61results about "Tube magnetic delection" patented technology

This invention discloses an ion implantation apparatus with multiple operating modes. It has an ion source and an ion extraction means for extracting a ribbon-shaped ion beam therefrom. The ion implantation apparatus includes a magnetic analyzer for selecting ions with specific mass-to-charge ratio to pass through a mass slit to project onto a substrate. Multipole lenses are provided to control beam uniformity and collimation. The invention further discloses a two-path beamline in which a second path incorporates a deceleration system incorporating energy filtering. The invention discloses methods of ion implantation in which the mode of implantation may be switched from one-dimensional scanning of the target to two-dimensional scanning, and from a simple path to an s-shaped path with deceleration.

An ion implantation apparatus, system, and method for controlling an ion beam, wherein a mass analyzer generally positioned between an ion source and an end station is configured to selectively control a path of a desired ion beam. The mass analyzer comprises one or more of an entrance pole mechanism positionable proximate to an entrance of the mass analyzer and an exit pole mechanism positionable proximate to an exit of the mass analyzer, wherein the position of the entrance pole mechanism and exit pole mechanism generally determines the path and focal point of the desired ion beam. A controller is configured to selectively position one or more of the entrance pole mechanism and exit pole mechanism, therein generally controlling the path of the desired ion beam at the exit of the mass analyzer, wherein the control may be based on one or more detected characteristics of the desired ion beam.

This invention discloses an ion implantation apparatus with multiple operating modes. It has an ion source and an ion extraction means for extracting a ribbon-shaped ion beam therefrom. The ion implantation apparatus includes a magnetic analyzer for selecting ions with specific mass-to-charge ratio to pass through a mass slit to project onto a substrate. Multipole lenses are provided to control beam uniformity and collimation. The invention further discloses a two-path beamline in which a second path incorporates a deceleration system incorporating energy filtering. The invention discloses methods of ion implantation in which the mode of implantation may be switched from one-dimensional scanning of the target to two-dimensional scanning, and from a simple path to an s-shaped path with deceleration.

A mass spectrometer suitable to measure both positive and negative particles, such as ions for example in a vacuum chamber. This spectrometer is provided with a turnable permanent magnet segment, which provides the gap of a yoke with adequate magnetic flux having the appropriate direction to separate the positive or the negative particles. Changing the polarity adjusts the flight path of the ions. Thus, negatively charged ions and positively charged ions will follow similar flight paths under opposite polarities, permitting the use of a single array of detectors. One or more coils may be used in place of or in addition to the turnable permanent magnet segment in order to provide the appropriate magnetic flux to the gap, and / or facilitate the turning process of the turnable magnet segment. The turnable magnet and / or the coils may be inside or outside the vacuum chamber. The detector may comprise at least one detector area, two charge mode amplifiers coupled to the detector area, a first CCD shift register coupled to a first one of the charge mode amplifiers and a second CCD shift register coupled to a second one of the charge mode amplifiers.

The present invention provides a windowframe magnet having an aligned array of paired bedstead coils in mirror symmetry can bend a high aspect ratio ribbon ion beam through angle of not less than about 45 degrees and not more than about 110 degrees, and can focus it through a resolving slot for mass analysis. The long transverse axis of the beam, which can exceed 50% of the bend radius, is aligned with the generated magnetic field. The array of paired bedstead coils provide tight control of the fringing fields, present intrinsically good field uniformity, and enable a manufacture of much lighter construction than other magnet styles conventionally in use in the ion implantation industry.Within the system of the present invention, the ribbon beam is refocused with low aberration to achieve high resolving power, which is of significant value in the ion implantation industry. System size is further reduced by using a small ion source and a quadrupole lens to collimate the beam after expansion and analysis. There is no fundamental limit to the aspect ratio of the beam that can be analyzed.

A mass spectrometer suitable to measure both positive and negative particles, such as ions for example in a vacuum chamber. This spectrometer is provided with a turnable permanent magnet segment, which provides the gap of a yoke with adequate magnetic flux having the appropriate direction to separate the positive or the negative particles. Changing the polarity adjusts the flight path of the ions. Thus, negatively charged ions and positively charged ions will follow similar flight paths under opposite polarities, permitting the use of a single array of detectors. One or more coils may be used in place of or in addition to the turnable permanent magnet segment in order to provide the appropriate magnetic flux to the gap, and / or facilitate the turning process of the turnable magnet segment. The turnable magnet and / or the coils may be inside or outside the vacuum chamber. The detector may comprise at least one detector area, two charge mode amplifiers coupled to the detector area, a first CCD shift register coupled to a first one of the charge mode amplifiers and a second CCD shift register coupled to a second one of the charge mode amplifiers.

The invention provides an atmospheric pressure magnetic enhancement and magnetic confinement DC glow discharge ion source whose ionization efficiency, ion transport efficiency, and work stability are increased on a larger scale. The atmospheric pressure magnetic enhancement and magnetic confinement DC glow discharge ion source is provided at the periphery of a cavity in the axial direction, closer to an air outlet and in deviation from a direct current discharge electrode with a pair of rectangular permanent magnets which are separated by the cavity, arranged in parallel and opposite to each other. The magnetic field B1 covers a direct current discharge area; the direction of the magnetic field B1 is perpendicular to the current J across the direct current discharge area and the J X B1 is along the air flowing direction; along the axial direction of the cavity, two annular permanent magnets of the same specifications are coaxially and sequentially arranged so that the two annular permanent magnets could form a uniform-magnetic field B2 which covers the direct current discharge area and the plasma jet area of the air outlet downstream; the direction of the uniform-magnetic field B2 is consistent with the axial directions of the cavity and the annular permanent magnets.

The invention belongs to the technical field of an isotope electromagnetic separator, and specifically relates to an ion source used for the isotope electromagnetic separator. The ion source is placed in a magnetic field, and the direction of the magnetic line of force of the magnetic field is perpendicular to the ion beam leading direction in the ion source; the ion source comprises an arc discharging chamber, a crucible connected with the back part of the arc discharging chamber, a crucible heating furnace cylinder arranged on the periphery of the crucible, a negative electrode and filaments arranged on the top of the arc discharging chamber, and a leading electrode arranged on the front part of the arc discharging chamber; and the leading electrode is provided with leading seams capable of leading ion beams, wherein the arc discharging chamber and the crucible are in direct sealing connection. The conventional ion source used for the isotope electromagnetic separator is relatively poor in air tightness, which causes increasing of dark current in the ion source, influences vapor density of a working substance, and wastes expensive ion source material; and the ion source provided by the invention is high in air tightness, so that dark current and an ignition phenomenon are reduced, the raw material utilization rate of the ion source and the abundance of separated isotopes are improved, and the working time of the electromagnetic separator is prolonged.

Devices and methods for the acquisition of mass spectra with very high mass resolution in ion cyclotron resonance mass spectrometers include cylindrical ICR measuring cells with special electrode geometries to generate harmonic trapping potentials for orbiting ions. The sheath of the cylindrical cell is divided by longitudinal gaps into a multitude of sheath electrodes, which either have to carry layers with resistance profiles able to generate parabolic voltage profiles along the sheath electrodes, or which form sheath electrodes of varying width by parabolic gaps. Orbiting ions of a given mass m / z oscillate harmonically in an axial direction with the same frequency, independent of the radius of their orbit and their oscillation amplitude. Ideally, the cylinders are closed by endcaps with rotationally hyperbolic form, divided into partial electrodes. The ions are excited by dipolar excitation fields. The orbiting ion clouds are kept together for much longer periods than was possible hitherto.

An ion implantation apparatus, system, and method for controlling an ion beam, wherein a mass analyzer generally positioned between an ion source and an end station is configured to selectively control a path of a desired ion beam. The mass analyzer comprises one or more of an entrance pole mechanism positionable proximate to an entrance of the mass analyzer and an exit pole mechanism positionable proximate to an exit of the mass analyzer, wherein the position of the entrance pole mechanism and exit pole mechanism generally determines the path and focal point of the desired ion beam. A controller is configured to selectively position one or more of the entrance pole mechanism and exit pole mechanism, therein generally controlling the path of the desired ion beam at the exit of the mass analyzer, wherein the control may be based on one or more detected characteristics of the desired ion beam.

The invention relates to devices and methods for the acquisition of mass spectra with very high mass resolution in ion cyclotron resonance mass spectrometers and methods to produce the devices. The invention presents cylindrical ICR measuring cells with special electrode geometries to generate harmonic trapping potentials for orbiting ions up to the walls of the cell. Only a single DC trapping voltage has to be applied to create the harmonic trapping potential distribution. The sheath of the cylindrical cell is divided by longitudinal gaps into a multitude of sheath electrodes, which either have to carry layers with resistance profiles able to generate parabolic voltage profiles along the sheath electrodes, or which form sheath electrodes of varying width by parabolic gaps, able to create complicated potential distributions which are harmonic on average for orbiting ions. Orbiting ions of a given mass m / z can oscillate harmonically in axial direction with exactly the same oscillation frequency, independent of the radius of their orbit and of their axial oscillation amplitude. Ideally, the cylinders are closed by endcaps with rotationally hyperbolic form, divided into partial electrodes like in infinity cells. The ions can then be excited to their cyclotron motions by dipolar excitation fields also uniformly filling the ICR cell up to the endcaps. The ion clouds orbiting on their cyclotron trajectory are kept together for much longer periods than was possible hitherto, even if they orbit near the sheath electrodes. The image currents thus give rise to minute-long transients, from which mass spectra with ultrahigh mass resolution can be obtained.

There is provided an analyzer including: an ionizer unit that ionizes molecules to be analyzed; a filter unit that selectively passes ions generated by the ionizer unit; and a detection unit that detects ions that have passed the filter unit. The detection unit includes a plurality of detection elements disposed in a matrix, and the analyzer further includes a first reconfiguration unit that switches between detection patterns including detection elements to be enabled for detection out of the plurality of detection elements. The ionizer unit includes a plurality of ion sources, and the analyzer further includes a driving control unit that switches the connections of the plurality of ion sources based on changes in characteristics of the ion sources.

The present invention discloses a conical cylinder shaped magnet based proton magnetic spectrometer. The proton magnetic spectrometer comprises a collimating slit, a conical cylinder shaped magnet device and a CR39 medium, wherein the collimating slit is used for introducing protons and filtering protons with relatively large horizontal divergence angles; the conical cylinder shaped magnet device comprises an outer shell, an inner shell, and permanent magnets which are fixed between the outer shell and the inner shell and are distributed radially; a space surrounded by all the permanent magnets forms a magnetic field loop capable of enabling the motion direction of filtered protons to be deflected; and the CR39 medium is used for recording proton signals after deflection so as to obtain proton energy spectrum information. The conical cylinder shaped magnet based proton magnetic spectrometer disclosed by the present invention is reasonable in structure, ingenious in design and small in volume, well solves the technical defects of large volume, low magnetic field strength and nonuniform magnetic field distribution of an existing proton magnetic spectrometer, and realizes effective acquisition of proton signals, therefore, the conical cylinder shaped magnet based proton magnetic spectrometer disclosed by the present invention is suitable for popularization and application.

The invention relates to a mass spectrometer having an electron impact ionization source which comprises an ejector for forming a beam of sample gas being driven in a first direction through an interaction region; a magnet assembly configured and arranged such that its magnetic field lines pass through the interaction region substantially parallel to the first direction; an electron emitter assembly for directing electrons toward the interaction region in a second direction being aligned substantially opposite to the first direction, wherein the electrons propagate along and are confined about the magnetic field lines until reaching the interaction region and forming sample gas ions therein; and a mass analyzer located downstream from the interaction region to which the sample gas ions are guided for mass analysis.

There is provided an analyzer including: an ionizer unit that ionizes molecules to be analyzed; a filter unit that selectively passes ions generated by the ionizer unit; and a detection unit that detects ions that have passed the filter unit. The detection unit includes a plurality of detection elements disposed in a matrix, and the analyzer further includes a first reconfiguration unit that switches between detection patterns including detection elements to be enabled for detection out of the plurality of detection elements. The ionizer unit includes a plurality of ion sources, and the analyzer further includes a driving control unit that switches the connections of the plurality of ion sources based on changes in characteristics of the ion sources.

A mass analyzer includes a main substrate, an upper substrate adhered to the main substrate, and a lower substrate. A mass analysis room (cavity) is formed in the main substrate and penetrates from an upper surface of the first main substrate to a lower surface of the first main substrate. A vertical direction (Z direction) to the main substrate by the upper substrate, both sides of the lower substrate, a travelling direction (X direction) of charged particles and a right angle to the Z direction by the main substrate, and both sides of a right-angled direction (Y to Z direction) and the X direction by a side surface of the main substrate are surrounded. A central hole is open in the side plate of the main substrate that the charged particles enter. The charged particles enter the mass analysis room through the central hole formed in the first main substrate.

The present invention provides a mass analyzing magnet which can bend a very wide charged particle ribbon beams through angles between 90 to 200 degrees. The shorter dimension of the ribbon beam is aligned with the magnetic field. The magnet can focus the longer dimension of the ribbon beam through a resolving slot inside the magnet for mass or momentum analysis. The magnet pole is shaped to increase the mass resolving power and to provide the focusing force in the direction of the shorter dimension of the ribbon beam. This magnet can achieve high mass resolving power with very small system aberrations for very wide ribbon beam. This feature is of significant value, for example, in the ion implantation industry. The ribbon beam width can be 300 mm, 450 mm and even 1000 mm. Integrated with the present invention, the ion implanter systems can be built to provide mass analyzed ribbon beams for various applications. The system will have much lower cost and much better ribbon beam quality than the ion implanters which are using conventional mass analyzing magnet.

An ExB Wien mass filter provides an independently-adjustable electric field combined with the dipole electric field required for mass separation. The independently adjustable electric field can be used provide a larger optical aperture, to correct astigmatism and to deflect the beam in direction parallel and / or perpendicular to the magnetic field.

Systems and methods are provided for time-of-flight analysis of a continuous beam of ions by a detector array. A sample is ionized using an ion source to produce a continuous beam of ions. An electric field is applied to the continuous beam of ions using an accelerator to produce an accelerated beam of ions. A rotating magnetic and / or electric field is applied to the accelerated beam to separate ions with different mass-to-charge ratios over an area of a two-dimensional detector using a deflector located between the accelerator and the two-dimensional detector. An arrival time and a two-dimensional arrival position of each ion of the accelerated beam are recorded using the two-dimensional detector. Alternatively, an electric field that is periodic with time is applied in order to sweep the accelerated beam over a periodically repeating path on the two-dimensional rectangular detector.

An electron optical component used to improve the spatial resolution in magnetic projection electron lenses or other electron optical devices by filtering the cyclotron orbit radii of electron trajectories in the lens magnetic field.

An ion implanter and method for adjusting the shape of an ion beam are disclosed. After an ion beam is outputted from an analyzer magnet unit, at least one set of bar magnets is used to adjust the shape of the ion beam when the ion beam passes through a space enclosed by the bar magnets. The set of bar magnets can apply a multi-stage magnetic field on the ion beam. Hence, different portions of the ion beam will have different deformations or alterations, because the multi-stage magnetic field will apply a non-uniform force to change the trajectory of ions. Moreover, each bar magnet of the set is powered by one and only one power source, such that the set of bar magnets essentially only can adjust the magnitude of the multi-stage magnetic field. Particular structures and techniques for achieving the multi-stage magnetic field are not limited.

The present invention is an apparatus and multi-unit assembly which is able to achieve two different and highly desirable functions: A focusing of a charged particle beam; and a mass separation of desired ion species from unwanted ion species in traveling ion beams. The apparatus is a simply organized and easily manufactured article; is relatively light-weight and less expensive to make; and is easier to install, align, and operate than conventionally available devices.

The invention relates to a mass spectrometer having an electron impact ionization source which comprises an ejector for forming a beam of sample gas being driven in a first direction through an interaction region; a magnet assembly configured and arranged such that its magnetic field lines pass through the interaction region substantially parallel to the first direction; an electron emitter assembly for directing electrons toward the interaction region in a second direction being aligned substantially opposite to the first direction, wherein the electrons propagate along and are confined about the magnetic field lines until reaching the interaction region and forming sample gas ions therein; and a mass analyzer located downstream from the interaction region to which the sample gas ions are guided for mass analysis.

The invention relates to the technical field of mass analysis of analytical instruments, in particular to a mass spectrum analyzer and an analyzing method thereof. The mass spectrum analyzer comprises a magnetic field generating device, a vacuum system, an ion source, an ion accelerator and a series of electrodes. The magnetic field generating device is used for forming a high-strength magnetic field in annular space, an annular axle line exists in the annular space, and magnetic lines of the high-strength magnetic field and the axle line are orthogonal; the vacuum system is used for forming ultrahigh vacuum in the annular space; the ion source is used for generating analyzed ions; the ion accelerator accelerates the analyzed ions which enter an ion annular motion track basically along the axle line and sustain circumnutation for a while; at least parts of the electrodes arranged around the annular axle line are used for detecting image charges induced on the ions in a circumnutation process. According to the mass spectrum analyzer and the analyzing method thereof, the image current signal frequency is improved effectively, the limit electrodes can prevent ions from being diffused and escaping, the magnetic field distribution is even, the mass spectrum quality is improved effectively, and the market prospect is good.

The present invention provides an apparatus and method for enhancing the signal intensity of a radio frequency glow discharge mass spectrometer by using an adjustable magnetic field, to better solve the problem of low signal intensity of the existing radio frequency glow discharge mass spectrometer. The apparatus includes a sample introduction device which is provided with a sample introduction rod and on which samples are fixed; and an adjustable magnetic field enhancement portion which is provided with an outer casing and an electromagnet composed of an energizing solenoid and an iron core,the electromagnet is placed in the outer casing, and the adjustable magnetic field enhancement portion is fixed between the sample introduction rod of the sample introduction device and the samples.

An ion trap 1 comprises a magnetic field generator 2 arranged to generate a magnetic field and an array 3 of electrodes arranged to generate an electrostatic field including a turning point in electrical potential at a location where the magnetic field is substantially homogeneous. The array of electrodes 3 is planar and parallel to the direction of the magnetic field at the location, with the result that the ion trap can be described as a coplanar waveguide Penning trap.

The objective of the invention is to provide a device and a method for enhancing radio frequency glow discharge mass spectrum ion signal intensity through an annular magnetic field, and aims at solving the problem of low radio frequency glow discharge mass spectrum signal intensity at present. The device comprises a sample feeding device which is provided with a sample feeding rod and fixed ceramic gaskets; and an annular magnet enhancement part which is provided with a shell and an annular magnet, wherein the annular magnet is put in the shell, and the annular magnet enhancement part is fixedbetween the sample feeding rod and the ceramic gaskets in the sample feeding device.

A charged particle beam decelerating device includes a high-frequency cavity 34 provided on an orbit of a charged particle beam 1, and a phase synchronizing device 40 for synchronizing the charged particle beam 1 in the high-frequency cavity with a phase of a high-frequency electric field 4. By moving the high-frequency cavity 34 or changing an orbit length of the charged particle beam 1, the charged particle beam in the high-frequency cavity is synchronized with a phase of the high-frequency electric field 4.