The invention discloses a three-axis micro-
gyroscope based on a
tuning fork driving effect, which comprise an upper-layer
gyroscope structure and a lower-layer glass substrate, the upper-layer
gyroscope structure comprises a left mechanical structure, a right mechanical structure, a middle mechanical structure, an upper crossbeam, a lower crossbeam, short beams, and anchor points, a turning
mechanism based on
tuning fork driving is designed in the middle mechanical structure, X-axis simple
harmonic driving and Y-axis simple
harmonic driving of sensitive weights of the middle mechanical structure are realized by the X-axis unidirectional driving of the left mechanical structure and the right mechanical structure, and thereby the consistency of driving frequencies between different axes is ensured. When
angular velocity is inputted from outside, the sensitive weights receives
Coriolis force to shift. By adopting a double-sensitive weight design and variable-interval
capacitance differential detection, the three-axis micro-gyroscope can inhibit the common-mode interference of temperature,
structural stress, acceleration and the like; the structure of the three-axis micro-gyroscope issymmetrically arranged, the stability is good, and the anti-interference capability is high.