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102 results about "Astigmatism correction" patented technology

Astigmatism Correction Options. The first number (-2.50) is the sphere power (in diopters) for the correction of myopia in the flatter (less nearsighted) principal meridian of the eye. The second number (-1.00) is the cylinder power for the additional myopia correction required for the more curved principal meridian.

Sequential wavefront sensor

A sequential wavefront sensor comprises a light beam scanning module, a sub-wavefront focusing lens, a detector with more than one photosensitive area and a processor for calculating the sequentially obtained centroids of a number focused light spots from the sub-wavefronts to determine the aberration of the input wavefront. A sequential wavefront sensing method comprises the steps of; sequentially projecting a number of sub-wavefronts onto a sub-wavefront focusing lens and a detector with more than one photosensitive areas, calculating the centroid of the focused light spot from each sub-wavefront, and processing the centroid information to determine the aberration of the wavefront. In particular, a method for auto-focusing and / or auto-astigmatism-correction comprises the steps of sequentially projecting a number of sub-wavefronts around an annular ring of a wavefront to a sub-wavefront focusing lens and a detector, calculating the centroid of focused light spot from each sub-wavefront to figure out the centroid trace and hence the defocus and / or astigmatism, adjusting the focus and / or astigmatism of the optical imaging system before the wavefront sensor so that the measured defocus and / or astigmatism is minimized.
Owner:CLARITY MEDICAL SYST

Charged particle beam adjusting method and charged particle beam apparatus

In an apparatus for obtaining an image by irradiating a charged particle beam on a specimen, a condition of the beam conditioned differently from vertical incidence as in the case of the beam being tilted is required to be adjusted. To this end, the apparatus has a controller for automatically controlling a stigmator, an objective lens and a deflector such that astigmatism is corrected, focus is adjusted and view filed shift is corrected. The controller has a selector for inhibiting at least one of the astigmatism correction, focus adjustment and FOV shift correction from being executed.
Owner:HITACHI HIGH-TECH CORP

Spectrometer using cylindrical lens for astigmatism correction

The invention relates to a spectrometer using a cylindrical lens for astigmatism correction. The spectrometer comprises an incidence slit, a cylindrical surface lens, a concave surface alignment reflector, a plane grating, a concave focusing mirror and a line array CCD detector, wherein incidence lights pass through the incidence slit and the cylindrical surface lens in sequence, and then are irradiated on the concave surface alignment reflector; light beams of the concave surface alignment reflector are parallelly irradiated on the plane grating; and the light beams split by the plane grating are irradiated on the focusing mirror and focused on the linear array CCD detector. The spectrometer uses the cylindrical surface lens for focusing and correcting spectrometer astigmatism and increases the measuring sensitivity of the spectrometer in the situation of non obvious increased cost compared with the light path adopted at the present. The spectrometer is characterized by small volume and low cost.
Owner:NANKAI UNIV

Electron microscope and method for controlling focus position thereof

There are provided an electron microscope capable of carrying out focusing and astigmatism correction without depending on characteristics of a sample, and a method for controlling its focus position.
The electron microscope according to the present invention comprises: an electron optical system (2); a focus control part (3); an image detecting part (4); a first operating part (11) for mutually dividing first and second transformed images (9) and (10), which are obtained by carrying out the fast Fourier transform of first and second images (7) and (8) detected at two focus positions of a first focus position (f1) and a second focus position (f2) shifted from the first focus position by a known focus shifted quantity Δf, to obtain a measured divided quantity Rexp; divided quantity data (12) previously prepared and stored as a function of focus positions and spatial frequencies as a set of theoretical divided quantities, the theoretical divided quantities being obtained by substituting the two focus positions shifted by the focus shifted quantity Δf for an image transfer function (r,f) to obtain first and second transfer function values K(r;f) and (r;f+Δf) to mutually divide the first and second transfer function values K(r;f1) and (r;f+Δf) on a spatial frequency plane; and a second operating part (13) for making a reference to the divided quantity data (12) to derive a theoretical divided quantity K(r;f0) correlating to the measured divided quantity Rexp, and for deriving a focus position f0 corresponding to the derived theoretical divided quantity K(r;f0)/K(r;f0+Δf) as a first focus position f1.
Owner:RIKEN

Charged particle beam apparatus and automatic astigmatism adjustment method

According to the invention, techniques for automatically adjusting for astigmatism in a charged particle beam apparatus. Embodiments according to the present invention can provide a charged particle beam apparatus and an automatic astigmatism adjustment methods capable of automatically correcting astigmatism and a focal point in a relatively short period of time by finding a plurality of astigmatism correction quantities and a focal point correction quantity in a single operation from a relatively small number of 2 dimensional images. Specific embodiments can perform such automatic focusing while minimizing damages inflicted on subject samples. Embodiments include, among others, a charged particle optical system for carrying out an inspection, a measurement and a fabrication with a relatively high degree of accuracy by using a charged particle beam.
Owner:HITACHI LTD
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