Systems and methods for
laser scribing provide extended depth affectation into a substrate or workpiece by focusing a
laser beam such that the beam passes into the workpiece using a
waveguide, self-focusing effect to cause internal
crystal damage along a channel extending into the workpiece. Different optical effects may be used to facilitate the
waveguide, self-focusing effect, such as multi-
photon absorption in the material of the workpiece, transparency of the material of the workpiece, and aberrations of the focused
laser. The laser beam may have a
wavelength,
pulse duration, and
pulse energy, for example, to provide transmission through the material and multi-
photon absorption in the material. An aberrated, focused laser beam may also be used to provide a longitudinal
spherical aberration range sufficient to extend the
effective depth of field (DOF) into the workpiece.