34 results about "Surface wave excitation" patented technology

To sustain uniform generation of plasma constantly over a large area. [MEANS FOR SOLVING PROBLEMS] A plasma source (10) comprises a microwave generator, a microwave waveguide (12) and a dielectric block (13), and a plasma source (20) also comprises a microwave generator, a microwave waveguide (22) and a dielectric block (23) similarly. The lid (3) of a chamber (1) is fixed with the microwave waveguides (12, 22) in parallel, and the dielectric blocks (13, 23) are arranged in the chamber (1). A reflector (30) is interposed between the dielectric blocks (13, 23) so that electromagnetic waves (microwaves) propagating through the dielectric blocks (13, 23) are prevented from advancing into counterpart dielectric blocks as reflection waves. Consequently, the plasma sources (10, 20) are controlled independently. Furthermore, a side reflector (40) is arranged at the outer circumference of each of dielectric blocks (23, 13) so that a standing wave of the electromagnetic wave propagating through the dielectric blocks (13, 23) is formed thus forming a large-area standing wave mode of surface wave SW uniformly.

This surface wave excitation plasma CVD system, along with feeding a material gas including silicon element by feeding the material gas into a chamber 1 from at least one of an upper surface gas introduction conduit and a side surface gas introduction conduit, also activates the material gas with a surface wave excitation plasma and feeds a process gas which initiates chemical reactions within the material gas into the chamber 1 from a process gas introduction conduit 5. A gas feed aperture of the upper surface gas introduction conduit and / or the side surface gas introduction conduit is provided in a position which is closer to the substrate than the gas feed aperture of the process gas introduction conduit.

The present invention provides a surface wave excitation plasma generator in which surface wave excitation plasma is efficiently generated. A surface wave excitation plasma generator including an annular waveguide and a dielectric tube is provided. The annular waveguide 2 includes an inlet 2a for introducing a microwave M, an end plate 2b for reflecting the microwave M introduced and propagating within the waveguide, and a bottom plate 2c on which slot antennas 2d are formed at a predetermined interval. When the wavelength of the microwave M in the waveguide is λg, the length from position b through positions c, d, e to position f on the bottom plate 2c, i.e. the circumferential length (π×D1) of the annular waveguide, is set as 2 λg, and the positions b, c, d, e, f are spaced apart at an interval of λg / 2. Since the slot antennas 2d are arranged at two positions c and e, the interval between these two slot antennas 2d is equal to the wavelength λg in the waveguide.

A high-frequency heating device (1a) has a first generating unit (8), a surface wave exciter (9), and a first coupling unit (12). The first generation unit (8) generates microwaves. A surface wave exciter (9) has a plurality of metal plates (11) periodically arranged at predetermined intervals in a microwave propagation direction, and heats a heating object (6) by propagating microwaves in a surface wave mode. The first coupling part (12) is arranged in the middle part of the surface wave excitation body (9) in the propagation direction (D) of the microwave, so that the microwave generated by the first generating part (8) passes through the first coupling part (12) It is supplied to the surface wave exciter (9). According to this aspect, the object to be heated can be heated more uniformly.

The invention discloses a shape memory alloy micro valve based on acoustic surface waves and a control method of the shape memory alloy micro valve. The shape memory alloy micro valve comprises a PCB, an acoustic surface wave excitation device, a PDMS coagulating body with a micro-channel and a shape memory alloy line formed by a first crooked section at the indoor temperature and a second straight section at the indoor temperature; the acoustic surface wave excitation device and the PDMS coagulating body are installed on the PCB, a groove is formed in the PDMS coagulating body, and the other end of the shape memory alloy line is connected with the PCB; the section, stretching across a propagation path of the acoustic surface waves excited by the acoustic surface wave excitation device and located on the propagation path, of the shape memory alloy line is covered with paroline micro liquid on the propagation path; and the second section of the shape memory alloy line is sleeved with a guide pipe connected with the PCB, and a plastic sheet is connected to the other end of the second section of the shape memory alloy line and extrudes a part, located between the groove and the micro-channel, of the PDMS coagulating body and the under pushing force to deform so as to block the micro-channel. The shape memory alloy micro valve has the beneficial effects of being simple in structure, small in size and easy to integrate.

The high-frequency heating device (100) has: a high-frequency power generating part (120), which generates high-frequency power; a surface wave exciter (103), which uses surface waves to propagate high-frequency power to the heated object (102) heating; a high-frequency power supply unit (110), which supplies high-frequency power to the surface wave excitation body (103); and a setting table (101), which sets the object to be heated (102). The high-frequency power generator (120) sets the frequency and surface area of ​​the high-frequency power supplied to the surface wave exciter (103) according to the desired surface concentration of the high-frequency power near the surface wave exciter (103). The object to be heated (102) is heated according to the size relationship between the excitation frequency of the wave excitation body (103). Thereby, there is provided a high-frequency heating device (100) capable of changing the heating state in the thickness direction of an object to be heated (102).

A new and comparatively small type of open-ended microwave applicators has been disclosed. They are for example suitable for transmission into and reception from contacting objects such as protruding human bodyparts for inhomogeneity detection by tomographic methods. The applicators according to the invention are of the dielectric-filled open-ended ridged rectangular TE10 type, with an insert filling the ridge and having a higher permittivity than the surrounding space. The shape of the insert can be as a frustrum pyramid towards the opening. The overall design promotes narrow beamwidths and minimizes nearfields and surface wave excitation.

The invention discloses surface wave excitation and long-distance transmission structures based on metamaterials. The first structure, the second structure and the third structure are free space coupling structures, and the fourth structure is an end face coupling structure. All the four structures do not need to coupled through lenses high in refractive index, integration of optical elements is facilitated, meanwhile, the propagation distance of light can reach millimeter magnitude, and the structures can be widely used in the optical elements. The structures are simple, SPPs are easily coupled under the circumstance that no lens high in refractive index is used, integration of the optical elements is facilitated, meanwhile, the propagation distance of the light can reach the millimeter magnitude, and the structures can be widely used in the optical elements.

The embodiment of the present application discloses a surface wave excitation device. The surface wave excitation device in the embodiment of the present application includes: a metal waveguide, a coupling part, a feeding part and a transmission line, the metal waveguide sleeve is placed outside the transmission line, the coupling part is placed inside the metal waveguide, and the metal waveguide It is a coaxial structure with the transmission line; the feeding part is connected to the coupling part, and the coupling part is arranged in parallel with the transmission line, and there is a gap between the coupling part and the conductor of the transmission line; so that the electromagnetic wave Propagated from the feeding part to the coupling part, coupled to the surface of the transmission line through the coupling part to transmit the surface wave. The surface wave excitation device in the embodiment of the present application is used to reduce surface wave radiation loss.

The invention discloses an array substrate, comprising a base substrate; a piezoelectric induction layer formed on the base substrate; a surface acoustic wave exciting electrode and a surface acoustic wave receiving electrode formed on the piezoelectric induction layer; The photosensitive resistance layer formed on the piezoelectric sensing layer, the photosensitive resistance layer is located between the surface acoustic wave excitation electrode and the surface acoustic wave receiving electrode, and the invention also discloses a display panel and a display device including the array substrate , the present invention uses surface acoustic wave excitation electrodes and receiving electrodes with fast response speed, high sensitivity and small volume to realize the fingerprint recognition function, which can improve the speed and sensitivity of fingerprint recognition.

The invention relates in particular to a method for determining physical, chemical and / or biological properties of a medium (M) by means of a first and a second transmitter-receiver pair (SE1, SE2; SE1, SE3) The receivers (SE2, SE3) of the receivers (SE2, SE3) receive surface waves (OW1, OW2, OW3) originating at least in part from the first or second acoustic waves (VW1, VW2, ...), which are passed through the guiding element ( The acoustic surface waves (OW1, OW2, OW3) propagating at the shell surfaces (11, 12, 21, 22) of R) are excited, propagate in the medium (M) and at least partially in turn act as surface waves (OW1, OW2, OW3) ) is coupled into the guide element, eg the tube (R) or the shell surface (11, 12, 21, 22) of the tube section. According to the invention, it is proposed: - Excitation of surface waves (OW1, OW2) by the transmitter (SE1) of the first transmitter-receiver pair (SE1, SE2), the propagation direction of said surface waves being parallel to the direction of the guide element (R) The longitudinal extension direction (z) extends, and the surface wave (OW3) is excited by the transmitter (SE1) of the second transmitter-receiver pair (SE1, SE3), the propagation direction of the surface wave being set relative to the guide The longitudinal extension (z) of the element (R) has a defined angle α, where 0°

To sustain uniform generation of plasma constantly over a large area. In the surface wave excitation plasma processing device, a plasma source includes: a microwave generator, a microwave waveguide and a dielectric block; and a plasma source also includes: a microwave generator, a microwave waveguide and a dielectric block. The lid of a chamber is fixed onto the microwave waveguides in parallel, and the dielectric blocks disposed in the chamber. A reflecting plate is disposed between the dielectric blocks so that electromagnetic waves propagating through the dielectric blocks are prevented from advancing into the counterpart dielectric blocks as reflected waves. Consequently, the plasma sources are controlled independently. Furthermore, a side reflector is disposed at outer circumference of each of the dielectric blocks so that a standing waves of the electromagnetic waves propagating through the dielectric blocks is formed thus forming a large area standing wave mode of surface waves uniformly.