35 results about "Ion microscopy" patented technology

Ion source and method of making and sharpening. The ion source is a single crystal metal conductor having a substantially conical tip portion with substantial rotational symmetry. The tip portion terminates with a tip radius of curvature in the range of 50-100 nanometers. The ion source is made by electrochemical etching so that a conical tip of a selected geometry is formed. The ion source is then sharpened to provide a source of ions from a volume near the size of a single atom. Further, this ion source makes possible a stable and practical light ion microscope which will have higher resolution than existing scanning electron microscopes and scanning metal-ion microscopes.

Ion source and method of making and sharpening. The ion source is a single crystal metal conductor having a substantially conical tip portion with substantial rotational symmetry. The tip portion terminates with a tip radius of curvature in the range of 50–100 nanometers. The ion source is made by electrochemical etching so that a conical tip of a selected geometry is formed. The ion source is then sharpened to provide a source of ions from a volume near the size of a single atom. Further, this ion source makes possible a stable and practical light ion microscope which will have higher resolution than existing scanning electron microscopes and scanning metal-ion microscopes.

Scanning Transmission Ion Microscope. The microscope includes a bright helium ion source to generate an ion beam and a focusing electrostatic optical column to focus the ion beam. A translation stage supports a sample to receive the focused ion beam and a detector responds to ions transmitted through the sample to generate a signal from which properties of the sample may be displayed.

Scanning Transmission Ion Microscope. The microscope includes a bright helium ion source to generate an ion beam and a focusing electrostatic optical column to focus the ion beam. A translation stage supports a sample to receive the focused ion beam and a detector responds to ions transmitted through the sample to generate a signal from which properties of the sample may be displayed.

Transmission ion microscope. A bright light ion source generates an ion beam that is focused on a sample by an electrostatic condenser lens means. An objective lens focuses the ion beam transmitted through the sample to form an image. A projector lens enlarges the image and a phosphor screen receives the enlarged image to generate light allowing visualization of the image.

A charged particle beam system, a sample processing method, and a semiconductor inspection system enable an accurate detection of a particle in a film without causing LMIS contamination and allow observation with an electron microscope quickly. A particle 65 causing a defect in a film 66 that has been detected with a separate optical inspection system is detected with an optical microscope 43 based on position information acquired by the separate optical inspection system. A sample 31 is processed with a nonmetal ion beam 22 so as to allow observation of the particle 65 with an electron microscope image or an ion microscope image, or ultimate analysis of the particle 65 with an EDX.

Transmission ion microscope. A bright light ion source generates an ion beam that is focused on a sample by an electrostatic condenser lens means. An objective lens focuses the ion beam transmitted through the sample to form an image. A projector lens enlarges the image and a phosphor screen receives the enlarged image to generate light allowing visualization of the image.

In a method of making a lamina specimen, first and second ion beams are simultaneously used to sputter etch first and second side walls of a lamina region at the same time under first and second ion beam conditions. A scanning ion microscope observation of the lamina region is made using the second ion beam while sputter etching of the first and second side walls is continued using the first ion beam until the thickness of the lamina has a predetermined value.

In one aspect the invention provides a gas field ion microscope that includes an ion source in connection with an optical column, such that an ion beam generated at the ion source travels through the optical column and impinges on a sample. The ion source includes an emitter having a width that tapers to a tip comprising a few atoms. In other aspects, the invention provides methods for using the ion microscope to analyze samples and enhancing the performance of a gas field ion source.

Provided are a large-current and highly stable gas field ionization ion source, and a high-resolution ion microscope with a large focal depth.The present invention relates to an ion microscope provided with a gas field ionization ion source, in which disposed are a refrigerator for cooling the gas field ionization ion source independent of the main body of the ion microscope, and a refrigerant circulation circuit cooling mechanism for circulating a refrigerant between the gas field ionization ion source and the refrigerator. Consequently it is possible to reduce the mechanical vibration of the refrigerator, which propagates to the gas field ionization ion source, and to achieve both the improvement of the brightness of the ion source and the improvement of ion beam focusing performance.

The present invention provides a laminated ceramic electronic component in which the internal electrode layer inside the layered product is bonded to the external electrode and is capable of ensuring a strong fixing force between the external electrode and the stacked body. The laminated ceramic electronic component includes a rectangular parallelepiped laminate (12) in which a plurality of dielectric layers (14) and a plurality of internal electrode layers (16) are laminated, and a laminated body (12) is formed on both end faces of the stacked body (12) (22a, 22b) of the plating layer (26a, 24b) and the coating (26a, 26b). In the case where the cross section including the base electrode layers (24a, 24b) is observed by the FIB SIM image (concentrated ion beam scanning ion microscope), a plurality of Cu crystals and glass, crystal elements having different crystal orientations The average value of the length is 3 [miu] or less.

This aluminum alloy sheet has increased BH properties under low-temperature short-time-period conditions after long-term room-temperature aging by means of causing aggregates of specific atoms to be contained having a large effect in BH properties, the distance between atoms being no greater than a set distance, and containing either Mg atoms or Si atoms measured by 3D atom probe field ion microscopy in a 6000 aluminum alloy sheet containing a specific amount of Mg and Si.

The invention mainly belongs to the field of oil and gas exploration and development, and particularly relates to a three-dimensional imaging method of shale nanopores with a focused ion beam-helium ion microscope. The method adopts the ultra-high resolution imaging function of a helium ion microscope and the cutting function of the focused ion beam to perform ultra-high resolution three-dimensional imaging of the nanopores of the shale organic matter, which has the characteristics of high resolution, thin slice, and uniform and stable slice. The method makes up for the disadvantage of the technology combined traditional scanning electron microscope with focused ion beam that cannot perform three-dimensional imaging for nanopores. The method can visually show the characteristics of pores over 3nm in shale organic matter such as three-dimensional spatial structure, morphology, distribution, connectivity and porosity, which has great significance for scientifically explaining the mechanism of shale gas occurrence and migration.

The invention provides a semiconductor material measuring device and a method for in-situ measurement of interface defect distribution, which belong to the field of semiconductor test. The semiconductor material measuring device comprises a reaction chamber, a sample platform, a focused ion beam microscope system and an electronic beam induced current measuring device. The method includes: firstly, stripping partial surfaces of semiconductor samples of multilayer heterostructures by the aid of the focused ion beam microscope system of the semiconductor material measuring device; secondly, depositing electrodes in situ; and thirdly, measuring interface defects by the aid of the electronic beam induced current measuring device. By the aid of the semiconductor material measuring device and the method, the problem that multilayer heterogeneous interfaces are measured in a single-layer manner in the prior art is solved, layer-by-layer dissection and measurement are realized, and working efficiency is greatly improved.

The present invention is provided to enable a detailed inspection of a specimen and preventing a distortion of an observation image even when a specimen containing an insulating material is partially charged. For a scanning ion microscope utilizing a gas field ionization ion source, a thin film is disposed between an ion optical system and a specimen, and an ion beam is applied to and transmitted through this thin film in order to focus a neutralized beam on the specimen. Furthermore, an electrode for regulating secondary electrons discharged from this thin film is provided in order to eliminate mixing of noises into an observation image.

The present invention is provided to enable a detailed inspection of a specimen and preventing a distortion of an observation image even when a specimen containing an insulating material is partially charged. For a scanning ion microscope utilizing a gas field ionization ion source, a thin film is disposed between an ion optical system and a specimen, and an ion beam is applied to and transmitted through this thin film in order to focus a neutralized beam on the specimen. Furthermore, an electrode for regulating secondary electrons discharged from this thin film is provided in order to eliminate mixing of noises into an observation image.

[Problem] To provide a rolled copper foil which has a moderately roughened surface whereby the foil has improved handleability, and which has excellent flexibility, is less apt to suffer surface scratches when being handled, and has satisfactory surface etchability. [Solution] A rolled copper foil which has a ratio of the surface roughness (Ra) to the foil thickness (t), Ra / t, of 0.004-0.007. When a 25-[mu]m-long cross-section of the copper foil which extends along a direction parallel to the rolling direction of the copper foil is produced using a focused ion beam and a scanning ion microscope image of the cross-section is examined, then the average value (Lsa) of the depths (Ls) to which shear zones extend in the foil-thickness direction satisfies the following relationship with the thickness (t) of the copper foil: 0.01<=Lsa / t<=0.4.

The invention belongs to the technical field of oil-gas exploration, aims to research development characteristic laws of organic matter pores and obtain reliable characterization information of organic matter pore connectivity, and particularly relates to a shale organic matter pore connectivity classification characterization method. A scanning electron microscope is used for scanning a shale sample in a preset imaging area and obtains a two-dimensional image of the shale sample; pore parameters of each organic matter in the two-dimensional image are extracted by adopting Avizo software; a type value of the organic matter set is obtained according to the pore parameters; three-dimensional reconstruction is performed on each type of organic matter set by adopting a focused ion beam-helium ion microscope to obtain an organic matter three-dimensional reconstructed body; avizo software is adopted to obtain pore connectivity parameters; and on the basis of the pore connectivity parameter, an overall connectivity evaluation index of the shale organic matter pores is obtained. According to the method, on the basis of organic matter pore morphology quantitative classification, three-dimensional connectivity characterization of sub-10nm-level pores can be achieved.

The invention relates to a wafer defect crosscutting observation device which comprises a focusing ion gun, a scanning electronic gun, a focusing ion microscope, a scanning electronic microscope, a light source emitter and an optical imaging unit. The focusing ion gun is arranged in a first plane which is perpendicular to the surface of a wafer. The scanning electronic gun is arranged at the position, different from the position of the focusing ion gun, in the first plane, and a first angle included angle is formed between the emitting direction of the scanning electronic gun and the emitting direction of the focusing ion gun. The focusing ion microscope and the focusing ion gun are integrally arranged in the first plane. The scanning electronic microscope and the scanning electronic gun are integrally arranged in the first plane. The light source emitter is arranged in a second plane which is perpendicular to the surface of the wafer. The optical imaging unit is arranged in the second plane, and a second angle included angle is formed between the optical path direction of the optical imaging unit and the direct of incident beams of the light source emitter. An included angle larger than zero degree is formed between the second plane and the first plane. The wafer defect crosscutting observation device can directly achieve positioning of wafer defects, simultaneous crosscutting and observation and even analysis, working processes are simple, operation is convenient, and precision is higher.

The invention discloses a device for measuring electron beam divergence angle and its preparation method and measurement method. It comprises a fluorescent screen and a tungsten micro-nano pattern. Tungsten hexacarbonyl is deposited on the fluorescent screen through a helium ion microscope to form the tungsten micro-nano pattern. The tungsten micro-nano pattern is a plurality of concentric circles, and the center of the concentric circles is located at the center of the fluorescent screen. Use helium ion microscope ion-assisted deposition to build tungsten micro-nano patterns on the fluorescent screen. When the fluorescent screen is moved, the shape and size of the spots hit by the electron beam on the fluorescent screen will change. Directly measure the electron beam according to the size and size of the tungsten micro-nano patterns. Beam spot and electron beam divergence angle. The device has the advantages of multi-function, high measurement precision, simple operation and the like; the preparation method has the advantages of high precision, easy control, simple process and the like.

The invention provides a method for preparing a micro-nano structure on the surface of a tungsten material, a tungsten material with a micro-nano structure on the surface and an application thereof, belonging to the technical field of material surface microstructure. The method for preparing a micro-nano structure on the surface of a tungsten material provided by the present invention comprises the following steps: under vacuum conditions, using a helium ion microscope to perform the first ion etching on the surface of the tungsten material to obtain etched micro-regions; and performing second ion etching on the etched micro-region by using a helium ion microscope, forming nano-stripes in the etched micro-region, and obtaining a micro-nano structure on the surface of the tungsten material. The preparation method provided by the invention operates under vacuum conditions and is not easily polluted; the helium ion microscope has ultra-high-precision multifunctional processing capabilities, and the micro-nano structure prepared by the helium ion microscope is highly accurate; it can realize the micro-nano structure. Quantitative control; and simple process and low cost.

[Problem] To provide a rolled copper foil whose surface is moderately rough to improve handleability and has excellent bendability, which hardly causes scratches on the surface during handling of the copper foil and has good surface etching characteristics. [Solution] Rolled copper foil whose surface roughness Ra and the ratio Ra / t to the thickness t of the copper foil is 0.004 or more and 0.007 or less, using a focused ion beam to produce a length of 25 μm in the direction parallel to the rolling of the copper foil When observing the scanning ion microscope image of the section, the average value Lsa of the depth Ls of the shear band in the thickness direction of the copper foil satisfies 0.01≦Lsa / t≦0.4 with respect to the thickness t of the copper foil relation.

The invention mainly belongs to the field of oil and gas exploration and development, and particularly relates to a three-dimensional imaging method of shale nanopores with a focused ion beam-helium ion microscope. The method adopts the ultra-high resolution imaging function of a helium ion microscope and the cutting function of the focused ion beam to perform ultra-high resolution three-dimensional imaging of the nanopores of the shale organic matter, which has the characteristics of high resolution, thin slice, and uniform and stable slice. The method makes up for the disadvantage of the technology combined traditional scanning electron microscope with focused ion beam that cannot perform three-dimensional imaging for nanopores. The method can visually show the characteristics of pores over 3nm in shale organic matter such as three-dimensional spatial structure, morphology, distribution, connectivity and porosity, which has great significance for scientifically explaining the mechanism of shale gas occurrence and migration.

The embodiments of the present specification provide an ion probe mass spectrometer and an imaging method thereof. Specifically, the ion probe mass spectrometer includes: a compression deflection plate, configured to compress the secondary ion beam generated by scanning the sample through the primary ion beam and bombarding the sample by applying a first voltage in time series; the mass spectrometer is configured to The compressed secondary ion beam is analyzed; a decompression deflection plate is configured to decompress the secondary ion beam passing through the mass spectrometer in time sequence by applying a second voltage; wherein the first voltage and the second voltage and an imaging assembly configured to acquire an image of the secondary ion beam decompressed by the decompression deflector. Through such a technical solution, on the basis of the ion microscope mode, the mass resolution can be improved by compressing and decompressing the secondary ion beam, and at the same time, it can satisfy the point-to-point microscopy function, and has the advantage of high imaging efficiency.

Provided are a large-current and highly stable gas field ionization ion source, and a high-resolution ion microscope with a large focal depth. The present invention relates to an ion microscope provided with a gas field ionization ion source, in which disposed are a refrigerator for cooling the gas field ionization ion source independent of the main body of the ion microscope, and a refrigerant circulation circuit cooling mechanism for circulating a refrigerant between the gas field ionization ion source and the refrigerator. Consequently it is possible to reduce the mechanical vibration of the refrigerator, which propagates to the gas field ionization ion source, and to achieve both the improvement of the brightness of the ion source and the improvement of ion beam focusing performance.

The invention discloses an electron beam divergence angle measuring device and a preparation method and a measuring method thereof. The device comprises a fluorescent screen and tungsten micro-nano patterns, tungsten hexacarbonyl is deposited on the fluorescent screen through a helium ion microscope to form the tungsten micro-nano patterns, the tungsten micro-nano patterns are a plurality of concentric circles, and the circle centers of the concentric circles are located in the center of the fluorescent screen. A tungsten micro-nano pattern is constructed on a fluorescent screen by utilizing ion-assisted deposition of a helium ion microscope, when the fluorescent screen is moved, the spot shape and the size of an electron beam hit on the fluorescent screen are changed, and an electron beamspot and an electron beam divergence angle are directly measured according to the size and the size of the tungsten micro-nano pattern. The device has the advantages of multiple functions, high measurement precision, simple operation and the like; the preparation method has the advantages of high precision, easiness in control, simple process and the like.

The embodiment of the invention provides an ion probe mass spectrometer and an imaging method thereof. Specifically, the ion probe mass spectrometer comprises a compression deflection plate configuredto compress a secondary ion beam generated by scanning and bombarding a sample through a primary ion beam by applying a first voltage according to a time sequence, a mass spectrometer configured to analyze the compressed secondary ion beam, a decompression deflection plate configured to decompress the secondary ion beam passing through the mass spectrometer in time series by applying a second voltage, and an imaging assembly configured to acquire the secondary ion beam image decompressed by the decompression deflection plate. The frequency of the first voltage is the same as that of the second voltage; By means of the technical scheme, on the basis of an ion microscope mode, the secondary ion beam is compressed and decompressed, the mass resolution is improved, meanwhile, the point-to-point microscopy function can be achieved, and the advantage of being high in imaging efficiency is achieved.