The invention discloses ultrasonic micro
grinding and
processing equipment and a technology thereof. The equipment comprises a
vibration isolation operating table, wherein columns which are in left-right symmetric arrangement are fixed on the
vibration isolation operating table, the columns are connected via a beam, a main shaft component which drives a
grinding device to rotate at a high speed is arranged on the beam, an
ultrasonic vibration platform is arranged below the main shaft component, and the
ultrasonic vibration platform is a two-dimensional
ultrasonic vibration platform which is driven by a piezoelectric stack
actuator and takes a polar coordinate
system as an operating coordinate
system. According to the single-drive polar coordinate two-dimensional ultrasonic micro
grinding and
processing equipment, provided by the invention, during
processing, the piezoelectric stack
actuator is selected for replacing the existing common ultrasonic amplitude
transformer as a driving source, amplitude and frequency can be adjusted, and at the same time, the structure of the ultrasonic vibration platform is greatly simplified; besides, multiple grinding
modes, such as
dry grinding,
wet grinding,
peripheral grinding, face grinding and the like, are provided, and processing effects are better; after the ultrasonic micro grinding and processing equipment is used for processing workpieces, the processing is simpler and more diversified, and the precision of processed workpieces is higher.