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Controllable high-frequency-response probe test moving device for microwave and millimeter wave chips

A motion device and millimeter-wave technology, which is applied in the field of high-frequency response probe test motion devices, can solve the problems of uncontrollable contact stress between probes and chips, high test difficulty, and low test accuracy, so as to shorten the test period and reduce the test time. Cost, the effect of improving test accuracy

Active Publication Date: 2015-07-22
THE 41ST INST OF CHINA ELECTRONICS TECH GRP
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0017] In order to solve the above problems, the present invention proposes a controllable high-frequency response probe test movement device for microwave and millimeter-wave chips. The problem to be solved is that the contact stress between the probe and the chip is uncontrollable and the variation range Large size, long test time, low test accuracy, difficult test, etc.
Changing the existing one-time positioning to secondary positioning needs to solve the problem of high precision and fast response of microwave and millimeter wave chip probe testing

Method used

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  • Controllable high-frequency-response probe test moving device for microwave and millimeter wave chips
  • Controllable high-frequency-response probe test moving device for microwave and millimeter wave chips

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Embodiment Construction

[0051] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

[0052] The invention adds a set of precision displacement device on the basis of the existing device. The existing one-time positioning is changed to a secondary positioning in which the motor drives the screw for rough positioning and the precision displacement device is for fine positioning. image 3 Its control schematic diagram, the precision positioning device is driven by piezoelectric ceramics, and the flexible hinge is used as the transmission mechanism.

[0053] As a power device, piezoelectric ceramics use the inverse piezoelectric effect of piezoelectric ceramics to achieve small displacements. When the voltage of piezoelectric ceramics is changed, the length of piezoelectric ceramics changes accordingly, and the elongation is proportional to the voltage within a certain range. Can provide high-frequency, high-precision reciprocating motion,...

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Abstract

The invention discloses a controllable high-frequency-response probe test moving device for microwave and millimeter wave chips. The controllable high-frequency-response probe test moving device comprises an industrial personal computer, a control module, a driver, a servo motor, a precision displacement device and a grating ruler. The precision displacement device comprises a precision workbench, a driver I, piezoelectric ceramics and a flexible hinge. The industrial personal computer is connected with the control module, the control module is connected with the driver, the driver is connected with the servo motor, the servo motor is connected with the driver through an encoder, the servo motor is connected with the precision workbench, the precision workbench is connected with the driver I, the driver I is connected with the piezoelectric ceramics, the piezoelectric ceramics is connected with the flexible hinge, the flexible hinge is connected with the workbench, the workbench is connected with the control module through the grating ruler, the driver I is connected with the control module, prior one-time positioning is changed into coarse positioning in which the motor drives a lead screw, and the precision displacement device belongs to secondary positioning of fine positioning. A fine positioning system is high in test speed, and on the premise of not affecting test acceptability, test cycle is shortened greatly, efficiency and productivity are improved, and test cost is reduced.

Description

technical field [0001] The invention relates to a controllable high-frequency response probe testing motion device for microwave and millimeter wave chips. Background technique [0002] The development and production of microwave and millimeter wave high-frequency chips is a cutting-edge high-tech industry in the world today, and its application proportion in modern electronic complete machines is also increasing. Chip testing is not only a link in the integrated circuit industry chain, but also the key to verifying the factory . Chip testing is the best tool for analyzing chip defects. Through testing, the yield can be improved and unnecessary losses can be reduced. [0003] After the semiconductor chip is manufactured and before packaging, the chip on the silicon wafer needs to be tested, and a good chip is selected for packaging. The testing process is: put the test probe on the chip, and the test platform gives the input stimulus signal. Compare the actual output of th...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R31/26
Inventor 张文兴赵树伟吴强王加路曲志明马建壮
Owner THE 41ST INST OF CHINA ELECTRONICS TECH GRP
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