The invention relates to the micro-energy field, in particular to a vibratory drive composite micro-power source based on the piezoelectric effect and the
electromagnetic induction. The micro-power source adapts the requirement of the micro electro
mechanical system development for the micro-energy and comprises a substrate, a
peripheral base, cantilevers and a
mass block, wherein the substrate is fixed with the lower surface of the
peripheral base by bonding; a vertical through hole is arranged in the middle of the
mass block; an
induction coil is processed on the upper surface and / or the lower surface of the
mass block; a micro permanent columnar
magnet is fixed on the upper surface of the substrate; PZT
piezoelectric thin films are arranged on the cantilevers; a plurality of external
lead bonding pads are arranged on the
peripheral base; and the two ends of the induction coils and the two polarized surfaces of the PZT
piezoelectric thin films are respectively connected with the corresponding external
lead bonding pads by leads. The power source has reasonable and concise structure, is liable to
miniaturization and integration, and can provide power to the micro electro mechanical systems at high output
energy density and high output efficiency, realize self power supply of the micro electro mechanical systems and meet the requirement of the micro electro
mechanical system development for the micro-energy.