High frequency heating device
A high-frequency heating device, surface wave technology, applied in the direction of electric heating device, microwave heating, electric/magnetic/electromagnetic heating, etc.
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Embodiment approach 1
[0029]
[0030] figure 1 , figure 2 It is a vertical cross-sectional view and a horizontal cross-sectional view schematically showing the structure of the high-frequency heating device 1 a according to Embodiment 1 of the present invention, respectively.
[0031] Such as figure 1 , figure 2 As shown, the high-frequency heating device 1 a has a heating chamber 2 , a generation unit 8 , a surface wave excitation body 10 , a coupling unit 12 , a reflection unit 14 , and a control unit 16 . The high-frequency heating device 1 a is configured to heat the object to be heated 6 placed on the mounting table 4 with microwaves propagating in the surface wave mode on the surface of the surface wave exciter 10 .
[0032] in addition, figure 2 Schematically shows the situation in which microwaves in the surface wave mode propagate on the surface wave excitation body 10, and the heating object 6 is placed on the mounting table 4 (in the figure 2 not shown in the figure).
[0033...
Embodiment approach 2
[0056] Regarding the high-frequency heating device 1b according to Embodiment 2 of the present invention, the differences from Embodiment 1 will be mainly described. image 3 It is a cross-sectional view schematically showing the structure of the high-frequency heating device 1b. image 3 Schematically shows the situation in which microwaves in the surface wave mode propagate on the surface wave excitation body 10, and the heating object 6 is placed on the mounting table 4 (in the image 3 not shown in the figure).
[0057] In Embodiment 1, microwaves are reused by reflecting the surface wave S2 that has reached the end side 17 of the surface wave excitation body 10 . On the other hand, in Embodiment 2, microwaves are reused by converting microwaves in the surface wave mode into microwaves in another mode by impedance matching.
[0058] Such as image 3 As shown, the high-frequency heating device 1 b has a matching unit 22 and a converting unit 24 instead of the reflecting ...
Embodiment approach 3
[0070] Regarding the high-frequency heating device 1 c according to Embodiment 3 of the present invention, the difference from Embodiment 2 will be mainly described. Figure 4 It is a cross-sectional view schematically showing the structure of the high-frequency heating device 1c. Figure 4 Schematically shows the microwave propagation of the surface wave mode on the surface wave excitation body 20, and the heating target object 6 on the mounting table 4 (on Figure 4 not shown in the figure).
[0071] Such as Figure 4 As shown, the high-frequency heating device 1 c does not have the conversion unit 24 and the power storage unit 26 , but has a coupling unit 32 instead. The high-frequency heating device 1 c has a surface wave exciter 20 instead of the surface wave exciter 10 . The surface wave exciter 20 has a structure different from that of the surface wave exciter 10 according to the second embodiment. The coupling part 32 corresponds to the second coupling part.
[00...
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