A fault detection method for detects, within a
semiconductor device, a fault in a
delay chain that is provided within the
semiconductor device and is made up of
delay parts that are each formed by
delay cells. The method judges if a fault exists in a first specific delay
cell within a first delay part when testing the first specific delay
cell, by detecting a first relative
delay time between input and output signals of the first specific delay
cell, and
processing the first relative
delay time at a timing based on an output of a delay cell within a second delay part that is provided at a stage preceding or subsequent to the first delay part. The method judges if a fault exists in a second specific delay cell within the second delay part exists when testing the second specific delay cell, by detecting a second relative
delay time between input and output signals of the second specific delay cell, and
processing the second relative delay time at a timing based on an output of a delay cell within the first delay part.