The invention discloses a piezoelectric driving mutual shielding
electrode micro
electric field sensor; the micro
electric field sensor mainly comprises a substrate, a fixed
electrode, a movable
electrode, a supporting column, an
elastic beam, an insulating layer and a driving structure, wherein the movable electrode and the fixed electrode forming the sensor sensitive structure are located on thesame plane when the movable electrode and the fixed electrode are in a static state, and the movable electrode and the fixed electrode are both sensing electrodes and are mutually shielding electrodes; the driving structure composed of the driving electrode and the piezoelectric layer drives the movable electrode to move, so that the relative position of the fixed electrode and the movable electrode is changed; and the driving structure is located outside the sensing electrodes, and the driving signals have low interference to signals on the sensing electrodes. The
electric field sensor can realize low-
voltage driving, is beneficial for reducing
coupling interference and improving the
signal-to-
noise ratio of the sensor. Through the arrangement of the mutual shielding electrodes, the sensing efficiency of the sensitive structure can be improved, and the resolution and sensitivity of the sensors can be improved. The
electric field sensor further has the characteristics of being miniaturized, simple in structure, and convenient to integrate,
batch production and the like.