79results about How to "Reduce spot size" patented technology

The present invention relates to the apparatus, system and method for dicing of semiconductor wafers using an ultrafast laser pulse of femtosecond and picosecond pulse widths directly from the ultrafast laser oscillator without an amplifier. Thin and ultrathin simiconductor wafers below 250 micrometer thickness, are diced using diode pumped, solid state mode locked ultrafast laser pulses from oscillator without amplification. The invention disclosed has means to avoid/reduce the cumulative heating effect and to avoid machine quality degrading in multi shot ablation. Also the disclosed invention provides means to change the polarization state of the laser beam to reduce the focused spot size, and improve the machining efficiency and quality. The disclosed invention provides a cost effective and stable system for high volume manufacturing applications. An ultrafast laser oscillator can be a called as femtosecond laser oscillator or a picosecond laser oscillator depending on the pulse width of the laser beam generated.

The invention relates to a charged particle multi-beamlet system for exposing a target using a plurality of beamlets. The system has a charged particle source, an aperture array, a beamlet manipulator, a beamlet blanker, and an array of projection lens systems. The charged particle source is configured to generate a charged particle beam. The aperture array is configured to define separate beamlets from the generated beam. The beamlet manipulator is configured to converge groups of the beamlets towards a common point of convergence for each group. The beamlet blanker is configured to controllably blank beamlets in the groups of beamlets. Finally, the array of projection lens systems is configured to project unblanked beamlets of the groups of beamlets on to the surface of the target. The beamlet manipulator is further adapted to converge each of the groups of beamlets towards a point corresponding to one of the projection lens systems.

The present invention provides a hard coat agent composition that is useful for forming a hard coat layer with excellent anti-staining properties and lubricity, as well as superior scratch resistance and abrasion resistance, on the surfaces of various articles. The present invention also provides an optical information medium using the above hard coat agent composition. A hard coat agent composition comprising a fluorine-containing block copolymer (A1), a fluorine-containing polyether compound (A2) comprising an active energy ray-reactive group, and an active energy ray-curable compound (B). An optical information medium comprising a film element composed of one or more layers including at least a recording layer (4) or a reflective layer, on a supporting substrate (20), wherein at least one of the supporting substrate (20)-side surface and the film element-side surface is formed of a hard coat layer (8) comprising a cured product of the hard coat agent composition.

The present invention provides a hard coat agent composition that is useful for forming a hard coat layer with excellent anti-staining properties and lubricity, as well as superior scratch resistance and abrasion resistance, on the surfaces of various articles. The present invention also provides an optical information medium using the above hard coat agent composition. A hard coat agent composition comprising a fluorine-containing polyether compound (A) comprising an active energy ray-reactive group, and a curable compound (B) comprising two, or three or more active energy ray-polymerizable groups within each molecule. An optical information medium comprising a film element composed of one or more layers including at least a recording layer (4) or a reflective layer, on a supporting substrate (20), wherein at least one of the supporting substrate (20)-side surface and the film element-side surface is formed of a hard coat layer (8) comprising a cured product of the hard coat agent composition.

It is described an emitter (26, 40) for X-ray tubes comprising: a flat foil with an emitting section (30, 46); and at least two electrically conductive fixing sections (31-34; 41-44); wherein the emitting section (30, 46) is unstructured.

The present invention provides an optical information medium in which the recording and/or reproducing beam incident side surface displays excellent anti-staining properties and lubricity, as well as superior scratch resistance and abrasion resistance. An optical information medium comprising a film element composed of one or more layers including at least a recording layer (4) or a reflective layer, on a supporting substrate (20), wherein at least one of the supporting substrate (20)-side surface and the film element-side surface is formed of a hard coat layer (8) comprising a cured product of the hard coat agent composition comprising a fluorine-containing block copolymer (A) and an active energy ray-curable compound (B).

A charged particle multi-beamlet system for exposing a target (11) using a plurality of beamlets. The system comprises a charged particle source (1) for generating a charged particle beam (20), a beamlet aperture array (4D) for defining groups of beamlets (23) from the generated beam, a beamlet blanker array (6) comprising an array of blankers for controllably blanking the beamlets (23), a beam stop array (8) for blanking beamlets (23) deflected by the blankers, the beam stop array (8) comprising an array of apertures, each beam stop aperture corresponding to one or more of the blankers, and an array of projection lens systems (10) for projecting beamlets on to the surface of the target. The system images the source (1) onto a plane at the beam stop array (8), at the effective lens plane of the projection lens systems (10), or between the beam stop array (8) and the effective lens plane of the projection lens systems (10), and the system images the beamlet aperture array (4D) onto the target (11).

The invention relates to a heliostat system with the function of sun pursuing, which comprises a heliostat, a mirror holder of the heliostat, a bracket of the heliostat, a driving device for sub mirrors of the heliostat and a driving device for the mirror holder of the heliostat, wherein the mirror holder of the heliostat is rotatablely installed on the bracket of the heliostat, the driving device for the mirror holder of the heliostat is respectively connected with the mirror holder of the heliostat and the bracket of the heliostat and is used for driving the mirror holder of the heliostat to rotate around a horizontal rolling shaft, the heliostat comprises at least two sub mirrors of the heliostat, the sub mirrors of the heliostat are rotatablely installed on the mirror holder of the heliostat, the driving device for the sub mirrors of the heliostat is respectively connected with the mirror holder of the heliostat and the sub mirrors of the heliostat and is used for driving the sub mirrors of the heliostat to link around respective horizontal pitching shafts, and the horizontal pitching shafts are arranged in parallel and are also arranged with the horizontal rolling shaft vertically. The heliostat system with the function of sun pursuing, which is disclosed by the invention, has a skillful design, a simple structure and higher reliability, has the function of sun pursuing, can be used for effectively improving the problem of wind resistance, is simpler to maintain and rectify and is suitable for large-scale popularization and application.

A metal layer having an aperture for delivering light, a method of forming the same, a light delivery module including the metal layer having the aperture, and a heat assisted magnetic recording head including the same are provided. The aperture of the metal layer has an inlet and an outlet of different sizes, and also has curved side surfaces. Also, the light delivery module includes the metal layer at an output end thereof, and the heat assisted magnetic recording head includes the light delivery module as an optical heating unit.

An optical coupling device has an optical wave-guide varied in difference in specific refractive index between a clad layer and a core layer, and the optical wave-guide serves as a convergent/divergent spot size converter; since reduction in cross section of the core layer is not required for the convergent/divergent spot size converter so that the optical coupling device is produced at a high production yield.

The present invention is directed to a laser communication transmitter and receiver for wireless optical communication. The laser communication transmitter uses a small diameter so correspondingly divergent beam to provide improved bit error rates. A laser communication receiver includes a diffractive optical element to permit detectors at different spatial locations to detect different wavelengths of the optical signal. An immersion lens may be employed to focus the optical signal to a spot size smaller than the photoactive area of the detector.

A defect observation apparatus includes a storage unit configured to store defect information about defects detected by an external inspection apparatus; a first imaging unit configured to capture an image of a defect using a first imaging condition and a second imaging condition; a control unit configured to correct positional information on the defect using the image captured with the first imaging unit; and a second imaging unit configured to capture an image of the defect based on the corrected positional information.

Provided is a thermally-assisted magnetic recording head with improved light density of near-field light (NF-light) with which a medium is irradiated. The head comprises: a magnetic pole; a waveguide for propagating light for exciting surface plasmon; a surface plasmon generator provided between the magnetic pole and the waveguide, coupled with the light in a surface plasmon mode, and emitting NF-light; and a clad portion provided at least between the waveguide and the surface plasmon generator and comprising a transition region in which a refractive index decreases along a direction from the waveguide toward the magnetic pole. The provision of the clad portion including the transition region enables improvement of the light density of NF-light due to the convergence of surface plasmon excited in the surface plasmon generator to predetermined locations, while avoiding the problem of temperature rise due to reduction of the volume of surface plasmon generator.

The invention provides an ink jet device for producing a biological assay substrate. The device releases a plurality of substances onto the substrate from print heads, provided with the substances. The device further comprises means to subject the printed substrates to an accelerated motion. The accelerated motion which acts about perpendicular to the surface of the substrates acts to control penetration of the substances into the substrate. The invention also relates to a method for producing a biological assay substrate, and to a biological assay substrate obtainable by such method.

The invention provides an all-fiber STED super-resolution microscopic illumination device. The device mainly consists of a laser 1, a delay unit 2 and a beam generator 3, wherein the beam generator 3mainly consists of a double-clad fiber 4 and a polarization controller 5; the beam generator 3 can convert short-wave laser light 6 and long-wave laser light 7 emitted by the laser 1 into Gauss-shapedexcitation light 8 and hollow annular loss light 9, respectively; and since the light spot centers of the generated light are completely coincided and the light is irradiated on a fluorescent sample10 in sequence after the delay of the delay unit 2, stimulated emission depletion (STED) is generated, fluorescent light 11 with extremely small light spot is stimulated, and the final resolution is not limited by the diffraction of light, thereby breaking the diffraction limit and realizing all-fiber STED super-resolution microscopic illumination. The device has the advantages of highly integrating light beam generators and enabling equipment to be more flexible and stable.

A method and system for optical measurement via a resonator having a non-uniform phase profile provides a mechanism for measuring and/or detecting sub-micron surface features with increased resolution. A second surface forming part of a resonator is illuminated through a first partially reflective surface that has a non-uniform phase profile that transitions from negative to positive phase with respect to a resonance phase value of the resonator. As a result, a reduced spot size is produced at the second surface, which enhances the resolution of a measurement and/or detection of surface features on the second surface. Additionally, if a discontinuity is provided in the non-uniform phase profile, interaction of the discontinuity with surface features of the second surface will provide enhanced resolution of the surface features. The resolution of the system is improved over the resolution that can be attained using a Fabry-Perot resonator.