The invention relates to a
pressure sensor based on surface enhanced
Raman scattering. The sensor comprises a substrate layer. A
metal layer is arranged above the substrate layer, a cavity is formed between the
metal layer and the substrate layer, holes arranged periodically are further formed in the
metal layer, and micro-nano
metal particle layers arranged periodically are arranged at the positions, located at the
vertical projection positions of the holes, above the substrate layer. According to the
pressure sensor based on surface enhanced
Raman scattering, a pressure
signal can be converted into an optical
signal, and the pressure is detected by detecting the change of
Raman scattering of the optical
signal. When pressure is applied to the sensor, pressure extrudes the metal layer, and changes the height of the cavity, so an
electromagnetic field generated by incident light between the metal layer and the micro-nano
metal particle layer is changed. The intensity of a Raman spectrum characteristic peak is further changed.
Pressure detection can be achieved by detecting the change of the Raman spectrum characteristic peak, and higher accuracy and sensitivity are achieved.