164results about How to "High resolution performance" patented technology

An optical device for imaging is disclosed having at least one micro lens field with at least two micro lenses and one image sensor with at least two image detector matrices. The at least two image detector matrices each include a plurality of image detectors and there is an allocation between the image detector matrices and the micro lenses, so that each micro lens together with an image detector matrix forms an optical channel. The center points of the image detector matrices are shifted laterally by different distances, with respect to centroids, projected onto the image detector matrices, of the micro lens apertures of the associated optical channels, so that the optical channels have different partially overlapping detection areas and so that an overlapping area of the detection areas of two channels is imaged onto the image detector matrices offset with respect to an image detector raster of the image detector matrices. Further, an image processing device and a method for optical imaging are described.

An FMCW radar sensor having a plurality of antenna elements and a supply circuit for supplying transmission signals having ramp-shaped modulated frequencies to the antenna elements, including a switchover device for switching over the supply circuit between a near-field mode, in which the transmission signals supplied to the individual antenna elements have a certain frequency offset, and a far-field mode, in which the frequencies of the transmission signals are identical.

An optical device for imaging is disclosed having at least one micro lens field with at least two micro lenses and one image sensor with at least two image detector matrices. The at least two image detector matrices each include a plurality of image detectors and there is an allocation between the image detector matrices and the micro lenses, so that each micro lens together with an image detector matrix forms an optical channel. The center points of the image detector matrices are shifted laterally by different distances, with respect to centroids, projected onto the image detector matrices, of the micro lens apertures of the associated optical channels, so that the optical channels have different partially overlapping detection areas and so that an overlapping area of the detection areas of two channels is imaged onto the image detector matrices offset with respect to an image detector raster of the image detector matrices. Further, an image processing device and a method for optical imaging are described.

A pattern is formed by coating a chemically amplified positive resist composition comprising a resin comprising acid labile group-containing recurring units and a photoacid generator onto a substrate, drying to form a resist film, exposing the resist film to high-energy radiation through a phase shift mask including a lattice-like first shifter and a second shifter arrayed on the first shifter and consisting of lines which are thicker than the line width of the first shifter, PEB, developing to form a positive pattern, illuminating or heating the positive pattern to eliminate acid labile groups for increasing alkaline solubility and to induce crosslinking for imparting solvent resistance, coating a reversal film, and dissolving away the positive pattern in an alkaline wet etchant to form a pattern by way of positive / negative reversal.

A printing process for the transfer of printing substance (2) from an ink carrier (1) to an imprinting material (6), in which, with the help of an energy-emitting apparatus, which, during a process period, emits energy in the form of electromagnetic waves (3), and the printing substance (2) undergoes a change in volume and / or position, wherein, with the help of absorption bodies (4), energy is transferred from the electromagnetic waves (3) into the printing substance (2). The invention also includes an apparatus for practicing the process of the invention and a printing substance containing absorption bodies.

A positive resist composition comprises a polymer comprising repeat units having formula (1) or (2).Hereindenotes an aromatic hydrocarbon group, R1 is H, methyl or trifluoromethyl, R2 is H, C1-C12 alkyl or aromatic hydrocarbon group, R3 is C1-C12 alkyl, or R2 and R3 may bond together to form a ring, and a is 1 or 2. When used in the ArF lithography, the resist composition exhibits high resolution. When used in the EB image writing for mask processing, the resist composition exhibits high resolution and sensitivity sufficient to comply with high-accelerating-voltage EB irradiation, and high etch resistance.

A mass spectrometry system for continuous control of environment based on the use of an aerosol TOF MS that provides operation with a high duty cycle of up to 98% and can be realized in the form of a mobile unit having a data acquisition and analysis system with three levels of data correlation on the basis of constant interaction between various actuating mechanisms of the system via a central processing unit. The TOF MS is based on the use of quadrupole lenses with angular gradient of the electrostatic field. On the entrance side, the TOF MS contains an ion-optic system that is used for focusing, aligning, and time-modulating the ionized flow of particles and a deflector modulator that provides alternating deflections of the flow of particles between two positions for aligning the flow with two inlet openings into the TOF MS. As a result, two independently analyzed discrete flows of particles pass through the ion mass separation chamber of the TOF MS without interference with each other. The charged particles fly in direct and return paths along helical trajectories which extend the length of the flight time. The time of the collision and the magnitude of the collision pulse will contain information about the M / Z ratio for the particles being registered. Multiplication of a single flow of particles into a plurality of independent and spatially separated flows propagating in one chamber increases efficiency of the TOF MS and makes it possible to use it in continuous and high-duty applications with the duty cycle as high as 98%, which is unattainable with any known device of this class. The system can be mounted either on an underwater and ground vehicle, or on an aircraft.

A resin that includes a repeating unit shown by the following formula (10) has an excellent performance as a radiation sensitive acid generator, and exhibits only a small adverse effect on the environment and a human body.wherein R1 represents a hydrogen atom or the like, M+ represents a specific cation, and n is an integer from 1 to 5.

There is provided a lens module, including: a first lens having positive refractive power, an object-sided surface thereof being convex; a second lens having negative refractive power, an image-sided surface thereof being concave; a third lens having positive refractive power; a fourth lens having negative refractive power, an image-sided surface thereof being convex; and a fifth lens having negative refractive power, an image-sided surface thereof being concave, wherein the fourth lens satisfies Conditional Expression 1,f4f<-3.0[ConditionalExpression1]where f is an overall focal distance of an optical system and f4 is a focal distance of the fourth lens.

An eddy-current probe according to the present invention comprises: a substrate having a first surface facing to a subject to be tested and a second surface opposite to said first surface; an exciting coil formed on the second surface, having a pair of current lines in parallel with each other through which exciting currents flow in opposite directions to each other during testing, for generating an alternate magnetic field applied to the subject by the exciting currents; and at least one eddy-current sensor positioned on a central axis between the pair of current lines on the second surface of the substrate, for detecting a magnetic field generated newly from the subject by an eddy-current induced by the alternate magnetic field. The substrate has a non-planar form having at least one convex-surface portion on the first surface, and the at least one eddy-current sensor is formed on at least one concave-surface portion formed on the second surface, which is corresponding to the at least one convex-surface portion.

An imaging lens consists of negative first lens having a concave image-side surface, positive second lens, negative third lens, positive fourth lens, positive fifth lens having a convex image-side surface, and negative sixth lens, which are in this order from an object side. In the imaging lens, all of the lenses constituting the lens system are single lenses, which are not cemented lenses, and a stop is arranged closer to the object side than an image-side surface of the fourth lens is arranged. When a refractive index of a material of the third lens for d-line is Nd3, the following formula (1-1) is satisfied:Nd3<1.65  (1-1).

An FMCW radar sensor having a plurality of antenna elements and a supply circuit for supplying transmission signals having ramp-shaped modulated frequencies to the antenna elements, including a switchover device for switching over the supply circuit between a near-field mode, in which the transmission signals supplied to the individual antenna elements have a certain frequency offset, and a far-field mode, in which the frequencies of the transmission signals are identical.

The invention discloses a roll angle measurement device and a roll angle measurement method based on array-type multiple reflections, wherein the device comprises a dual-frequency laser, a 1 / 2 wave plate and two sets of cube-corner prism arrays; a beam-splitting prism is arranged at the back of an optical axis of the dual-frequency laser, and a first analyzer and a first photoelectric receiver are arranged on a reflecting optical axis of the beam-splitting prism; a 1 / 4 wave plate is arranged on a transmitting optical axis of the beam-splitting prism; the 1 / 2 wave plate is located between the two sets of cube-corner prism arrays; a right-angled reflecting prism is arranged on an emitting optical axis of the two sets of cube-corner prism arrays, and a second analyzer and a second photoelectric receiver are arranged on a reflecting optical axis of the right-angled reflecting prism; and the output end of the first photoelectric receiver and the output end of the second photoelectric receiver are connected with a phase meter. According to the device and the method, detection components are arranged in the two sets of cube-corner prism arrays, thus effectively applying an array-type multiple reflection method used for displacement measurement to roll angle measurement. The problem of the difficulty of measuring a roll angle which is vertical to the direction of a laser beam in the conventional laser interferometry is overcome, and the advantage of relatively high roll angle measurement resolution compared with the prior art is obtained.

A radar sensor having multiple antenna elements for transmitting and receiving radar signals, an associated transmitting and receiving element and an evaluation device for determining the azimuth angle of located objects on the basis of a relationship between the signals received from different antenna elements, wherein the transmitting and receiving element is designed to supply to the antenna elements transmission signals in parallel, the frequencies of which are offset with respect to one another, and the evaluation device is designed to distinguish between signals that were transmitted by different antenna elements on the basis of the frequency offset.

Proposed is a light sensor (1), comprising at least one wavelength selective photo-detector (10), a lens (20) and an aperture (30).The wavelength selective photo-detector allows detecting light within a predefined wavelength range falling on the sensor. The lens project light on the photo-detector and the aperture defines a field of view of the light sensor. The photo-detector (10), the lens (20), and the aperture (30) are arranged in a telecentric configuration. Advantageously, this allows light to impinge on the wavelength selective photo-detector within a predefined range of angles irrespective of the direction of the light incident on the aperture, thus removing the angle dependent response of the wavelength selective photo-detector.

An inspection apparatus comprising, a light source configured to illuminate a sample, a half-wavelength plate configured to transmit light transmitted through or reflected from the sample, a polarization beamsplitter, a first and second sensor configured to receive the light as a first and second optical image respectively transmitted through the beamsplitter, an image processor configured to obtain a gradation value of each pixel of the first sensor, a defect detector configured to detect a defect of the first optical image, using the gradation value, and a comparator configured to compare the second optical image to a reference image based on design data, and to determine that the second optical image is defective when at least one difference of position and shape between the optical image and the reference image exceeds a predetermined threshold, and an angle adjusting unit configured to adjust an angle of the half-wavelength plate.

An eddy-current probe according to the present invention comprises: a substrate having a first surface facing to a subject to be tested and a second surface opposite to said first surface; an exciting coil formed on the second surface, having a pair of current lines in parallel with each other through which exciting currents flow in opposite directions to each other during testing, for generating an alternate magnetic field applied to the subject by the exciting currents; and at least one eddy-current sensor positioned on a central axis between the pair of current lines on the second surface of the substrate, for detecting a magnetic field generated newly from the subject by an eddy-current induced by the alternate magnetic field. The substrate has a non-planar form having at least one convex-surface portion on the first surface, and the at least one eddy-current sensor is formed on at least one concave-surface portion formed on the second surface, which is corresponding to the at least one convex-surface portion.

The invention discloses a distortionless high-resolution large-viewing angle unmanned aerial vehicle lens optical system, which comprises a lens front group and a lens rear group arranged sequentially along a light incidence direction. A diaphragm is arranged between the lens front group and the lens rear group; the lens front group comprises a first lens, a second lens, a third lens and a fourth lens arranged sequentially along the light incidence direction, and the first lens, the second lens, the third lens and the fourth lens are respectively a meniscus negative lens, a meniscus negative lens, a meniscus negative lens, and a biconvex positive lens; and the lens rear group comprises a fifth lens, a sixth lens and a seventh lens arranged sequentially along the light incidence direction, and the fifth lens, the sixth lens and the seventh lens are respectively a biconvex positive lens, a meniscus negative lens and a biconvex positive lens. The distortionless high-resolution large-viewing angle unmanned aerial vehicle lens optical system has the advantages that the visual angle is 100 DEG, the distortion is less than 3%, and the resolution can reach 12 million-pixel.

A pattern is formed by coating a chemically amplified positive resist composition comprising a resin comprising acid labile group-containing recurring units and a photoacid generator onto a substrate, drying to form a resist film, exposing the resist film to high-energy radiation through a phase shift mask having a lattice-like array of shifters, PEB, developing to form a positive pattern, illuminating or heating the positive pattern to eliminate acid labile groups for increasing alkaline solubility and to induce crosslinking for imparting solvent resistance, coating a reversal film, and dissolving away the positive pattern in an alkaline wet etchant to form a pattern by way of positive / negative reversal.

It is an object of the present invention to provide a production process capable of precisely producing a plated shaped article of a large thickness such as a bump or a wiring, a positive radiation-sensitive resin composition which is preferably used for the process and has excellent sensitivity and resolution, and a transfer film using the composition. The above object is achieved by a positive radiation-sensitive resin composition comprising (A) a polymer containing structural units represented by the following formula (1) and / or the following formula (2) and an acid-dissociable functional group (b), (B) a component which generates an acid by irradiation with radiation and (C) and organic solvent, and is achieved by producing a positive radiation-sensitive resin film using the composition.

The invention discloses a coprime MIMO radar arrival direction estimation method based on multi-sample snapshots and set array signal discrete Fourier transform. The method mainly solves the problem that the calculation complexity of an existing method is high. The method comprises the steps that a homogeneous MIMO radar structure is established; reflected signals are received through a radar receiving sub-array, and modeling is carried out on radar output signals; the coprimey MIMO radar multi-sample snapshots and set array receiving signals are constructed; zero padding is carried out on themulti-sample snapshots and the set array receiving signals; the multi-sample snapshots and the set array receiving signals obtained after zero padding are subjected to sidelobe suppression; the multi-sample snapshots and the set array receiving signals obtained after filtering are subjected to discrete Fourier transform to construct a spatial spectrum; arrival direction estimation is conducted according to the obtained spatial spectrum. A larger array aperture is obtained under the condition that the number of physical array elements is certain, and the calculation complexity of arrival direction estimation is reduced.

The purpose of the present invention is to provide a photosensitive film with good resolution after development, excellent dispersion stability to the developer, no aggregates, excellent flexibility of the cured film, hole capping and good etchant resistance. A photosensitive resin composition, a photosensitive resin laminate having a photosensitive resin layer composed of the composition, a method of forming a resist pattern using the laminate, and a method of producing a conductive pattern. The present invention solves the above-mentioned problems by providing the following photosensitive resin composition, that is, a photosensitive resin composition characterized in that it contains (a) binder resin: 10 to 90% by mass, and its carboxyl group content is The acid equivalent is 100 to 600, contains benzyl (meth)acrylate as a copolymerization component, and has a weight average molecular weight of 5,000 to 500,000, (b) photopolymerizable unsaturated compound: 5 to 70% by mass, (c) as photopolymerizable unsaturated compound: The specific compound of the polymerization initiator is 0.1 to 20% by mass.

The invention discloses a vehicle-mounted camera lens, which comprises, in order from the object side to the image side, a first lens having a negative focal power, a convex object side surface and aconcave image side surface; a second lens having a negative focal power, a concave object side surface and a convex object side surface; a third lens having a positive focal power and double convex surfaces; a diaphragm; a fourth lens having a positive focal power and double convex surfaces; a fifth lens having a negative focal power and a concave object side surface, and forming a cemented lens with the fourth lens; a sixth lens having a positive focal power and a convex object side surface; and a filter. The second lens, the third lens, the fourth lens, and the fifth lenses are all glass spherical lenses, and the first lens and the sixth lens are glass aspherical lenses. The vehicle-mounted camera lens significantly increases the distortion of the lens in a small angle of view to meet the special algorithm requirements of the vehicle system; and the lens size and length of the lens are effectively controlled while improving the resolution of the entire lens.

A pipelined delta-sigma modulator (PDSM) analog to digital converter (ADC) architecture is disclosed where each stage of the pipelined ADC includes a delta sigma modulator with a digital low pass filter and a corresponding analog low pass filter that precisely matches the digital low pass filter. An error signal is generated at each stage based on the difference of the low pass filtered analog input and the low pass filtered digital output of the delta sigma modulator (after converting to an analog signal). The digital outputs of each stage are passed through the appropriate low pass filter stages so all digital signals have been subjected to the same filtering prior to combining in a digital error correction circuit. The present invention also uses a compensation filter to correct any errors in the pass band caused by the low pass filtering and to help reject unwanted noise outside the pass band.

A mass spectrometry system for continuous control of environment based on the use of an aerosol TOF MS that provides operation with a high duty cycle of up to 98% and can be realized in the form of a mobile unit having a data acquisition and analysis system with three levels of data correlation on the basis of constant interaction between various actuating mechanisms of the system via a central processing unit. The TOF MS is based on the use of quadrupole lenses with angular gradient of the electrostatic field. As a result, two independently analyzed discrete flows of particles pass through the ion mass separation chamber of the TOF MS without interference with each other. The system can be mounted either on an underwater and ground vehicle, or on an aircraft.

A positive resist composition comprises (A) a resin component which becomes soluble in an alkaline developer under the action of an acid, and (B) an acid generator which is a specific sulfonium salt compound. The resin (A) is a polymer comprising tertiary alkyl protective group units having a hydrophobic tetracyclo[4.4.0.12,5.17,10]dodecane structure, di- or trihydroxyadamantyl units, and monocyclic lactone units.

A pipelined delta-sigma modulator (PDSM) analog to digital converter (ADC) architecture is disclosed where each stage of the pipelined ADC includes a delta sigma modulator with a digital low pass filter and a corresponding analog low pass filter that precisely matches the digital low pass filter. An error signal is generated at each stage based on the difference of the low pass filtered analog input and the low pass filtered digital output of the delta sigma modulator (after converting to an analog signal). The digital outputs of each stage are passed through the appropriate low pass filter stages so all digital signals have been subjected to the same filtering prior to combining in a digital error correction circuit. The present invention also uses a compensation filter to correct any errors in the pass band caused by the low pass filtering and to help reject unwanted noise outside the pass band.