Spectrometer using cylindrical lens for astigmatism correction

Abstract

The invention relates to a spectrometer using a cylindrical lens for astigmatism correction. The spectrometer comprises an incidence slit, a cylindrical surface lens, a concave surface alignment reflector, a plane grating, a concave focusing mirror and a line array CCD detector, wherein incidence lights pass through the incidence slit and the cylindrical surface lens in sequence, and then are irradiated on the concave surface alignment reflector; light beams of the concave surface alignment reflector are parallelly irradiated on the plane grating; and the light beams split by the plane grating are irradiated on the focusing mirror and focused on the linear array CCD detector. The spectrometer uses the cylindrical surface lens for focusing and correcting spectrometer astigmatism and increases the measuring sensitivity of the spectrometer in the situation of non obvious increased cost compared with the light path adopted at the present. The spectrometer is characterized by small volume and low cost.

Description

【Technical field】: [0001] The invention relates to a spectrum measuring instrument, which uses a cylindrical lens for astigmatism correction and combines with a line array CCD detector to obtain higher measurement sensitivity. 【Background technique】: [0002] Spectral measurement instruments are commonly used in the online detection process of industrial processes. Due to the low cost of line array detectors, spectral instruments generally use line array CCD or photodiode array multi-channel detectors. Astigmatism is a kind of aberration. It is an oblique monochromatic conical beam sent to the optical system by an off-axis object point located outside the main axis. After being refracted by the optical series, it cannot form a clear image point, but Can only form a diffuse spot. In practice, the detection height of the line array is generally below 1mm, and the optical system of the spectrometer imaging on the spectral surface of the line array detector, often due to the pr...

AI Technical Summary

Problems solved by technology

In practice, the detection height of the line array is generally below 1 mm, and the optical system of the spectrometer imaging on the spectral surface of the line array detector, often due to the problem of astigmatism, when the spectral line is the thinnest, that is, the resolution is the highest, the spectral line There is a certain height, which will be greater than 1mm, so that the energy cannot be completely received by the CCD line array detector, resulting in waste of energy and a decrease in the sensitivity of the spectrometer

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