A solenoid plunger (36) is disposed for reciprocation in a plunger pocket that is formed by the stationary parts of a solenoid-type actuator (10). A flexible diaphragm (22) closes the plunger pocket's open mouth and is deformed by movement of a plunger (36) between an open position, in which it is displaced from a valve seat (20), and a closed position, in which it is seated on the valve seat and thereby prevents flow from a valve inlet (16) to a valve outlet (18). The diaphragm thereby isolates the plunger from the fluid thereby being controlled, but a separate, incompressible fluid fills the chamber in which the plunger reciprocates. A through-plunger passage (44, 56) provides a low-flow-resistance path for the incompressible fluid to flow into and out of the portion (52) of the plunger chamber behind the plunger as the plunger moves. This reduces actuation time and thus the energy required for an actuation. The chamber in which the plunger reciprocates is formed by elements (22, 26, 32, and 34) through which the incompressible fluid can diffuse only very slowly, so the actuator can be long-lived even if it small in size.