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49834results about "Supporters" patented technology

Wafer holder, heater unit used for wafer prober and having wafer holder, and wafer prober

By wafer holder including a chuck top for mounting a wafer and a supporter supporting the chuck top and having flatness of at most 0.1 mm, a heater unit for a wafer prober and the wafer prober using the wafer holder, a wafer holder and a wafer prober apparatus hardly deformable even under high load and capable of effectively preventing contact failure, and capable of preventing temperature increase in a driving system when a semiconductor wafer having semiconductor chips with minute circuitry that requires high accuracy is heated can be provided. In the wafer holder of the present invention, the flatness of the supporter is preferably at most 0.05 mm, and more preferably at most 0.01 mm.
Owner:SUMITOMO ELECTRIC IND LTD

Electrostatic chuck assembly

Embodiments of the present invention provide a cost effective electrostatic chuck assembly capable of operating over a wide temperature range in an ultra-high vacuum environment while minimizing thermo-mechanical stresses within the electrostatic chuck assembly. In one embodiment, the electrostatic chuck assembly includes a dielectric body having chucking electrodes which comprise a metal matrix composite material with a coefficient of thermal expansion (CTE) that is matched to the CTE of the dielectric body.
Owner:APPLIED MATERIALS INC

Elastic Tube Alignment System For Precisely Locating Components

ActiveUS20130019455A1Smoothly and easily performedFacilitate their initial entryDeformable pinsPinsEngineering
An elastic tube alignment system for the mating of components utilizing the principle of elastic averaging. A plurality of geometrically separated elastic tube (male) alignment features are disposed on a first component, while a plurality of one-to-one corresponding aperture (female) alignment features are provided on a second component. During the mating of the components, each elastic tube and its respective aperture provide elastic deformation, which, on average, precisely aligns the components.
Owner:GM GLOBAL TECH OPERATIONS LLC

System for supporting and servicing a gas turbine engine

A power system includes a gas turbine engine, which may include a gear box. The gear box may include a pipe connection configured to receive a removable pipe. The power system may also include a moveable support configured to fasten to the pipe connection to at least partially support the gear box.
Owner:SOLAR TURBINES
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