The present invention provides a method,
system, and components for protecting reticles and specifically for minimizing
haze formation on reticles during storage and use. By substantially continually maintaining a purge in a storage housing having a reduced
humidity level on reticles or by temporarily storing the
reticle in a container in proximity to a
desiccant or
getter when not being purged,
haze formation can be eliminated, minimized, or sufficiently controlled. Moreover, a
filter media in the container may be positioned to be “recharged” during the substantially continual purging of the
reticle, a reduced desirable
humidity level can be readily maintained in the
reticle container when the container is not currently being purged. Additionally, the
system of the invention can comprise an ionizer associated with the purge
system. For example, the ionizer can be associated with at least one of the plurality of purge lines of the purge system. The system of the invention can also include a purge gas source connected to the purge system that comprises a source of CDA or extra CDA. The storage housing can comprise a plurality of shelves that each include a plurality of reticle storage receptacles.