The application exposes a miniature four-channel circular flow type triaxial
silicon jet gyro; the jet gyro comprises a four-channel circular flow type triaxial
angular velocity sensitive element and a PCB, and the sensitive element is electrically connected with the PCB, wherein the sensitive element comprises a PMMA upper cover, an upper
silicon board, a lower
silicon board, a PMMA bottom cover and a piezoelectric
ceramic round oscillator; the piezoelectric
ceramic round oscillator is embedded in the PMMA upper cover; the upper silicon board is provided with a jet network; the lower silicon board is provided with a jet network and a hot line; the PMMA upper cover, the upper silicon board, the lower silicon board and the PMMA bottom cover are successively bonded to form the sensitive element. The jet gyro adopts one piezoelectric
ceramic round oscillator to drive four-channel circular flow, not only is simple in structure, long in life and low in
power consumption, and implements deformation direction of the piezoelectric ceramic round oscillator and direction turning of
jet flow network planes; the area of the piezoelectric ceramic round oscillator is large, the driving ability is strong, the
jet velocity is high, and the jet gyro sensitivity is high; and angular velocities of three orthogonal directions can be sensitive at the same time, and multi-axis integration is achieved.