adjustment device, a wedge type
stator and a rotor, wherein a wedge-type
diamond-shaped movement conversion mechanism of the
stator has a function of micro-movement amplification, the
axial rigidity of the wedge-type
diamond-shaped movement conversion mechanism is not uniform in distribution,
lateral displacement is generated, the friction driving force also can be increased, and the friction resistance is reduced; and meanwhile, a friction control wave is coupled and superposed to a sawtooth driving wave in a rapid deformation driving stage of the wedge-shaped
stator, the friction resistance between the stator and the rotor in the rapid deformation stage is reduced, the comprehensive control on the
friction force is achieved, and the mechanical output property of the piezoelectric stick-slip linear motor is improved. The piezoelectric stick-slip linear motor has the advantages of simple and compact structure, high positioning precision, large
stroke and the like, is easy to assemble and convenient to control, and can be widely applied to the technical field of micro-nano precision driving and positioning such as
semiconductor processing.