The invention discloses an array type pressure measuring device, and the device comprises a piezoresistive sensitive
chip which is used for applying a reference pressure to the front surface of the piezoresistive sensitive
chip and applying an external
gas pressure to the back surface of the piezoresistive sensitive
chip to generate a
pressure difference; a circuit
system used for converting the generated
pressure difference into an
electric signal which is in direct proportion to pressure change, outputting the
electric signal and performing
processing and calculating; and an air
path system used for providing air pressure and acting on the two surfaces of the piezoresistive sensitive chip so as to generate the
pressure difference. According to the device, the
alloy substrate and the piezoresistive sensitive chip are directly bonded through the packaging
sealant, and the PCBs are located on the two sides of the piezoresistive sensitive chip to be electrically connected, so that the
assembly stress can be reduced, support is provided for precise control over the stress and temperature state of the piezoresistive sensitive chip, and the piezoresistive sensitive chip or related circuit
system components are convenient to disassemble and independently replace; and multiple
layers of circuit chips are stacked and integrated, and an internal integrated gas circuit
system is beneficial to
miniaturization of the whole pressure measuring device
assembly.