The invention is directed to a scanned probe
microscope including one plate allowing for tip scanning and the other allowing for sample scanning, with the
optical axis of the scanned probe
microscope being free to permit incorporation into standard optical microscopes. The top plate can be hinged onto the bottom plate, or the top plate can simply be placed on the bottom plate and a rough approach is caused by a
dc motor or other mechanism which will enable the two flat plate scanners to have a large z range. In another embodiment, the
microscope includes three plates which allow sample scanning, tip scanning and two tips to be operational at the same time.A microscope in accordance with the invention may use a
liquid cell, may use a near-field optical element made of
silicon cantilever technology, or may use an apertureless probe for apertureless near-field scanning optical
microscopy.The microscope may use a
tuning fork for feedback in any combination of geometries of tip, sample and
tuning fork and with or without gluing of the tip to the
tuning fork and with control of tip attachment or near-attachment to the tuning fork. The control of tip attachment to the tuning fork may be based on near zero backlash movement technology, and the tuning fork can be used in non-contact, contact and intermittent contact
modes of operation. A
fiber based feedback
system may use either straight or cantilevered fibers, and the detection of signals may be based on amplitude, phase,
wavelength or other optical parameters that can be used to monitor the movement of an SPM sensor.