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Capacitance type sensor and preparation method thereof

A capacitive sensor and sensitive technology, applied in the field of sensors, can solve the problems of large deviation of sensor test data and the inability to eliminate the influence of capacitive noise on flexible substrates, and achieve the effect of improving accuracy and sensitivity

Inactive Publication Date: 2018-01-16
SOUTH CHINA NORMAL UNIVERSITY +2
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Some ambient gas sensors are based on flexible substrates, but the influence of flexible substrates on the capacitive noise of sensors cannot be eliminated, resulting in large deviations in sensor test data

Method used

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  • Capacitance type sensor and preparation method thereof
  • Capacitance type sensor and preparation method thereof

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Embodiment Construction

[0029] It should be noted that the embodiments in the application and the features in the embodiments can be combined with each other if there is no conflict.

[0030] reference figure 1 , figure 2 , image 3 with Figure 4 , figure 1 It is a top view of a specific embodiment of a capacitive sensor in the present invention; figure 2 It is a left side view of a specific embodiment of a capacitive sensor in the present invention; image 3 It is a schematic diagram of a specific embodiment of a heating electrode of a capacitive sensor in the present invention; Figure 4 It is a schematic diagram of a specific embodiment of a differential positive and negative electrode pair of a capacitive sensor in the present invention; a capacitive sensor includes a substrate 1, a heating electrode 2, a first insulating layer 3, a differential positive and negative electrode pair, and functionality The material layer and the second insulating layer 10, the differential positive and negative elect...

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Abstract

The invention discloses a capacitance type sensor and a preparation method thereof. A differential positive-negative electrode pair is arranged; the differential positive-negative electrode pair comprises a first positive-negative electrode pair and a second positive-negative electrode pair; a functional material layer is arranged on the first positive-negative electrode pair to realize differential measurement; and thus the accuracy and sensitivity of the capacitance type sensor are improved.

Description

Technical field [0001] The invention relates to the field of sensors, in particular to a capacitive sensor and a preparation method thereof. Background technique [0002] As one of the three technological cornerstones of modern information technology, sensors occupy an extremely important position in the construction of the national economy. In recent years, with the rapid development of smart terminals, wearable electronic devices such as smart phones and smart watches have put forward higher demands for integrated multifunctional sensors. [0003] Capacitive sensors use various types of capacitors as sensing elements to convert the measured physical or mechanical quantities into a conversion device for capacitance changes. In fact, it is a capacitor with variable parameters. For example, the ambient gas sensor can detect and test the content of some gases in the environment, showing great application potential in the field of environmental protection. Some environmental gas sen...

Claims

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Application Information

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IPC IPC(8): G01N27/22
CPCG01N27/225G01N2027/222G01N27/221G01N27/223G01N27/226
Inventor 周蕤李君叶倩灵尼克·德·罗伊周国富
Owner SOUTH CHINA NORMAL UNIVERSITY
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