The invention discloses a controllable high-frequency response probe testing motion device for microwave and millimeter wave chips, including an industrial computer, a control module, a drive machine, a servo motor, a precision displacement device and a grating ruler. The precision displacement device includes a precision workbench , driver I, piezoelectric ceramics and flexible hinges, the industrial computer is connected to the control module, the control module is connected to the driver, the driver is connected to the servo motor, the servo motor is connected to the driver through the encoder, the servo motor is connected to the precision workbench, the precision workbench is connected to the driver I, and the driver I is connected to the piezoelectric ceramic, the piezoelectric ceramic is connected to the flexible hinge, the flexible hinge is connected to the workbench, the workbench is connected to the control module through the grating ruler, and the driver I is connected to the control module. The existing one-time positioning is changed to the motor driving the screw for coarse positioning. , The precision displacement device is the secondary positioning of fine positioning. The precision positioning system has a fast test speed, greatly shortens the test cycle, improves efficiency and production capacity, and reduces test costs without affecting the test pass rate.