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Near-field scanning optical microscope poisitioned scanning-imaging method

A technology of near-field scanning optics and positioning scanning, which is applied in the field of scanning probe microscopy, can solve the problem that NSOM does not have a high-precision positioning method, and achieve the effect of simple structure

Inactive Publication Date: 2003-03-26
NANKAI UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The current NSOM does not have a high-precision positioning method

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0006] Embodiment 1: To establish a micron-scale light-emitting point, the point light source that can be used includes: a single-mode optical fiber end face coupled with a laser, an illuminated small hole, a semiconductor laser on a tiny light-emitting surface, and the like. With the help of a traditional optical microscope, a two-dimensional fine-tuning device (readable and with an accuracy of 1 μm) is assembled on the sample stage. The sample and the reference luminescent point were fixed on the microscope sample stage with a two-dimensional fine-tuning device (readable and with an accuracy of 1 μm), and the two were at the same height. If an NSOM scanner is used to control sample scanning, the sample is fixed on the scanner, the scanner is fixed on the sample stage, and the luminescent point is fixed on the sample stage or on the scanner. The optical probe and the microscope objective lens are fixed together, and the tip of the optical probe is at the same height as the im...

Embodiment 2

[0007] Embodiment 2: To establish a micron-scale light-emitting point, the point light source that can be used includes: the end face of a single-mode optical fiber coupled with a laser, a small hole to be illuminated, a semiconductor laser on a tiny light-emitting surface, etc. On the basis of the existing NSOM, a two-dimensional fine-tuning device (readable and with an accuracy of 1 μm) is assembled on the sample stage. The sample and the reference luminescent point were fixed on a fine-tuning platform with a two-dimensional fine-tuning device (readable and with an accuracy of 1 μm), and the two were at the same height. If an NSOM scanner is used to control sample scanning, the sample is fixed on the scanner, the scanner is fixed on the fine-tuning platform, and the luminous point is fixed on the fine-tuning platform or on the scanner. Build a microscope imaging device and fix it together with the optical probe holder, the microscope imaging object plane is at the same heigh...

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PUM

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Abstract

A method for a near field scan-optical microscope positioned scanning image is that by using micrometer dimension luminous points as the position reference points with the help of traditional optical micro scope and trimming flat table to observe by micro image device and measures in precision relative shift of the reference luminous points center and the target zone, adjusts optical probe to the center of the reference luminous optical probe, then further adjusts optical probe to the center of refrence luminous points according to the relative shift of the reference luminous points center and sample target zone, realizing NSOM positioning scanning and imaging with accuracy reaching to 1 micro meter.

Description

technical field [0001] The invention relates to a near-field scanning optical microscope probe positioning scanning imaging technology on the surface of a sample, and belongs to the technical field of scanning probe microscopy. Background technique [0002] Near-field scanning optical microscopy (NSOM) has ultra-high optical resolution (10nm) compared to conventional optical microscopy. In practice, most of the sample surfaces have different optical topography between local regions. The sample stage of a traditional optical microscope generally has a fine-tuning device, which can quickly observe the sample in a wide range by moving the sample. However, NSOM uses scanning imaging rather than direct imaging. The piezoelectric scanner controls the ultra-micro-optical probe for point-by-point imaging. The probes used are generally fiber optic probes, tetrahedral probes, etc., and the imaging time takes several minutes to more than ten Minutes, the imaging range is from a few m...

Claims

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Application Information

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IPC IPC(8): G01Q60/18G02B21/00
Inventor 张天浩吴朝晖张春平张光寅颜彩繁杨嘉孙磊
Owner NANKAI UNIV
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