Roll angle measurement device and method based on array-type multiple reflections

Abstract

The invention discloses a roll angle measurement device and a roll angle measurement method based on array-type multiple reflections, wherein the device comprises a dual-frequency laser, a 1 / 2 wave plate and two sets of cube-corner prism arrays; a beam-splitting prism is arranged at the back of an optical axis of the dual-frequency laser, and a first analyzer and a first photoelectric receiver are arranged on a reflecting optical axis of the beam-splitting prism; a 1 / 4 wave plate is arranged on a transmitting optical axis of the beam-splitting prism; the 1 / 2 wave plate is located between the two sets of cube-corner prism arrays; a right-angled reflecting prism is arranged on an emitting optical axis of the two sets of cube-corner prism arrays, and a second analyzer and a second photoelectric receiver are arranged on a reflecting optical axis of the right-angled reflecting prism; and the output end of the first photoelectric receiver and the output end of the second photoelectric receiver are connected with a phase meter. According to the device and the method, detection components are arranged in the two sets of cube-corner prism arrays, thus effectively applying an array-type multiple reflection method used for displacement measurement to roll angle measurement. The problem of the difficulty of measuring a roll angle which is vertical to the direction of a laser beam in the conventional laser interferometry is overcome, and the advantage of relatively high roll angle measurement resolution compared with the prior art is obtained.

Description

technical field [0001] The invention belongs to the field of photoelectric measurement of angles, and in particular relates to a roll angle measurement method and a device thereof based on an array multiple reflection polarized laser phase. Background technique [0002] Roll angle is an important index to measure the performance of high-end precision equipment such as precision guide rail kinematics and CNC machine tools, and it is also an important part of its error. Its measurement technology level directly affects the performance of its products, which is the basis for precision machining, manufacturing and application. [0003] All mechanical rail kinematics have three rotational degrees of freedom (pitch, yaw, and roll errors). Pitch angle and yaw angle can be measured with a dual-frequency interferometer to achieve high precision, but since the roll plane is perpendicular to the beam direction of the laser interferometer, it is very difficult to measure the roll angle...

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But this method and device are difficult to improve its resolution

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