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36results about How to "Reduce torque shock" patented technology

Method, device and system for controlling engineering machinery gear shifting

The invention provides a method, device and system for controlling engineering machinery gear shifting, wherein the method, device and system provided by the invention are used for solving the problem that the speed change box is subjected to greater impact caused by the clutch combination control method of mechanical land leveler in the prior art. The method comprises the following steps: determining the rotation speed difference between a speed change box input shaft and an engine when a clutch of engineering machinery is subjected to zero zone combination; and comparing the rotation speed difference with a preset value, and increasing the current of a clutch electromagnetic valve coil when the rotation speed difference is greater than the preset value, thus the clutch is combined further. By adopting the technical scheme provided by the invention, shock-less gear shifting can be realized, and the components of the speed change box are protected effectively; the torque impact of the clutch is released, and the service life is prolonged; and the working intensity of a driver is relieved, and the operation comfort is improved.
Owner:SANY HEAVY IND CO LTD (CN)

Double-workpiece-platform same-phase rotation exchange method based on parallel connection mechanisms, and device thereof

The invention relates to a double-workpiece-platform same-phase rotation exchange method based on parallel mechanisms, and a device of the method, belonging to a technology of semiconductor manufacturing equipment. The device comprises two workpiece platforms, a rotary transfer platform and the two parallel anti-rotation mechanisms; in the rotating exchange process of the two workpiece platforms,the two workpiece platforms are caught and blocked by the rotary transfer platform which rotates around the center of a base station, so that the exchange between an exposure station and a pretreatment station can be realized; and the rotation of the two workpiece platforms can be controlled by the parallel anti-rotation mechanisms, so that the two workpiece platforms can be ensured to have the same phase in the exchange process. The invention solves the problems that the existing scheme for exchanging the platforms in a linear way is high in impact torque and more in platform exchange beats,the existing scheme for exchanging the platforms in a rotating way is reverse in phases of the two workpiece platforms, cables are wound, a target of a laser interferometer is lost, and the like; a smaller mass balance system is adopted, so that the balance time is better shortened, the system is simplified, the cost is reduced, the platform exchange beats are reduced, the time for exchanging theplatforms can be reduced, and the yield of a photoetching machine is effectively improved.
Owner:HARBIN INST OF TECH

Axial-field permanent magnet compensated impulse generator with double contra-rotating rotors

The invention relates to an axial-field permanent magnet compensated impulse generator with double contra-rotating rotors and belongs to the technical field of an impulse generator. The axial-field permanent magnet compensated impulse generator comprises a left rotor, a stator disc, a right rotor, two end caps and a shell. The left rotor, the stator disc and the right rotor are sequentially arranged in a hollow-square-shaped space formed by the two end caps and the shell along an axial direction. The left rotor along with one of the end caps and the right rotor along with the other end cap are in mirror symmetry on two sides of the stator disc. An air gap is formed between the left rotor and the stator disc, and another air gap is formed between the stator disc and the right rotor. The left rotor comprises a left rotor disc yoke, a left rotor permanent magnet, a left rotor compensation disc, a left rotor bandage, a left rotor shaft and a left rotor support. The stator disc comprises a stator support and a stator disc yoke. The double contra-rotating rotor compensated impulse generator is capable of solving the problem that the sizes of two motors are enlarged due to the fact that the two motors are arranged side by side and enabled to rotate reversely to counteract electromagnetic torque impact generated by the existing impulse generator during discharging.
Owner:HARBIN INST OF TECH

Rotary exchanging method and rotary exchanging device for double workpiece platforms based on synchronous steering of turntable gear

The invention discloses a rotary exchanging method and a rotary exchanging device for double workpiece platforms based on synchronous steering of a turntable gear and belongs to semiconductor manufacturing equipment. The device comprises a rotary platform switching device consisting of a rotary motor stator, a rotary motor rotor, a rotating platform embedded in a base station and a rotary platform switching gear, wherein a liftable first shaft coupling device and a second shaft coupling device are arranged on the rotary platform; a first workpiece platform rotating shaft is arranged at the bottom of a first workpiece platform; a first workpiece platform switching device is arranged on the lateral surface of the first workpiece platform; a first workpiece platform gear is arranged at the waist part of the first workpiece platform; a second workpiece platform rotating shaft is arranged at the bottom of a second workpiece platform; a second workpiece platform switching device is arrangedon the lateral surface of the second workpiece platform; and a second workpiece platform gear is arranged at the waist part of the second workpiece platform. According to the rotary exchanging methodand the rotary exchanging device disclosed by the invention, in the switching process of double platforms, the orientations of the workpiece platforms are always kept unchanged and the problems that a cable in a traditional rotary platform switching scheme is not convenient to mount and an interferometer loses a target are solved; and meanwhile, the rotary exchanging method and the rotary exchanging device disclosed by the invention have the advantages that a rotational inertia in the specific implementation process is small, the required torque under the same platform switching time is smalland the like.
Owner:HARBIN INST OF TECH

Hollow radial-magnetic-field permanent magnet opposite-rotating double-rotor compensation pulse electric generator

The invention discloses a hollow radial-magnetic-field permanent magnet opposite-rotating double-rotor compensation pulse electric generator, and belongs to the technical field of pulse electric generators. The hollow radial-magnetic-field permanent magnet opposite-rotating double-rotor compensation pulse electric generator aims at solving the problems that two electric generators are arranged in parallel at present and synchronously and oppositely rotate to counteract electromagnetic torque impacting generated during discharging of the pulse electric generators, and the sizes of the electric generators are enlarged accordingly. The hollow radial-magnetic-field permanent magnet opposite-rotating double-rotor compensation pulse electric generator comprises an outer rotor, an inner rotor and a stator. An inner rotor shaft and an outer rotor shaft are coaxial, the outer rotor, the stator and the inner rotor are sequentially and coaxially arranged from outside to inside, an outer air gap is formed between the outer rotor and the stator, and an inner air gap is formed between the stator and the inner rotor. An inner rotor yoke is fixed to the inner rotor shaft, an inner rotor permanent magnet is arranged on the outer circumference surface of the inner rotor yoke, and an inner rotor compensation cylinder and an inner rotor bandage are sequentially arranged on the outer circumference surface of the inner rotor permanent magnet; the magnetic field formed by the inner rotor permanent magnet and the magnetic field formed by the outer rotor permanent magnet are intersected with one side of a stator armature winding. The hollow radial-magnetic-field permanent magnet opposite-rotating double-rotor compensation pulse electric generator is a compensation pulse electric generator.
Owner:HARBIN INST OF TECH

Three-level synchronous starter/generator starting control method based on current/rotate speed timesharing loop closing

The invention relates to a three-level synchronous starter / generator starting control method based on current / rotate speed timesharing loop closing, and aims at problems including torque shock and unrealizable motor dynamic starting when the method in the prior art initially starts, the initial start of a motor is finished through main generator armature current closed-loop regulating voltage vector, the following starting process of the motor is finished through rotate speed closed-loop regulating voltage vector, so that a stable starting function and a dynamic starting function of the motor in whole starting process are realized. The three-level synchronous starter / generator starting control method comprises the following advantages of 1) reducing torque shock when the motor static initial starting, prolonging service life of a motor rotating shaft, and improving stability of motor starting process; and 2) realizing the motor dynamic starting function, and reducing defects brought to an aero-engine and caused by large amount of unable timely derived high temperature aviation kerosene in an engine oil tube when starting failing.
Owner:NORTHWESTERN POLYTECHNICAL UNIV

Internal drive-external power generation integrated pulse generator power supply

An internal drive-external power generation integrated pulse generator power supply relates to the technical field of inertial energy storage pulse power supply. The invention aims at solving the problem that the prior pulse generator and the prime mover are connected through the coupling, the coupling is easy to be subjected to torque impact, the axial length of the system is increased, and the compactness of the structure is poor. A generator is arranged inside the casing, a motor is arranged inside the generator, an electromagnetic field is separated between the generator and the motor through a magnetic isolation ring, and the armature winding of the motor is connected with a three-phase alternating current to drive the rotor core of the motor to rotate, thereby driving the magnetic isolation ring and the rotor yoke of the generator to rotate to generate electric power. The iInternal drive-external power generation integrated pulse generator power supply is used to increase the energy density and power density of the system.
Owner:HARBIN INST OF TECH

Two-workpiece-platform rotary exchange method and device based on cable-box anti-rotation mechanisms

InactiveCN102520587ASolve the problem of too many beats (five beats)Solve the problem of large moment of inertia and long completion timeSemiconductor/solid-state device manufacturingPhotomechanical exposure apparatusRotary switchExchange time
The invention discloses a two-workpiece-platform rotary exchange method and a device based on cable-box anti-rotation mechanisms, belonging to the technology of semiconductor manufacturing equipment. The device comprises two workpiece platforms, a rotary switching platform and two cable-box anti-rotation devices, wherein in the rotary exchange process of the two workpiece platforms, the rotary switching platform clamps the two workpiece platforms and rotates around the center of a base platform so as to realize exchange of an exposure station and a preprocessing station; and the cable-box anti-rotation mechanisms control self rotation of the two workpiece platforms so as to guarantee the same phase of the two workpiece platforms in the platform exchange process. The device in the invention can be used for solving the problems of large impact torque and more platform exchange steps in the existing linear platform exchange scheme and phase reverse of the two workpiece platforms, cable winding and target missing of a laser interferometer and the like in the existing rotary platform exchange scheme, and adopts a smaller weight balancing system so as to be beneficial to shortening the balance time; and simultaneously the system is simplified, the cost is reduced, the platform exchange steps are reduced, the platform exchange time is shortened, and the yield of photoetching machinesis effectively improved.
Owner:HARBIN INST OF TECH

Active short-circuit method for preventing torque impact

The invention discloses an active short-circuit method for preventing torque impact. The method comprises the following steps: using a direct-current high-voltage detection circuit to detect a direct-current bus voltage, using a speed detection circuit to detect a rotating speed of a motor, and if the bus voltage reaches a voltage threshold value or the received rotating speed of the motor reachesa speed threshold value, entering an active short-circuit mode; providing a PWM waveform with a very small duty ratio for three transistors of a high-voltage side bridge arm in a three-phase bridge type inverter circuit, and turning off the three transistors of a low-voltage side bridge arm; gradually increasing the duty ratio of the PWM waveform of the three transistors of the high-voltage sidebridge arm; when the duty ratio of the PWM waveform of the three transistors of the high-voltage side bridge arm reaches a preset value, making the three transistors of the high-voltage side bridge arm be all switched on; and if the rotating speed of the motor is lower than a rated rotating speed, making the three transistors of the high-voltage side bridge arm be all turned off, sealing waves andstopping. A variable duty ratio method is adopted, the torque impact is reduced, driving comfort performance is improved, and a vehicle power system and personal safety are protected.
Owner:菲仕绿能科技(北京)有限公司

Motor protection device and method

The embodiment of the invention provides a motor protection device and method. The device comprises a controller, a driver, a three-phase bridge rectifier circuit, a bus capacitor, three switching circuits and three first resistors; the controller is used for sending a control signal to the driver and controlling the on-off state of each branch in the three-phase bridge rectifier circuit and / or the switching circuits; the driver is used for applying voltage to the grid electrode of a first IGBT and / or the grid electrode of a second IGBT through the received control signal, providing driving current and controlling the on-off state of the first IGBT and / or the second IGBT; the three-phase bridge rectifier circuit is used for quickly discharging the bus capacitor and supporting the operation of an active short circuit; and the switching circuits are used for switching to a preset branch according to the received control signal of the controller so as to protect a motor. In the prior art, torque cannot be effectively reduced in time, as a result, a vehicle power system cannot be protected, and the driving experience is affected. Withthe motor protection device adopted, the above defects can beovercome.
Owner:WEICHAI POWER CO LTD +1

Double-stage revolving and switching method and apparatus based on independent synchronic direction-regulation

The invention relates to a double-stage revolving and switching method and a double-stage revolving and switching apparatus based on independent synchronic direction-regulation. The invention belongs to semiconductor device manufacturing equipments. The apparatus comprises a revolving stage-switching apparatus formed by a revolving stage-switching motor stator, a revolving stage-switching motor mover, and a rotary joint. Spinning apparatuses are provided on working stages. The spinning apparatuses comprise spinning motor stators, spinning motor movers, and spinning motor mover switching pieces. The revolving stage-switching apparatus is connected with the spinning motor mover switching pieces, such that the working stages can be driven to rotate around the center of a base stage. Therefore, position switching can be realized. With the apparatus provided by the invention, problems of inversed phases, twisted cables, and laser interferometer target loss of existing revolving stage-switching technologies can be solved. The apparatus is advantaged in small inertia moment, short stage-switching time with a same torque condition, high working stage operation efficiency, and high mask aligner yield.
Owner:HARBIN INST OF TECH

Disc type dragging and power generation integrated pulse power supply system

The invention discloses a disc type dragging and power generation integrated pulse power supply system, belongs to the technical field of inertia energy storage pulse power supplies, and aims to solvethe problems of long shafting, large vibration and noise, low system compactness, low energy storage density and low power density due to the fact that two motors are axially arranged at present. A conical bearing is arranged in a fixed platform, a ball bearing is arranged in a fixed device, and a rotating shaft is fixed on the conical bearing and the ball bearing; and upper air gaps are formed between the rotor and the upper stators, the number of the upper stators and the distance between the upper air gaps are respectively adjustable, and lower air gaps are formed between the rotor and thelower stators. An energy storage flywheel is fixed on the rotating shaft, and a permanent magnet is arranged on the surface of the energy storage flywheel; the compensation element is arranged belowthe permanent magnet; a rotor bandage is wound on the surface of a compensation element; the rotating shaft penetrates through a central hole; an armature winding is placed on a stator yoke, and is adischarge end; and the motor stator winding is wound on the stator yoke, and the motor stator winding is a charging end. The beneficial effects are that the charging speed is adjustable, and discharging is protected.
Owner:HARBIN INST OF TECH

Axial magnetic field permanent magnet counter-rotating dual-rotor compensation pulse generator

The invention relates to an axial-field permanent magnet compensated impulse generator with double contra-rotating rotors and belongs to the technical field of an impulse generator. The axial-field permanent magnet compensated impulse generator comprises a left rotor, a stator disc, a right rotor, two end caps and a shell. The left rotor, the stator disc and the right rotor are sequentially arranged in a hollow-square-shaped space formed by the two end caps and the shell along an axial direction. The left rotor along with one of the end caps and the right rotor along with the other end cap are in mirror symmetry on two sides of the stator disc. An air gap is formed between the left rotor and the stator disc, and another air gap is formed between the stator disc and the right rotor. The left rotor comprises a left rotor disc yoke, a left rotor permanent magnet, a left rotor compensation disc, a left rotor bandage, a left rotor shaft and a left rotor support. The stator disc comprises a stator support and a stator disc yoke. The double contra-rotating rotor compensated impulse generator is capable of solving the problem that the sizes of two motors are enlarged due to the fact that the two motors are arranged side by side and enabled to rotate reversely to counteract electromagnetic torque impact generated by the existing impulse generator during discharging.
Owner:HARBIN INST OF TECH

A brushless DC motor water pump

The invention provides a brushless DC motor water pump. It includes a driving circuit, which is composed of a main control chip, a Schottky diode, a voltage transient suppression diode, a main absorption capacitor, a discharge resistor, and a pull-up resistor; the anode terminal of the Schottky diode is connected to the positive port of the power supply, and the Schottky diode The cathode end of the diode is simultaneously connected to the cathode end of the voltage transient suppression diode, the main absorption capacitor, the discharge resistor, the pull-up resistor and the positive port of the power supply of the main control chip; the anode end of the voltage transient suppression diode and the main absorption capacitor The other end of the discharge resistor is connected to the negative terminal of the power supply; the duty cycle speed regulation command input pin of the main control chip is connected to the other end of the pull-up resistor; the motor phase winding connection pins of the main control chip are respectively connected to the three-phase The three U / V / W windings of the brushless motor are connected; the three phase windings of the brushless motor adopt a star connection method. The invention improves the efficiency of the water pump, reduces noise and vibration amplitude, and improves the stability of the water pump when used.
Owner:南京沃特电机有限公司 +1

An integrated pulse power supply system for disk drive and power generation

The invention discloses a disc type dragging and power generation integrated pulse power supply system, belongs to the technical field of inertia energy storage pulse power supplies, and aims to solvethe problems of long shafting, large vibration and noise, low system compactness, low energy storage density and low power density due to the fact that two motors are axially arranged at present. A conical bearing is arranged in a fixed platform, a ball bearing is arranged in a fixed device, and a rotating shaft is fixed on the conical bearing and the ball bearing; and upper air gaps are formed between the rotor and the upper stators, the number of the upper stators and the distance between the upper air gaps are respectively adjustable, and lower air gaps are formed between the rotor and thelower stators. An energy storage flywheel is fixed on the rotating shaft, and a permanent magnet is arranged on the surface of the energy storage flywheel; the compensation element is arranged belowthe permanent magnet; a rotor bandage is wound on the surface of a compensation element; the rotating shaft penetrates through a central hole; an armature winding is placed on a stator yoke, and is adischarge end; and the motor stator winding is wound on the stator yoke, and the motor stator winding is a charging end. The beneficial effects are that the charging speed is adjustable, and discharging is protected.
Owner:HARBIN INST OF TECH

Outer driving-inner power generation integrated power supply of pulse power generator

The invention provides an outer driving-inner power generation integrated power supply of a pulse power generator and belongs to the technical field of inertia energy storage pulse power supplies, aiming at solving the problem that an existing pulse power generator is connected with a prime motor through a shaft coupling joint, torque impact on the shaft coupling joint is easy caused, the axial length of a system is increased and the structure compactness is poor. The outer driving-inner power generation integrated power supply comprises an enclosure, a magnetism isolation ring, a hollow-coremotor and a hollow-core pulse power generator, wherein the enclosure is internally provided with the hollow-core motor; the hollow-core motor is internally provided with the hollow-core pulse power generator and is coaxial with the hollow-core pulse power generator; electromagnetic fields of hollow-core motor and the hollow-core pulse power generator are isolated through the magnetism isolation ring; the hollow-core motor is used as a driving motor for providing kinetic energy for the hollow-core pulse power generator, so that the hollow-core pulse power generator generates electric energy. The outer driving-inner power generation integrated power supply is mainly used for generating power and discharging.
Owner:HARBIN INST OF TECH

The design method and stabilizer of the stabilizer in the transmission shaft system of the doubly-fed wind turbine

The invention relates to a method for designing a stabilizer in a transmission shaft system of a double-feed wind turbine generator and the stabilizer. The method for designing the stabilizer in the transmission shaft system of the double-feed wind turbine generator comprises the steps that a complex frequency domain closed-loop transfer function E(s) between an electromagnetic torque increment delta Te and a motor rotating speed increment delta omega g is obtained, the complex frequency domain closed-loop transfer function E(s) is decomposed into E(s)=dH(s), the phase position theta H at the position of the reversing oscillation frequency omega i under the rated operating condition is obtained, the offset angle phi of the stabilizer is determined according to the phase position theta H, and the transfer function Gd(s) of the stabilizer is obtained according to the offset angle phi, and then the stabilizer in the transmission shaft system of the double-feed wind turbine generator is designed. Compared with an existing method for designing the stabilizer, the method for designing the stabilizer in the transmission shaft system of the double-feed wind turbine generator has the advantages that it is guaranteed that the stabilizer has the more effective control performance under the same gain condition, and the method has great significance in reducing torque impact of the transmission shaft system in the transient state, prolonging the mechanical life of the transmission shaft system of the wind turbine generator and improving the reliability of the transmission shaft system of the wind turbine generator.
Owner:STATE GRID CORP OF CHINA +2

Double workpiece table revolution exchanging method and device based on self rotating direction adjustment of measurement positions

A double workpiece table revolution exchanging method and a device thereof based on self rotating direction adjustment of measurement positions belong to the technical field of semiconductor manufacturing equipment. The device comprises a turning table switching device, and mechanically and structurally comprises a rotating motor stator arranged below a base table, a rotating motor rotor penetrating through the base table, a shaft sleeve embedded into the base table, and a silicon wafer table switching device. The turning table switching device realizes the position exchange of a silicon wafer table of a lithography machine, has the advantages that the structure is simple, the table switching beats are few, the rotary inertia is small, the time for switching double tables is short, and the like, is provided with a silicon wafer table self rotating mechanism in the silicon wafer table, and structurally comprises a silicon wafer table rotating shaft and a silicon wafer table spinning motor. A lifting shaft connecting device is arranged at the measuring position of the base table, and the silicon wafer table self rotating mechanism and the shaft connecting device can realize the self rotating of the silicon wafer table, thereby solving the problem that in the existing scheme of switching the table by rotating, the phase reverse of the silicon wafer table is difficult to be matched with an optical system.
Owner:HARBIN INST OF TECH

Space-based inertial energy storage pulse power supply system with impact buffering function

The invention discloses an air-based inertia energy storage pulse power supply system with an impact buffer function, belongs to the technical field of inertia energy storage pulse power supplies, andaims to solve the problems that no fixed mains supply exists in an existing air-based environment, primary energy supply exists, and a platform is impacted and damaged in the instantaneous dischargeprocess of a motor. The motor comprises an outer rotor and a stator. The outer rotor and the stator are coaxially arranged from outside to inside, and an air gap is formed therebetween; an engine is adopted as a prime motor, and spiral blades of the engine and a rotor yoke are integrally formed; a rotor bandage, a permanent magnet and a compensation cylinder are sequentially arranged on the innerside of the rotor yoke from outside to inside; the two ends of the stator shaft are fixedly connected with the front end cover and the rear end cover respectively. A stator yoke, an armature winding and a stator bandage are sequentially arranged on the outer side of the stator shaft from inside to outside. A magnetic field formed by the permanent magnet is interlinked with the armature winding through the compensation cylinder and the air gap; the armature winding is of a slotless annular multi-phase winding structure and comprises two phases of windings, and each phase of winding comprises four coils. The invention is used in the inertia energy storage pulse power supply.
Owner:HARBIN INST OF TECH

Initial speed identification and belt speed restarting control method and device for asynchronous motor

The invention belongs to the field of motor control, and particularly discloses an initial speed identification and belt speed restarting control method and device of an asynchronous motor. Comprising the following steps: taking half of the maximum rotor frequency of a motor as an initial value of first speed search, and applying a voltage vector according to the value of the rotor frequency; constructing a stator voltage frequency calculation model applied by speed search; drawing a curve graph of the change of the stator current along with the rotating speed under the stator voltage rotating at the fixed frequency and a stator current expansion Heyland circle under the stator voltage rotating at the fixed frequency, and constructing a criterion function according to the curve graph; judging the iteration direction of the stator voltage frequency calculation model according to the criterion function; and taking the new rotor frequency obtained by iteration as the stator voltage frequency to be applied in the nth search to perform search calculation and repeated iterative calculation until the search calculation meets a set end condition, outputting the rotor frequency of the motor, and assigning the rotor frequency to the speed observer. According to the invention, belt speed restarting control can be successfully realized under very small current and torque impact.
Owner:HUAZHONG UNIV OF SCI & TECH

Double-stage revolving and switching method and apparatus based on independent synchronic direction-regulation

The invention relates to a double-stage revolving and switching method and a double-stage revolving and switching apparatus based on independent synchronic direction-regulation. The invention belongs to semiconductor device manufacturing equipments. The apparatus comprises a revolving stage-switching apparatus formed by a revolving stage-switching motor stator, a revolving stage-switching motor mover, and a rotary joint. Spinning apparatuses are provided on working stages. The spinning apparatuses comprise spinning motor stators, spinning motor movers, and spinning motor mover switching pieces. The revolving stage-switching apparatus is connected with the spinning motor mover switching pieces, such that the working stages can be driven to rotate around the center of a base stage. Therefore, position switching can be realized. With the apparatus provided by the invention, problems of inversed phases, twisted cables, and laser interferometer target loss of existing revolving stage-switching technologies can be solved. The apparatus is advantaged in small inertia moment, short stage-switching time with a same torque condition, high working stage operation efficiency, and high mask aligner yield.
Owner:HARBIN INST OF TECH

Rotary exchanging method and rotary exchanging device for double workpiece platforms based on synchronous steering of turntable gear

The invention discloses a rotary exchanging method and a rotary exchanging device for double workpiece platforms based on synchronous steering of a turntable gear and belongs to semiconductor manufacturing equipment. The device comprises a rotary platform switching device consisting of a rotary motor stator, a rotary motor rotor, a rotating platform embedded in a base station and a rotary platform switching gear, wherein a liftable first shaft coupling device and a second shaft coupling device are arranged on the rotary platform; a first workpiece platform rotating shaft is arranged at the bottom of a first workpiece platform; a first workpiece platform switching device is arranged on the lateral surface of the first workpiece platform; a first workpiece platform gear is arranged at the waist part of the first workpiece platform; a second workpiece platform rotating shaft is arranged at the bottom of a second workpiece platform; a second workpiece platform switching device is arranged on the lateral surface of the second workpiece platform; and a second workpiece platform gear is arranged at the waist part of the second workpiece platform. According to the rotary exchanging method and the rotary exchanging device disclosed by the invention, in the switching process of double platforms, the orientations of the workpiece platforms are always kept unchanged and the problems that a cable in a traditional rotary platform switching scheme is not convenient to mount and an interferometer loses a target are solved; and meanwhile, the rotary exchanging method and the rotary exchanging device disclosed by the invention have the advantages that a rotational inertia in the specific implementation process is small, the required torque under the same platform switching time is small and the like.
Owner:HARBIN INST OF TECH

Two-workpiece-platform rotary exchange method and device based on cable-box anti-rotation mechanisms

The invention discloses a two-workpiece-platform rotary exchange method and a device based on cable-box anti-rotation mechanisms, belonging to the technology of semiconductor manufacturing equipment. The device comprises two workpiece platforms, a rotary switching platform and two cable-box anti-rotation devices, wherein in the rotary exchange process of the two workpiece platforms, the rotary switching platform clamps the two workpiece platforms and rotates around the center of a base platform so as to realize exchange of an exposure station and a preprocessing station; and the cable-box anti-rotation mechanisms control self rotation of the two workpiece platforms so as to guarantee the same phase of the two workpiece platforms in the platform exchange process. The device in the invention can be used for solving the problems of large impact torque and more platform exchange steps in the existing linear platform exchange scheme and phase reverse of the two workpiece platforms, cable winding and target missing of a laser interferometer and the like in the existing rotary platform exchange scheme, and adopts a smaller weight balancing system so as to be beneficial to shortening the balance time; and simultaneously the system is simplified, the cost is reduced, the platform exchange steps are reduced, the platform exchange time is shortened, and the yield of photoetching machines is effectively improved.
Owner:HARBIN INST OF TECH

Three-stage synchronous starting/generator starting control method based on current/speed sub-period closed-loop

The invention relates to a three-stage synchronous start / generator start control method based on current / rotational speed time-divided closed-loop control method. Aiming at the problem that there is a torque impact during the initial start of the current method and the dynamic start of the motor cannot be realized, the main generator armature current The initial starting of the motor is completed by closed-loop adjustment of the voltage vector, and the subsequent starting process of the motor is completed through the closed-loop adjustment of the voltage vector of the speed, so as to realize the smooth start and dynamic start function of the motor during the entire starting process. The three-stage synchronous starting / generator starting control method of the present invention has the following advantages: 1) reduces the torque impact when the motor is statically initially started, prolongs the service life of the motor shaft, and improves the stability of the motor starting process; 2) The dynamic starting function of the motor is realized, which reduces the damage to the aeroengine caused by a large amount of high-temperature aviation kerosene in the engine oil pipe that cannot be exported in time when the start fails.
Owner:NORTHWESTERN POLYTECHNICAL UNIV
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